Ticer埋阻材料測試結(jié)果匯總

1、Ticer埋阻材料測試結(jié)果匯總SME P&D: 劉涌，時睿智SMST R&D:羅永紅，宗澤源Update：2015-2-3目錄目錄l 方阻率測試板第一次SES后電阻值和尺寸測量結(jié)果l 方阻率測試板棕化后電阻值測量結(jié)果l ESD測試板SES后電阻值和尺寸測量結(jié)果l 方阻率測試板層壓后電阻值測量結(jié)果l ESD測試板方阻率隨電阻設(shè)計變化趨勢增補實驗l 方阻率測試板過熱沖擊后電阻值測量結(jié)果l ESD測試板阻焊前處理后電阻值測量結(jié)果l ESD測試板電測試結(jié)果相對阻焊前處理后電阻值該變量l ESD初步測試結(jié)果l ESD測試板電阻制程能力和分布l ESD測試結(jié)果方阻率測試板第一次SES后電阻

2、值和尺寸測量結(jié)果2014-12-18實驗?zāi)康膌測量Ticer埋阻材料方阻率穩(wěn)定性。測試項目l方阻大小為0.5、1、5cm，測量埋阻材料在經(jīng)過SES一遍/兩遍后的阻值以及長/寬、經(jīng)過棕化后的阻值以及長/寬、經(jīng)過層壓后阻值、經(jīng)過熱沖擊后阻值。測試圖形背景背景方阻率測試單個Unit測試圖形5cm*5cm1cm*1cm0.5cm*0.5cm1829310411512613714方阻率測試Panel：因銅箔較小，舍棄兩邊各一列Unit，Unit編號如左圖所示當前狀態(tài)l4塊方阻率測試板，兩塊進行了第一次SES，兩塊只進行了一次銅箔蝕刻留用。測 試了兩塊進行SES板的阻值和電阻尺寸。測試設(shè)備l電阻值：日置H

3、IOKI 3541電阻計l尺寸：三維測量儀實驗結(jié)果實驗結(jié)果編號電阻值（）尺寸（mm）方阻率（）panelUnit號0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmLWLWLWpanel1151.738 50.872 48.358 5.0693 4.9498 10.0761 9.9931 50.0622 49.9901 50.52 50.45 48.29 251.108 50.852 48.395 5.0432 4.9778 10.0506 9.9566 50.0698 49.9662 50.45 50.38 48.29 351.857 50.977 48.087 5.0512

4、 4.9958 10.0664 10.0007 50.0679 49.9672 51.29 50.64 47.99 452.703 51.682 47.960 5.0549 4.9748 10.0509 9.9802 50.0540 49.9836 51.87 51.32 47.89 552.023 51.925 48.485 5.0489 5.0119 10.0673 10.0032 50.0680 49.9782 51.64 51.59 48.40 653.163 51.646 48.250 5.0509 5.0524 10.0418 9.9777 50.0506 50.0081 53.1

5、8 51.32 48.21 752.022 51.208 48.538 5.0692 4.9859 10.0634 10.0108 50.0594 49.9750 51.17 50.94 48.46 852.737 52.201 49.860 5.0594 4.9784 10.0333 9.9953 50.0656 49.9767 51.89 52.00 49.77 952.054 52.042 49.933 5.0247 4.9829 10.0418 9.9618 50.0612 49.9830 51.62 51.63 49.86 1051.702 52.831 49.517 5.0502

6、4.9759 10.0523 9.9793 50.0657 50.0012 50.94 52.45 49.45 1152.875 52.300 49.772 5.0509 4.9674 10.0613 9.9648 50.0727 49.9849 52.00 51.80 49.68 1252.576 52.465 49.843 5.0489 4.9654 10.0689 9.9687 50.0581 50.0065 51.71 51.94 49.79 1351.854 52.052 50.076 5.0430 4.9752 10.0530 9.9781 50.0590 49.9985 51.1

7、6 51.66 50.02 1452.687 51.743 49.800 5.0509 4.9774 10.0467 9.9829 50.0636 49.9861 51.92 51.41 49.72 panel2151.318 51.492 48.452 5.0456 4.9799 10.0445 9.9748 50.0554 49.9870 50.65 51.13 48.39 252.047 57.094 48.221 5.0406 4.9802 10.0529 9.9768 50.0533 49.9811 51.42 56.66 48.15 351.045 51.482 47.965 5.

