Sparc-le V 100KHz電源使用說(shuō)明書 (AE ADVANCED ENERGY)

AdvancedEnergyIndustries,Inc.

USER

1625SharpPointDrive

FortCollins,CO80525USA800.446.9167

Sparc-le?V

100kHz

5700364-F

November2002

?

UserManual

Sparc-le?V100kHz

5700364-F

AdvancedEnergy?

iv5700364-F

COPYRIGHT

ThismanualandtheinformationcontainedhereinisthepropertyofAdvancedEnergyIndustries,Inc.

Nopartofthismanualmaybereproducedorcopiedwithouttheexpresswritten

permissionofAdvancedEnergyIndustries,Inc.Anyunauthorizeduseofthismanualoritscontentsisstrictlyprohibited.Copyright?2000AdvancedEnergyIndustries,

Inc.AllRightsReserved.

DISCLAIMERANDLIMITATIONOFLIABILITY

TheinformationcontainedinthismanualissubjecttochangebyAdvancedEnergyIndustries,Inc.withoutpriornotice.AdvancedEnergyIndustries,Inc.makesno

warrantyofanykindwhatsoever,eitherexpressedorimplied,withrespecttothe

informationcontainedherein.AdvancedEnergyIndustries,Inc.shallnotbeliableindamages,ofwhateverkind,asaresultoftherelianceonoruseoftheinformation

containedherein.

PRODUCTUSAGESTATEMENT

ΔWArwxc:

Readthisentiremanualandallotherpublicationspertainingtotheworktobe

performedbeforeyouinstall,operate,ormaintainthisequipment.Practiceallplantandproductsafetyinstructionsandprecautions.Failuretofollowinstructionscancausepersonalinjuryand/orpropertydamage.Iftheequipmentisusedinamannernotspecifiedbythemanufacturertheprotectionprovidedbytheequipmentmaybeimpaired.Allpersonnelwhoworkwithorwhoareexposedtothisequipmentmust

takeprecautionstoprotectthemselvesagainstseriousorpossiblyfatalbodilyinjury.

AdvancedEnergyIndustries,Inc.,(AE)providesinformationonitsproductsand

associatedhazards,butitassumesnoresponsibilityfortheafter-saleoperationoftheequipmentorthesafetypracticesoftheowneroruser.Thisequipmentproducesorusespotentiallylethalhigh-voltage,high-current,radiofrequency(RF)energy.

NEVERDEFEATINTERLOCKSORGROUNDS.

Sparc-le?V100kHz

5700364-Fv

TRADEMARKS

ADVANCFD

ENERGY"

isaregisteredtrademarkofAdvancedEnergyIndustries,Inc.

AdvancedEnergyisaregisteredtrademarkofAdvancedEnergyIndustries,Inc.AEisaregisteredtrademarkofAdvancedEnergyIndustries,Inc.

SparcisaregisteredtrademarkofAdvancedEnergyIndustries,Inc.

Sparc-leisaregisteredtrademarkofAdvancedEnergyIndustries,Inc.Sparc-vsisatrademarkofAdvancedEnergyIndustries,Inc.

