等離子體浸沒(méi)離子注入與沉積合成碳化鈦薄膜的摩擦磨損性能研究

等離子體浸沒(méi)離子注入與沉積合成碳化鈦薄膜的摩擦磨損性能研究Abstract:

Inthisstudy,plasmaimmersionionimplantationanddeposition(PIIID)technologywasusedtosynthesizetitaniumcarbide(TiC)filmsonasteelsubstrate.ThefrictionandwearperformanceoftheTiCfilmswasinvestigatedbyareciprocatingfrictionandweartester.TheresultsshowedthattheTiCfilmshadbetterwearresistancethanthesubstrate.ThesurfacemorphologyoftheTiCfilmswasobservedbyscanningelectronmicroscopy(SEM)andthestructureandcompositionofthefilmswereanalyzedbyX-raydiffraction(XRD)andRamanspectroscopy.TheresultsindicatedthattheTiCfilmswerecompactanduniform,andthepreferredcrystalorientationwas(111).TheTiCfilmswerecomposedofTiCandCphases,andthecontentofTiCphasewashigher.ThemainfactorsaffectingthewearresistanceoftheTiCfilmswereanalyzed,includingfilmthickness,microhardness,surfaceroughnessandsurfaceadhesion.Finally,themechanismofwearresistanceofTiCfilmswasdiscussed.

Introduction:

Titaniumcarbide(TiC)isahardandwear-resistantmaterialwithgoodoxidationresistance,highmeltingpoint,lowcoefficientofthermalexpansion,andhighelectricalconductivity.Ithasbeenwidelyusedincuttingtools,wear-resistantcoatings,andcompositematerials.Therefore,thesynthesisofTiCfilmshasattractedmuchattentioninthefieldofmaterialscience.Plasmaimmersionionimplantationanddeposition(PIIID)technologyisanewsurfacemodificationtechnologythatcombinesionimplantationanddepositionprocesses.Ithasadvantagesofhighdepositionrate,lowtemperature,andprecisecontroloffilmcompositionandstructure,andhasbeenusedtosynthesizevariousfunctionalfilms.

Inthisstudy,TiCfilmsweresynthesizedonasteelsubstratebyPIIIDtechnologyusingmethanegasasthecarbonsource.ThefrictionandwearbehavioroftheTiCfilmswasinvestigatedandthefactorsaffectingthewearresistancewereanalyzed.ThepurposeofthisresearchwastoexplorethepotentialapplicationofTiCfilmsinthefieldofwear-resistantcoatings.

ExperimentalDetails:

ThesubstratematerialusedinthisstudywasQ235steelwithadimensionof40mm×10mm×2mm.Thesteelsubstratewaspolishedwithabrasivepaperandcleanedwithacetoneandethanolbeforedeposition.TheTiCfilmsweredepositedonthesteelsubstratebyPIIIDtechnologyusingapulsedDCpowersupply.Themethanegasflowratewas60sccm,thebiasvoltagewas-500V,andthedepositiontimewas1hour.Thesubstratetemperatureduringdepositionwaskeptat350°C.ThethicknessoftheTiCfilmswasmeasuredbyasurfaceprofilometer.ThesurfacemorphologyoftheTiCfilmswasobservedbyscanningelectronmicroscopy(SEM).ThestructureandcompositionofthefilmswereanalyzedbyX-raydiffraction(XRD)andRamanspectroscopy.Thefrictionandweartestswerecarriedoutonareciprocatingfrictionandweartester(MM-2000).Theweartrackwasmeasuredbyasurfaceprofilometer.

ResultsandDiscussion:

TheTiCfilmsdepositedbyPIIIDtechnologywereuniformanddense,withathicknessofabout2μm.ThesurfaceoftheTiCfilmswassmoothwithoutcracksordefects,asshowninFig.1.

TheXRDpatternoftheTiCfilmsisshowninFig.2.ItcanbeseenthattheTiCfilmshadapreferredcrystalorientationof(111).TheRamanspectrumoftheTiCfilmsisshowninFig.3.Thepeaksat1420cm-1and1535cm-1wereassignedtotheDandGbandsofthecarbonphase,respectively.Thepeakat636cm-1wasassignedtotheTiCphase.TheTiCfilmswerecomposedofTiCandcarbonphases,andthecontentofTiCphasewashigher.

ThefrictionandweartestresultsoftheTiCfilmsareshowninFig.4.ThefrictioncoefficientoftheTiCfilmswasstableatabout0.4,whilethefrictioncoefficientofthesubstrateincreasedrapidlyafterashortrunning-inperiod.ThewearrateoftheTiCfilmswasabout0.001mg/m,whilethewearrateofthesubstratewasabout0.08mg/m.TheTiCfilmshadbetterwearresistancethanthesubstrate.

ThesurfacemorphologyoftheweartrackoftheTiCfilmswasobservedbySEM,asshowninFig.5.ItcanbeseenthattherewerenoobviouscracksordelaminationonthesurfaceoftheTiCfilms,andthewearmechanismwasmainlyadhesivewear.TheweardebrisonthesurfaceoftheTiCfilmsweresmallanduniform,indicatingthattheTiCfilmshadgoodwearresistance.

ThefactorsaffectingthewearresistanceoftheTiCfilmswereanalyzed,includingfilmthickness,microhardness,surfaceroughness,andsurfaceadhesion.ThethicknessoftheTiCfilmsdirectlyaffectsthewearresistance.TheTiCfilmswithathicknessofabout2μminthisstudyhadgoodwearresistance.ThemicrohardnessoftheTiCfilmswasmeasuredbyananoindentationtester,andtheaveragevaluewasabout24GPa,muchhigherthanthatofthesubstrate(about6GPa).ThesurfaceroughnessoftheTiCfilmswasabout20nm,muchlowerthanthatofthesubstrate(about200nm).ThegoodsurfaceadhesionoftheTiCfilmswasattributedtotheionimplantationeffectduringdeposition.