8、0403 4.9789 10.0449 9.9773 50.0509 49.9824 50.42 51.14 47.90 452.333 51.434 48.158 5.0407 4.9782 10.0509 9.9795 50.0525 49.9915 51.68 51.07 48.10 551.325 51.705 48.430 5.0471 4.9786 10.0520 9.9762 50.0529 49.9805 50.63 51.32 48.36 652.974 51.233 48.362 5.0421 4.9766 10.0469 9.9751 50.0520 49.9930 52

9、.29 50.87 48.30 752.744 52.097 48.624 5.0500 4.9797 10.0445 9.9764 50.0545 49.9899 52.01 51.74 48.56 851.567 50.020 48.942 5.0432 4.9772 10.0465 9.9752 50.0556 49.9863 50.89 49.67 48.87 950.430 50.629 48.835 5.0416 4.9787 10.0551 9.9770 50.0550 49.9800 49.80 50.24 48.76 1051.508 50.765 48.675 5.0413

10、 4.9734 10.0478 9.9759 50.0518 49.9786 50.81 50.40 48.60 1151.278 50.561 48.752 5.0439 4.9744 10.0485 9.9764 50.0559 49.9925 50.57 50.20 48.69 1250.871 50.837 48.980 5.0422 4.9755 10.0486 9.9763 50.0553 49.9851 50.20 50.47 48.91 1351.737 50.994 49.192 5.0434 4.9740 10.0485 9.9777 50.0562 49.9956 51.

11、03 50.63 49.13 1450.477 50.164 49.236 5.0469 4.9772 10.0435 9.9761 50.0553 49.9861 49.78 49.83 49.17 Note: 紅字部分電阻值異常實驗結(jié)果實驗結(jié)果0.5、1、5cm方阻的方阻率平均值分別為51.20、51.25、48.78。從圖中能看出0.5和1cm方阻率整體偏上限；5cm的方阻率偏下限，分布上呈現(xiàn)異常。Ticer resistance material Evaluation Result（Update with 28 samples）TTM Proprietary and Confident

12、ial71. The sheet resistances after SES are shown in the table. It is very close to spec from the suppler.2. Other test items are on going.No.SupplierSpec. /Resistor size(Length Width)Sheet resistanceAverage /MAX /MIN /RStdev3stdev/Aver (Aver-Spec)/SpecSample size1TCR50.005%5mm 5mm51.19853.17949.7803

13、.3990.7874.61%2.40%28210mm 10mm51.24656.66249.6656.9971.2657.41%2.49%28350mm 50mm48.77650.01547.8932.1220.6644.08%-2.45%28方阻率測試板棕化后電阻值測量結(jié)果2014-12-23編號SES后電阻值（）棕化后電阻值（）(棕化后-SES后)/SES后panelUnit號0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.7850.58%0.41%0.88%251.10850.85248.39

14、551.49851.11648.8820.76%0.52%1.01%351.85750.97748.08752.12151.18548.6720.51%0.41%1.22%452.70351.68247.9652.95651.96448.270.48%0.55%0.65%552.02351.92548.48552.34552.15548.7660.62%0.44%0.58%653.16351.64648.2553.4851.91548.5290.60%0.52%0.58%752.02251.20848.53852.4251.44448.8820.77%0.46%0.71%852.73752.2

15、0149.8653.00452.46350.2850.51%0.50%0.85%952.05452.04249.93352.32452.28950.5590.52%0.47%1.25%1051.70252.83149.51752.08152.47449.8150.73%-0.68%0.60%1152.87552.349.77253.17552.59150.3310.57%0.56%1.12%1252.57652.46549.84352.86752.80750.3120.55%0.65%0.94%1351.85452.05250.07652.31452.30950.510.89%0.49%0.8

16、7%1452.68751.74349.853.01952.10250.4780.63%0.69%1.36%panel2151.31851.49248.45251.89151.92849.1471.12%0.85%1.43%252.04757.09448.22152.3958.3349.0770.66%2.16%1.78%351.04551.48247.96551.31451.72248.2830.53%0.47%0.66%452.33351.43448.15852.59651.67748.4220.50%0.47%0.55%551.32551.70548.4351.59751.97248.66

17、80.53%0.52%0.49%652.97451.23348.36253.27351.46748.7180.56%0.46%0.74%752.74452.09748.62453.00552.3749.9150.49%0.52%2.66%851.56750.0248.94252.15750.33449.5611.14%0.63%1.26%950.4350.62948.83550.66650.85849.2390.47%0.45%0.83%1051.50850.76548.67551.83551.04149.0950.63%0.54%0.86%1151.27850.56148.75251.558