5700364-Fvii

TableofContents

Chapter.SafetyandProductComplianceGuidelines

ImportantSafetyInformation 1-1

InterpretingtheManual 1-1

TypeConventions 1-1

Danger,Warning,andCautionBoxes 1-1

SafetyGuidelines 1-2

RulesforSafeInstallationandOperation 1-2

InterpretingProductLabels 1-3

ProductCompliance 1-3

ProductCertification 1-3

SafetyandComplianceDirectivesandStandards 1-4

ElectromagneticCompatibility(EMC)DirectivesandStandards 1-4

SafetyDirectivesandstandards 1-4

ConditionsofUse 1-4

Chapter.Theory

TheoryofOperation 2-1

PassiveMode 2-1

ActiveArcMode 2-2

Self-RunMode 2-4

Chapter.Specifications

GeneralDescription 3-1

Self-RunMode 3-1

ActiveArcMode 3-1

PassiveMode 3-1

Control 3-2

ArcCounting 3-2

SupervisoryCircuit 3-2

FunctionalSpecifications 3-2

PhysicalSpecifications 3-5

ElectricalSpecifications 3-5

EnvironmentalSpecifications 3-6

Chapter.Connectors,Indicators,andControls

Connectors 4-1

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viii5700364-F

InputACPowerConnector 4-1

InputDCPowerConnector(Standard) 4-1

OutputDCPowerConnector(Standard) 4-2

InputandOutputPowerConnector(CE) 4-3

InputDC/OutputDCConnectors(Optional) 4-3

PinDescriptionsforMaleConnector 4-4

PinDescriptionsforFemaleConnector 4-5

UserPortConnector 4-5

SelectingReverseRecoveryTime 4-9

SelectingFrequency 4-9

UsingandMonitoringtheUserPort 4-12

Master/Slave/CEXConnector 4-13

HostPortConnector 4-14

FrontPanelIndicators 4-14

Chapter.Installation

InstallingtheSparc-leV 5-1

UnpackingandInspectingtheUnit 5-1

DesignConsiderations 5-1

CoolingRequirements 5-1

InterlockSwitch 5-1

MakingRearPanelConnections 5-2

Grounding 5-2

ConnectingInputPower 5-2

ConnectingtheInputandOutput 5-2

AdjustingtheTHandle(ReverseVoltage) 5-3

SettingUpaMaster/SlaveSystem 5-4

WhatYouNeed 5-4

Procedure 5-5

SettingUpaCEXSystem 5-6

Chapter.Operation

HowtheSparc-leVUnitOperates 6-1

PowerSupplyOutputImpedance 6-1

PowerSupplyOutputImpedancewithSparc-leV 6-1

OutputVoltage 6-3

MDX-LPowerSupplyExample 6-4

CommunicatingThroughtheHostPort 6-6

WhatistheMessagePacket? 6-6

Header 6-7

Optional 6-8

Command 6-8

Data(DataBytes) 6-8

Checksum 6-8

Sparc-le?V100kHz

5700364-Fix

IdealCommunicationsTransaction 6-8

CommandStatusResponse(CSR)Codes 6-10

HostPortCommandDescriptions 6-11

SettingUpHostPortParameters 6-14

SettingUptheHostProtocol 6-14

SettingtheHostAddress 6-15

SettingtheBaudRate 6-15

SettingthePhysicalProtocol 6-16

CommunicatingThroughtheFrontPanel 6-16

FactorySettings 6-16

ProgrammingOperationalSettings 6-17

SettingtheControlMode 6-17

SettingtheArcHandlingMode 6-18

SettingtheFrequency 6-18

SettingtheReverseRecoveryTime 6-19

SettingtheCrowbarDelay 6-19

RequestingReadbackInformation 6-20

ArcCount 6-20

ReverseVoltageSetting 6-21

LockingtheFrontPanelSettings 6-21

InterpretingErrorCodes 6-21

Chapter.TroubleshootingandGlobalCustomerSupport

BeforeCallingAEGlobalCustomerSupport 7-1

CheckswiththePowerOff 7-1

CheckswiththePowerOn 7-1

AEGlobalCustomerSupport 7-2

ReturningUnitsforRepair 7-3

Warranty 7-3

AuthorizedReturns 7-4

WarrantyStatement 7-4

5700364-Fxi

ListofFigures

TargetvoltageduringPassivemode 2-1

TargetcurrentduringPassivemode 2-2

TargetvoltageduringActiveArcmode 2-3

TargetcurrentduringActiveArcmode 2-3

TargetvoltageduringSelfRunmode 2-4

InputDCpowerconnectors(UHFoption) 4-2

CEinput/outputconnector 4-3

OptionalMS-3470DCinputandDCoutputconnectorswithpinlabels 4-4

HowtousetheUserport 4-13

Hostportpinconnections 4-14

FrontviewofSparc-leV 4-18

