GB/T 25187-2024表面化學分析俄歇電子能譜選擇儀器性能參數(shù)的表述

ICS

71.040.40

CCS

G04

中華人民共和國國家標準

GB/T25187—2024/ISO15471：2016

代替GB/T25187—2010

表面化學分析俄歇電子能譜

選擇儀器性能參數(shù)的表述

Surfacechemicalanalysis—Augerelectronspectroscopy—Description

ofselectedinstrumentalperformanceparameters

（ISO15471：2016，IDT）

2024-11-28發(fā)布2025-06-01實施

國家市場監(jiān)督管理總局發(fā)布

國家標準化管理委員會

GB/T25187—2024/ISO15471：2016

目次

前言

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Ⅲ

引言

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Ⅳ

1

范圍

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1

2

規(guī)范性引用文件

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1

3

術語和定義

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4

符號和縮略語

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1

5

選擇儀器性能參數(shù)的表述

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1

5.1

分析方法

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5.2

樣品

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2

5.3

系統(tǒng)配置

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2

5.4

電子槍陰極

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2

5.5

橫向分辨和束流

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2

5.6

譜儀信號強度和能量分辨

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3

5.7

譜儀能量標

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3

5.8

譜儀強度線性

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3

5.9

譜儀響應函數(shù)

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3

5.10

譜儀參數(shù)

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3

5.11

圖像漂移

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4

5.12

真空環(huán)境

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4

參考文獻

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5

Ⅰ

GB/T25187—2024/ISO15471：2016

前言

本文件按照GB/T1.1—2020《標準化工作導則第1部分：標準化文件的結(jié)構和起草規(guī)則》的規(guī)

定起草。

本文件代替GB/T25187—2010《表面化學分析俄歇電子能譜選擇儀器性能參數(shù)的表述》，與

GB/T25187—2010相比，除結(jié)構調(diào)整和編輯性改動外，主要技術變化如下：

─更改了噪聲測量方法2（見5.6.3，2010年版的5.6.3）。

本文件等同采用ISO15471：2016《表面化學分析俄歇電子能譜選擇儀器性能參數(shù)的表述》。

請注意本文件的某些內(nèi)容可能涉及專利。本文件的發(fā)布機構不承擔識別專利的責任。

本文件由全國微束分析標準化技術委員會（SAC/TC38）提出并歸口。

本文件起草單位：廈門荷清教育咨詢有限公司、廈門大學、中國科學院化學研究所。

本文件主要起草人：岑丹霞、徐富春、李建輝、湯丁亮、劉芬、王水菊。

本文件于2010年首次發(fā)布，本次為第一次修訂。

Ⅲ

GB/T25187—2024/ISO15471：2016

引言

全球有多家廠商生產(chǎn)俄歇電子能譜儀（AES）和掃描俄歇電子顯微鏡（SAM）。盡管每臺儀器的

AES分析方法的基本原理是相同的，但儀器的具體設計和性能說明的方式各不相同。因此，通常很難比

較不同廠商生產(chǎn)的儀器性能。本文件提供一個基本項目單，以使所有俄歇電子能譜儀能以共同的方式來

表述。本文件無意取代廠商的說明書，廠商的說明書可能長達30頁或更多。本文件目的是使廠商說明

書中確定的某些項目具有一致和明確的含義。

Ⅳ

GB/T25187—2024/ISO15471：2016

表面化學分析俄歇電子能譜

選擇儀器性能參數(shù)的表述

1范圍

本文件規(guī)定了俄歇電子能譜儀特定性能參數(shù)的表述要求。

本文件適用于俄歇電子能譜儀的性能參數(shù)表述。

2規(guī)范性引用文件

下列文件中的內(nèi)容通過文中的規(guī)范性引用而構成本文件必不可少的條款。其中，注日期的引用文

件，僅該日期對應的版本適用于本文件；不注日期的引用文件，其最新版本（包括所有的修改單）適用

于本文件。

ISO18115?1表面化學分析詞匯第1部分：通用術語及譜學術語（Surfacechemicalanalys?

is—Vocabulary—Part1：Generaltermsandtermsusedinspectroscopy）

注：GB/T22461.1—2023表面化學分析詞匯第1部分：通用術語及譜學術語（ISO18115?1：2013，IDT）

3術語和定義

ISO18115?1界定的術語和定義適用于本文件。

4符號和縮略語

下列符號和縮略語適用于本文件。

AES：俄歇電子能譜（augerelectronspectroscopy）

俄歇電子能譜儀（augerelectronspectrometer）

FL：費米能級（fermilevel）

FWHM：半高峰寬（fullwidt