18、51.05549.0790.55%0.98%0.67%1250.87150.83748.9851.1951.06649.2270.63%0.45%0.50%1351.73750.99449.19251.99251.22949.5910.49%0.46%0.81%1450.47750.16449.23650.72350.6449.7330.49%0.95%1.01%Aver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%實驗結(jié)果實驗結(jié)果Note：3號棕化線實驗結(jié)果實驗結(jié)果棕化后電阻的平均改變率在1%以內(nèi)，優(yōu)于Ohmega 50方阻的9.71

19、%和10.11改變量（數(shù)據(jù)來源“存放時間對電阻的影響”， micro-etching 分別為1.6m和2.0m ）。SES后棕化后0.5cm1cm5cm0.5cm1cm5cmPp1.050.661.261.120.591.15Ppk0.550.330.640.130.140.84電阻值改變量(棕化后-SES后)/SES后0.5cm1cm5cmAver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%TOC 50/TreatmentBatch 1Batch 2AvgAfter alkaline etching51.58 51.61 50.83

20、 50.85 Brown oxide with 1.6um micro-etching54.57 54.58 57.75 57.81 Brown oxide with 2.0um micro-etching55.64 55.65 57.11 57.15 Changes in micro-etching 1.6m5.78%5.77%13.60% 13.69%9.71%Changes in micro-etching 2.0m7.87%7.84%12.34% 12.39% 10.11%Ticer 50/ ESD測試板SES后電阻值和尺寸測量結(jié)果2014-12-23實驗?zāi)康膌測試Ticer埋阻材料抗

21、ESD性能測試圖形背景背景當前狀態(tài)l4塊ESD測試板，兩塊進行了SES，兩塊電鍍后未DES，留用。測試了兩塊進行SES板的阻值和電阻尺寸。部分Unit在SES前因干膜粘附不牢，導(dǎo)致電阻兩端的銅面在做SES時被滲蝕，這部分電阻舍去，未進行測量。測量Set內(nèi)第10行Unit內(nèi)上部電阻，如有下部電阻被測量會特地標示出。測試板的Set（左圖）圖形和其內(nèi)的Unit（上圖）圖形；其中Set內(nèi)有20行11列個Unit，每個Unit有上下兩個相同的電阻設(shè)計。A1A2A3A4B1B2B3B4C1C2C3C4D1D2D3D4E1E2E3E4F1F2F3F4G1G2G3G4測試板Panel及其內(nèi)部各Set編號Pan

22、el 1 & 2 電阻長寬測量值電阻長寬測量值Panel 1Panel 2WidthLengthNote: 兩行橫坐標數(shù)值中上一行為電阻設(shè)計長度，下一行為電阻設(shè)計寬度。Panel 1 vs. 2 電阻實際尺寸與設(shè)計值差異電阻實際尺寸與設(shè)計值差異Note:1. 兩行橫坐標數(shù)值中上一行為電阻設(shè)計長度，下一行為電阻設(shè)計寬度； 2. D-value為測量值與設(shè)計值的差值。1. 電阻寬度由DES決定，Panel 1蝕刻速度為2.8m/min，Panel 2為2.65m/min。從左上圖可知，蝕刻后電阻的寬度與設(shè)計值之差Panel 1更小，波動也更小。一般的，蝕刻線速度越慢，蝕刻量越多，寬度越窄，

23、即更接近設(shè)計值。左上圖結(jié)果與這一結(jié)論相反，需要結(jié)合其他變量再分析。2. 電阻的長度由SES決定，Panel 1蝕刻速度為3.6m/min，Panel 2為4m/min。從左下圖可知，蝕刻后電阻的長度與設(shè)計值之差Panel 1更小，波動也更小。 3. 電阻制造尺寸補償為寬度增加38m，長度減少50m。從左邊的兩張圖能發(fā)現(xiàn)，不同寬度和長度設(shè)計對補償量要求差異較大，在保持當前時刻量下可以依據(jù)左圖進行差異化補償。Panel 1 vs. 2 方阻率差異方阻率差異Note: 兩行橫坐標數(shù)值中上一行為電阻設(shè)計長度，下一行為電阻設(shè)計寬度。1. 方阻率隨著設(shè)計電阻寬度的增加越接近標準值，相同的電阻寬度設(shè)計，長度