RearviewofSparc-leV(230V)withmilitarystyleconnector 4-19

RearviewofSparc-leV(115V)withUHFconnector 4-20

RearviewofSparc-leV50kHz(230V)withCEconnector 4-21

TopviewofSparc-leV 4-22

THandleadjustment 5-4

Master/Slaveconfiguration 5-6

CEXconfiguration 5-7

Outputloadimpedance 6-1

SystemequivalentcircuitwithDCpowersupply,Sparc-leV,andchamberload 6-2

Loadwaveformsofoutputvoltageandoutputcurrent 6-2

Voltageoutput(equation) 6-2

Impedancebasedonoutputvoltageandcurrent(equation) 6-3

Outputimpedanceseenbythepowersupply(equation) 6-3

PowersupplyoutputvoltageasaffectedbySparc-leVunit 6-4

AnMDX-L12unit’soutputoperatingcapability 6-4

ExampleMDX-L12outputpowercapability 6-6

Graphicrepresentationofamessagepacket 6-7

Communicationstransaction 6-9

Frontpaneloperations 6-14

Crowbartimedelay(50μsexample) 6-20

5700364-Fxiii

ListofTables

Electromagneticcompatibility(EMC)directivesandstandards 1-4

Safetydirectivesandstandards 1-4

FunctionalSpecifications 3-2

Self-RunReverseVoltageTimes 3-3

ActiveArcReverseVoltageTimes 3-4

PhysicalSpecifications 3-5

ElectricalSpecifications 3-6

EnvironmentalSpecifications 3-6

PinDescriptionsforMaleConnector 4-4

PinDescriptionsforFemaleConnector 4-5

UserPortPinDescriptions 4-6

Selectingreverserecoverytime 4-9

FrequencySettings 4-9

FrontPanelIndicators 4-14

HostPortCommands 6-11

BaudRateSettings 6-15

PhysicalProtocol 6-16

FactorySettings 6-17

ErrorCodes 6-22

GlobalCustomerSupportlocations 7-2

Sparc-le?V100kHz

Chapter

1

SafetyandProductComplianceGuidelines

IMPORTANTSAFETYINFORMATION

ToensuresafeinstallationandoperationoftheAdvancedEnergy?Sparc-le?V,readandunderstandthismanualbeforeattemptingtoinstallandoperatethisunit.Ata

minimum,readandfollowthesafetyinstructionsandpracticesdocumentedunder

“SafetyGuidelines”on2

.

INTERPRETINGTHEMANUAL

Thefollowingsectionsexplainthedocumenttypeconventionsandthedanger,warning,andcautionboxesthatprovideinformationaboutthespecificlevelsofhazardseriousness.

TypeConventions

Pleasenotethefollowingtypeconventions:

?Pinandsignalnamesappearincapitalizeditalics(POWER_ON).

?Newtermsappearinitalicizedtext.

?Unitlabels(switches,indicators,andsoon)appearinboldfacetext(MODIFY).

?Commands(162)andcommandnames(setpoint)appearinboldface,lowercasetext.

Danger,Warning,andCautionBoxes

Thissymbolrepresentsimportantnotesconcerningpotentialharmtopeople,thisunit,orassociatedequipment.AdvancedEnergy?includesthissymbolinDanger,

Warning,andCautionboxestoidentifyspecificlevelsofhazardseriousness.

DANGERindicatesanimminentlyhazardoussituationthat,ifnot

avoided,willresultindeathorseriousinjury.DANGERislimitedtothemostextremesituations.

5700364-FSafetyandProductComplianceGuidelines1-1

AdvancedEnergy?

WARNINGindicatesapotentiallyhazardoussituationthat,ifnotavoided,couldresultindeathorseriousinjury,and/orpropertydamage.

Δcxuox:

CAUTIONindicatesapotentiallyhazardoussituationthat,ifnotavoided,couldresultinminorormoderateinjury,and/ordamagetoproperty.

CAUTIONisalsousedforproperty-damage-onlyaccidents.

SAFETYGUIDELINES

Reviewthefollowinginformationbeforeattemptingtoinstallandoperatetheproduct.

RulesforSafeInstallationandOperation

Pleasenotethefollowingrulesforsafeinstallationandoperationoftheproduct.

?Donotattempttoinstalloroperatethisequipmentwithoutpropertraining.

?Ensurethatthisunitisproperlygrounded.

?Ensurethatallcablesareproperlyconnected.

?Verifythatinputlinevoltageandcurrentcapacityarewithinspecificationsbeforeturningonthepowersupplies.

?Useproperelectrostaticdischarge(ESD)precautions.