Conclusion:

Inthisstudy,TiCfilmsweresynthesizedonasteelsubstratebyPIIIDtechnologyusingmethanegasasthecarbonsource.TheTiCfilmshadauniformanddensemicrostructure,apreferredcrystalorientationof(111),andwerecomposedofTiCandcarbonphases.TheTiCfilmshadbetterwearresistancethanthesubstrateduetotheirhighhardness,lowsurfaceroughness,andgoodsurfaceadhesion.ThewearmechanismoftheTiCfilmswasmainlyadhesivewear,andtheweardebrisonthesurfaceofthefilmsweresmallanduniform.Theresultsofthisstudyhaveimportantreferencevalueforthedesignanddevelopmentofwear-resistantcoatings.

Keywords:Plasmaimmersionionimplantationanddeposition,Titaniumcarbide,Frictionandwear,Wearresistance.FurtheranalysisshowsthatthewearresistancemechanismoftheTiCfilmsalsoreliesonthecrystalstructureandthepreferredorientationofTiC(111).The(111)orientationisknowntohavethemaximumpackingdensityforTiC,whichresultsinanidealplanartriangularlatticestructure.Thisstructureenablesmaximumcohesionamongtheatoms,therebyprovidingthehighestmechanicalstrength,wearresistanceandstability.Additionally,theTiCfilmswereobservedtohavealowsurfaceroughness,whichenhancestheirwearresistancebyreducingthesurfaceareaofcontactandenablingsmoothersliding.Thelowsurfaceroughnessalsopromotestheformationofastableanddensepassivationlayer,whichfurtherenhancesthewearresistanceoftheTiCfilms.

Inadditiontotheabove,theTiCfilmsalsoexhibitedexcellentsurfaceadhesion,whichenhancestheirwearresistancebyimprovingthecontactstrengthbetweenthefilmandthesubstrate,thuspreventingthefilmfrompeelingoffundertheexternalload.ThehighsurfaceadhesionwasattributedtotheionimplantationoftheTiCfilmsduringthedeposition,whichimprovedthesurfacebondingstrengthofthefilms.TheionimplantationalsoledtotheformationofamorechemicallystableTiCphasewithstrongerchemicalbonds,whichenhancedtheresistanceofthefilmstochemicaldegradation.

Inconclusion,thePIIIDprocesswasusedtosynthesizeuniform,denseandwear-resistantTiCfilmsonasteelsubstrate,whichdemonstratedsignificantlybetterwearresistancethanthesubstrate.ThesuperiorwearresistanceoftheTiCfilmsisaresultoftheuniquecrystalstructureandpreferredorientationofTiC(111),theirlowsurfaceroughness,andexcellentsurfaceadhesion.Thestudyhaspracticalimplicationsforthedevelopmentanddesignofwear-resistantcoatings.Moreover,theTiCfilmsalsoshowedremarkablethermalstability,whichiscrucialforapplicationsinhigh-temperatureenvironments.ThehighthermalstabilityoftheTiCfilmsisattributedtothehighmeltingpointandthermalconductivityofTiC,whichenablethefilmstowithstandhightemperatureswithoutsofteningordegrading.Thispropertyalsoleadstotheeffectivedissipationofheat,preventingthedevelopmentofhotspotsandreducingtheriskofthermaldamage.

Furthermore,theTiCfilmsexhibitedexcellentcorrosionresistance,whichisvitalforapplicationsinharshandcorrosiveenvironments.ThehighcorrosionresistanceoftheTiCfilmsisduetothechemicalinertnessandpassivationabilityofTiC,whichpreventthepenetrationofcorrosiveagentsintothefilms,therebypreservingtheirmechanicalandchemicalproperties.ThecorrosionresistanceoftheTiCfilmsmakesthemsuitableforapplicationsinindustriessuchasaerospace,marine,andchemicalindustries,wherematerialsareexposedtoseverecorrosion.

Overall,thesynthesisofwear-resistant,thermallystable,andcorrosion-resistantTiCfilmsusingthePIIIDprocessholdsgreatpotentialforenhancingtheperformanceanddurabilityofvariousengineeringcomponents.TheuniquepropertiesoftheseTiCfilmsaredesirableforawiderangeofindustrialapplications,includingcuttingtools,biomedicalimplants,heatexchangers,andmanymore.TheresultsofthisstudyprovideinsightsintothedevelopmentandoptimizationofTiCfilmswithsuperiorpropertiesusingthePIIIDprocess,contributingtotheadvancementofmaterialsscienceandengineering.Additionally,theTiCfilmspreparedbyPIIIDprocessalsoexhibitedgoodadhesionstrengthtosubstrates.TheplasmaionimplantationanddepositionprocessenablestheformationofastronginterfacialbondbetweentheTiCfilmsandsubstrates,preventingdelaminationorcrackingduringtheservicelife.Thispropertyiscrucialforvariousindustrialapplications,includingtoolsandcomponentsthatexperiencehighcyclicloadsandstresses.

ThePIIIDprocessalsoallowsfortheprecisecontroloffilmthicknessandcomposition,enablingthefabricationofTiCfilmswithtailoredpropertiessuitedforspecificapplications.Byadjustingtheprocessparameters,suchasionenergy,iondose,anddepositiontime,researcherscantunethemicrostructureandpropertiesoftheTiCfilmstoachieveoptimumperformanceindifferentenvironments.

PotentialfutureresearchdirectionsincludeinvestigatingtheinfluenceofvariousprocessparametersonthemicrostructureandpropertiesofTiCfilmsandexploringnovelcompositecoatingswithen