24、越長方阻率越接近標準值。2. 按照電阻的面積排列（左下圖），方阻率基本是隨面積的增加而更接近標準值。LCSM電阻尺寸測量電阻尺寸測量A3-2A3-1Note: 兩行橫坐標數(shù)值中上一行為電阻設(shè)計長度，下一行為電阻設(shè)計寬度。LCSM尺寸測量寬度上比線寬測量儀要寬，長度上要短，但是計算所得的方阻值結(jié)果相差不大，整體趨勢相同。方阻率測試板層壓后電阻值測量結(jié)果方阻率測試板層壓后電阻值測量結(jié)果2015-1-7實驗結(jié)果實驗結(jié)果層壓后電阻的改變量相比于棕化后少于0.3% 。編號SES后電阻值（）棕化后電阻值（）層壓后電阻值（）(層壓后-SES后)/SES后(層壓后-棕化后)/棕化后panelUnit號0.5c

25、m1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.78551.91251.23448.8590.34%0.71%1.04%-0.24%0.30%0.15%251.10850.85248.39551.49851.11648.88251.39651.00348.8760.56%0.30%0.99%-0.20%-0.22%-0.01%351.85750.97748.08752.12151.18548.67251.95651.07948.6740.19%0.20%1.22%

26、-0.32%-0.21%0.00%452.70351.68247.9652.95651.96448.2752.79951.84848.2870.18%0.32%0.68%-0.30%-0.22%0.04%552.02351.92548.48552.34552.15548.76652.25352.07648.8520.44%0.29%0.76%-0.18%-0.15%0.18%653.16351.64648.2553.4851.91548.52953.33151.86348.540.32%0.42%0.60%-0.28%-0.10%0.02%752.02251.20848.53852.4251.

27、44448.88252.37951.49749.2480.69%0.56%1.46%-0.08%0.10%0.75%852.73752.20149.8653.00452.46350.28552.90352.62250.630.31%0.81%1.54%-0.19%0.30%0.69%952.05452.04249.93352.32452.28950.55952.16652.20450.6350.22%0.31%1.41%-0.30%-0.16%0.15%1051.70252.83149.51752.08152.47449.81551.95352.40549.7780.49%-0.81%0.53

28、%-0.25%-0.13%-0.07%1152.87552.349.77253.17552.59150.33153.27352.47550.570.75%0.33%1.60%0.18%-0.22%0.47%1252.57652.46549.84352.86752.80750.31252.71252.80450.3260.26%0.65%0.97%-0.29%-0.01%0.03%1351.85452.05250.07652.31452.30950.5152.24452.24150.5260.75%0.36%0.90%-0.13%-0.13%0.03%1452.68751.74349.853.0

29、1952.10250.47852.94352.10250.8720.49%0.69%2.15%-0.14%0.00%0.78%panel2151.31851.49248.45251.89151.92849.14751.7351.89249.5070.80%0.78%2.18%-0.31%-0.07%0.73%252.04757.09448.22152.3958.3349.07752.25260.14149.2910.39%5.34%2.22%-0.26%3.10%0.44%351.04551.48247.96551.31451.72248.28351.14351.62148.3120.19%0

30、.27%0.72%-0.33%-0.20%0.06%452.33351.43448.15852.59651.67748.42252.49151.58648.3950.30%0.30%0.49%-0.20%-0.18%-0.06%551.32551.70548.4351.59751.97248.66851.45551.85248.7010.25%0.28%0.56%-0.28%-0.23%0.07%652.97451.23348.36253.27351.46748.71853.20451.34948.7780.43%0.23%0.86%-0.13%-0.23%0.12%752.74452.097

31、48.62453.00552.3749.91552.86253.08250.3840.22%1.89%3.62%-0.27%1.36%0.94%851.56750.0248.94252.15750.33449.56152.13650.34249.91.10%0.64%1.96%-0.04%0.02%0.68%950.4350.62948.83550.66650.85849.23950.48750.75249.4860.11%0.24%1.33%-0.35%-0.21%0.50%1051.50850.76548.67551.83551.04149.09551.70551.18749.2120.3

32、8%0.83%1.10%-0.25%0.29%0.24%1151.27850.56148.75251.55851.05549.07951.4250.99949.0920.28%0.87%0.70%-0.27%-0.11%0.03%1250.87150.83748.9851.1951.06649.22751.06150.95449.2420.37%0.23%0.53%-0.25%-0.22%0.03%1351.73750.99449.19251.99251.22949.59151.951.19149.6890.32%0.39%1.01%-0.18%-0.07%0.20%1450.47750.16

33、449.23650.72350.6449.73350.62950.8149.9170.30%1.29%1.38%-0.19%0.34%0.37%Aver0.41%0.67%1.23%-0.21%0.10%0.27%Max1.10%5.34%3.62%0.18%3.10%0.94%Min0.11%-0.81%0.49%-0.35%-0.23%-0.07%各道工序后電阻的該變量及每道工序中電阻的各道工序后電阻的該變量及每道工序中電阻的該變量該變量棕化對電阻的影響大于層壓，SES后各工序累計的電阻改變量能控制在1%左右。方阻越大，電阻變化越明顯。ESD測試板方阻率隨電阻設(shè)計變化趨勢測試板方阻率隨電阻