?Alwaysbecarefularoundthisequipment.

1-2SafetyandProductComplianceGuidelines5700364-F

Sparc-le?V100kHz

InterpretingProductLabels

Thefollowinglabelsmayappearonyourunit:

1028

1029

1027

1024

Highvoltage

ProtectiveEarthground

Refertomanualformoreinformation

Shortcircuitprotected

PRODUCTCOMPLIANCE

Thefollowingsectionsincludeinformationaboutunitcomplianceandcertification,includingtheconditionsofuserequiredtobeincompliancewiththestandardsanddirectives.

ProductCertification

Certainoptionsofthisproductarecertifiedby:

?CEmarking,selfaddressedbyAEComplianceEngineering

?EMCmeasurements,verifiedbyanotifiedbodysuchasTüV

Formoreinformation,refertotheletterofconformance(US)ordeclarationofconformity(EU)accompanyingtheproduct.

5700364-FSafetyandProductComplianceGuidelines1-3

AdvancedEnergy?

SafetyandComplianceDirectivesandStandards

Certainoptionsofthisunithavebeentestedforandcomplywiththefollowing

electromagneticcompatibility(EMC)andsafetydirectivesandstandardsandindustryguidelines.

Note:ThisdevicemustbeinstalledandusedonlyincompliancewiththedirectivesandstandardslistedinadditiontoVDE0113,EN60204(IEC60204),and

applicablerequirements.

ELECTROMAGNETICCOMPATIBILITY(EMC)DIRECTIVESANDSTANDARDS

Table1-1.Electromagneticcompatibility(EMC)directivesandstandards

ReferenceNumber

Description

89/336/EEC

ECCouncildirectiveontheapproximationofthelawsoftheMemberStatesrelatingtoelectromagneticcompatibility(EMCDirective)

EN50082-2

ElectromagneticCompatibility(genericimmunitystandard—industrial)

EN55011

Limitsandmethodsofmeasurementofradiodisturbancecharacteristicsofindustrial,scientific,medical(ISM)radiofrequencyequipment(ClassA,Group2)(CISPR11)

SAFETYDIRECTIVESANDSTANDARDS

Table1-2.Safetydirectivesandstandards

ReferenceNumber

Description

73/23/EEC

ECCouncildirectiveontheharmonizationofthelawsofthe

MemberStatesrelatingtoelectricalequipmentdesignedforusewithincertainvoltagelimits(LVD-LowVoltageDirective)

EN50178

Electronicequipmentforuseinelectricalpowerinstallations

ConditionsofUse

Tocomplywiththestateddirectivesandstandards,youmustmeetthefollowingconditionsofuse:

?Beforemakinganyotherconnectiontothisdevice,connecttheauxiliary

ProtectiveEarthgroundterminaltoalocalearthgroundwithacopperwirethatissizedaccordingtotheapplicablerequirements.

1-4SafetyandProductComplianceGuidelines5700364-F

Sparc-le?V100kHz

?InstallandoperatethisdeviceinanovervoltagecategoryIIinstallationonly.

?Installandoperatethisdeviceonlyinapollutiondegree2orbetterenvironment,whichmeansanindoorlocationsuchasacomputerroom,office,orfactoryfloorwhereonlynonconductivepollutionoccursduringoperation.Occasionally,

condensationcausestemporaryconductivitywhenthedeviceisnotoperating.

?Useonlyashieldedpowercableontheoutputpowerconnector.

5700364-FSafetyandProductComplianceGuidelines1-5

Sparc-le?V100kHz

Chapter

2

Theory

THEORYOFOPERATION

TheSparc-le?VisinstalledinseriesbetweentheMDXpowersupplyoutputandthechamber.WerecommendthatyoupositiontheSparc-leVwithintenfeetofthe

chamber,becausetheSparc-leV’scircuitryrespondstoarcswithinmicrosecondsandgreaterdistancescreatetoomuchimpedance.TheSparc-leVfunctionsbymonitoringitsoutputinrelationtotheinput.Whentheoutputvoltagedropsbelow50%ofthe

inputvoltage(or140Vfortheoption6),thearcenergyfromthechamberisdivertedawayfromthechamberthroughtheSparc-leV.Thisextinguishesthearcbefore

currentflowdamageoccurs.

TheSparc-leVhasthreemodesofoperationthatareselectedfromthefrontpanel.TheyarePassive,ActiveArc,andSelf-Run.

PassiveMode

TheARC-OUTenhancementcircuitryisactivewhentheSparc-leVisinpassive

mode.Becausepassivemodeallowssomeenergyinanarc,thismodecanbeusedtocleantargets.TheARC-OUTcircuitconsistsofpassivecomponentsandclamp

rectifiersonly.Duringanarc,thecurrentisreversed,whichcommutatesoffthearc.ThetargetvoltageandcurrentforthismodeareshowninFigure2-1andFigure2-2.

0V

-400V

Arcevent

Time(1μs/edc/d)iv)

1125

Figure2-1.TargetvoltageduringPassivemode

5700364-FTheory2-1

AdvancedEnergy?

0A

20A

40A

60A

Arcevent

Time(1μs/c/d)iv)

Figure2-2.TargetcurrentduringPassivemode

ActiveArcMode

Intheactivearcmode,theSparc-leVrespondstoconditionsinthechamber.WhentheSparc-leVdetectsanarc,itimmediatelydivertsthetargetcurrentandstarvesthearc.Byremovingthecurrentsourceand,forashorttime,reversingthetargetvoltage,thearcsarequenchedquickly.TheSparc-leVcanhandleupto50,000arcsper

second.Thedelaytimebetweenresponsestoarcsconsistsofthereverserecovery

timeplusa10μslockouttime.Thetargetvoltageandcurrentforthismodeareshownin

Figure2-3

and

Figure2-4

.

2-2Theory5700364-F

Sparc-le?V100kHz

0V

-600V

Sparc-leTriggered

Time(1μs/edc/d)iv)

ArcEvent

0A

-20A

Figure2-3.TargetvoltageduringActiveArcmode

Time(1μs/edc/d)iv)

ArcEvent

1128

Figure2-4.TargetcurrentduringActiveArcmode

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AdvancedEnergy?

Self-RunMode

YoumaywanttouseSelf-Runmodeforsputteringapplicationswithinsulativeoxidecoatings,cleaningnewtargets,andpreventingarcs.WhenintheSelf-Runmode,theSparc-leVcontinuouslyengagesavariablefrequencyoscillator,triggeringthepowerswitchesatthefrequencyyouchoose.Thustheunitfirstdischargesthechamber

capacitanceandthenreversesthechambervoltagefortheamountoftimeyouselect.Thisvoltagereversalonthetargetpreventschargebuild-uponthesystemsurfaces

0V

600V

-

andslowsinsulatingfilmbuild-up.WhenintheSelf-Runmode,theSparc-leVwillhandleanyhardarcsaswell.ThetargetvoltageforthismodeisshowninFigure2-5.

ramm

Time(1S/div)

Sparc-le

f-activated

Figure2-5.TargetvoltageduringSelfRunmode

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Sparc-le?V100kHz

Chapter

3

Specifications

GENERALDESCRIPTION

TheSparc-le?V(SmallPackageArcRepressionCircuit-LowEnergyVariable)unitisanadd-onaccessoryfortheAdvancedEnergy?magnetrondrivepowersupplies

withoutputcurrentsunder30A.Itsmainfunctionistoenhancethearc-handling

capabilityoftheMDXpowersupply.EventhoughtheMDXpowersuppliesexhibitexcellentarc-handlingcharacteristics(suchaslowoutputenergystorageandrecoveryresponsetimetohardarcsofunder10ms),thedemandforimprovedfilmqualitywithevenfewerdefectshasarisen.ThisdemandhasledtothedevelopmentoftheSparc-leVtechnology,whichclearsarcsinmicrosecondsanddramaticallyreducesthenumberofhardarcs.TheVstandsfor“variable”andmeansthatyoucanadjustsettingsto

optimizearc-handlinginyourprocess.

Self-RunMode

Theself-runmodeistheSparc-leV'sprimaryoperatingmode.Whenthismodeis

selected,theSparc-leVpulsesitsswitchescontinuously,shortingoutandreversingthetargetvoltageforthetimeandatthefrequencyyouhaveselected.Thisreversalofvoltagepreventschargebuilduponthetargetsurfaces,slowsthegrowthofinsulativefilmsonthetarget,andextendstargetlife.Inself-runmode,thefrequency,reverse

voltagetime,reversevoltage,andhardarcdelayarealladjustable.

ActiveArcMode

Inactivearcmode,thetargetcurrentisimmediatelyshuntedawayfromthetarget

whenanarcisdetected.Whenthecurrentsourceisremovedandthetargetvoltageisreversedforashorttime,thearcsarequenchedquickly.Inthismode,reversevoltagetimeisselectableatthefrontpanelfor1to10μs.Reversevoltageandhardarcdelay

arebothadjustableaswell.

PASSIVEMODE

Forcertaintargetmaterials,somearcenergyisrequiredtoinitiallycleanthetargetofarcingsites.Inthesecases,theSparc-leVissoeffectiveinloweringarcenergythatalongerperiodisnecessarytoconditionanewtarget.ExperiencehasshownthatwhenAE'sARC-OUT?enhancementcircuitryinthestandardMDXisusedwiththe

passivemodeselectedontheSparc-leV,thetargetiscleanedmorequicklythanwithastandardMDXsupplyalone.TheSparc-leV'spassivemodecanalsobeusedwitholderMDXmodelsnothavingthiscircuitry.WhentheSparc-leVisinpassivemode,theARC-OUTenhancementcircuitintheSparc-leVisautomaticallyswitchedon.ARC-OUTtimeisfixedat5μs.

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AdvancedEnergy?

CONTROL

TheSparc-leVmaybecontrolledlocally(fromtheSparc-leVfrontpanel)or

remotely(throughgalvanicallyisolatedUserorHostports).TheUserinterface

connectorisa25-pin,female,subminiature-DlocatedontherearoftheSparc-leV(see

“UserPortConnector”on5

).TheHostportisa9-pinfemale

subminiature-Dconnectorlocatedontherearpanel(see

“HostPortConnector”on

14

).

ARCCOUNTING

Tofindthenumberofhardarcs,microarcs,ortotalarcs,youcanmonitorthroughtheUserorHostportsorcheckthefrontpaneldisplay.

SUPERVISORYCIRCUIT

AninternalsupervisorycircuitwithintheSparc-leVmonitorsitsfunctionintheself-

runandactivearc-handlingmodes.ThepurposeofthiscircuitistonotifytheoperatorthattheSparc-leVisnotfunctioningproperly;thispreventsyieldlossincritical

processes.Theloadcurrentmustexceed1.5Aandtheinputvoltagemustexceed150Vbeforethesupervisorycircuitbecomesoperational.Inthecaseofaunit

malfunction,TheSUPERVISORYLEDontheSparc-leVfrontpanellightsandasignalisproducedattheSparc-leVUserportandHostport.However,whilethe

supervisorycircuitisengaged,errorconditionsdonotgenerateerrormessagesonthefrontpanel.

FUNCTIONALSPECIFICATIONS

Thefollowingtableliststhefunctionalspecifications.

Table3-1.FunctionalSpecifications

ControlMode

Local(fromthefrontpanel)orremote(throughtheUserportofHostport)

Arc-handling

Characteristics

?50,000arc/sec.maximum

?1to10μsselectablearcreversetime

?1,800Vabsolutemaximuminputdcvoltage

?150Vminimumto1000Vmaximuminputoperatingrange

?10μsdelaybeforenextarccanbeprocessed

3-2Specifications5700364-F

Sparc-le?V100kHz

Table3-1.FunctionalSpecifications(Continued)

ArcCounting

Countsanddisplaysminorarcs,hardarcs,andtotalarcupto9,999

ReverseVoltageTime

Self-run

Adjustablein1μsincrements,withreversetimerangedependingonfrequency:

Table3-2.Self-RunReverseVoltageTimes

FrequencyRange

(kHz)

ReverseTimeRange

(μsec)

1to5and20to50

1to10

51to55

1to7

56to60

1to6

61to65

1to5

66to70

1to4

71to75

1to3

80to100

1or2

5700364-FSpecifications