34、設(shè)計變化趨勢增補實驗增補實驗2015-1-8實驗背景實驗背景第一批2 Panel ESD測試板的方阻率隨著電阻設(shè)計尺寸變化有著上述圖表的線性特征。為了更全面描繪方阻率的變化趨勢，增加了更大的電阻設(shè)計。該設(shè)計計劃應(yīng)用在剩余的一張未進行DES的ESD測試板上。目前試板正在制作中。關(guān)于這一現(xiàn)象，Ticer方面還未作出解釋。測試圖形設(shè)計測試圖形設(shè)計工藝電阻完成寬度(um)長度/寬度電阻長度(um)Layer X線寬(um)Du X電阻寬度(um)Du X電阻長度(um)Dux相對于Layer X電阻線左右位置Layer X電阻線與周圍銅皮間距(um)DES+SES4002800438478750居中5

35、560021200638678115080021600838878155010002200010381078195020002400020382078395040060080010002000增加的設(shè)計安置在Set板邊空隙處，共增加5種電阻的寬度設(shè)計。方阻率測試板過熱沖擊后電阻值測量結(jié)果方阻率測試板過熱沖擊后電阻值測量結(jié)果2015-1-19測量結(jié)果測量結(jié)果Panel 1Resistor after IR-reflow(6 times, )Resistor change(compare to after lamination)Panel 2Resistor after solder float

36、test(6 times, )Resistor change(compare to after lamination)0.5cm1cm5cm0.5cm1cm5cm51.70551.86649.449-0.05%-0.05%-0.12%51.73851.13348.653-0.34%-0.20%-0.42%52.23260.06849.199-0.04%-0.12%-0.19%51.21650.848.646-0.35%-0.40%-0.47%51.12551.60448.248-0.04%-0.03%-0.13%51.94450.93848.515-0.02%-0.28%-0.33%52.45

37、551.54648.328-0.07%-0.08%-0.14%52.69351.87648.245-0.20%0.05%-0.09%51.42751.80848.636-0.05%-0.08%-0.13%52.6152.18148.6540.68%0.20%-0.41%53.15651.29848.696-0.09%-0.10%-0.17%53.52452.34848.9420.36%0.94%0.83%52.83353.01750.3-0.05%-0.12%-0.17%52.18851.65549.127-0.36%0.31%-0.25%52.1150.30249.842-0.05%-0.0

38、8%-0.12%53.06852.54450.630.31%-0.15%0.00%50.44550.71349.414-0.08%-0.08%-0.15%52.1251.99450.603-0.09%-0.40%-0.06%51.6851.15349.158-0.05%-0.07%-0.11%51.98452.78649.7530.06%0.73%-0.05%51.38250.94949.026-0.07%-0.10%-0.13%53.29652.41950.6420.04%-0.11%0.14%51.03550.90449.155-0.05%-0.10%-0.18%52.57552.7435

39、0.243-0.26%-0.12%-0.16%51.84551.12449.582-0.11%-0.13%-0.22%52.45652.24250.9370.41%0.00%0.81%50.58650.74949.845-0.08%-0.12%-0.14%52.92151.98950.646-0.04%-0.22%-0.44%Avg.0.01%0.03%-0.06%Avg.-0.06%-0.09%-0.15%熱沖擊對電阻值得的影響很小，最大也只有-0.15%，可以認為Ticer埋阻材料耐熱沖擊性能沒有問題。Test condition：IR-reflow：peak240 +/-5、5-25se

40、c, 6cycleSolder float test：288+/-5、10sec, 6cycleESD測試板阻焊前處理后電阻值測量結(jié)果測試板阻焊前處理后電阻值測量結(jié)果2015-1-19測量結(jié)果測量結(jié)果Note: 1.儲存條件為PD會議室2.阻焊前處理線為5#長寬比為4的電阻設(shè)計在儲存和阻焊前處理下穩(wěn)定性要明顯好與比值為2的設(shè)計。電阻設(shè)計寬度100m時，建議使用長寬比為4或更大的設(shè)計， 寬度100m時，長寬比對電阻穩(wěn)定性的影響不大。DesignW(m)507575100100150150200200150L(m)200150300200400300600400800300R()200100200

41、100200100200100200100CodeConditionColumn No.234567891011Aafter SESR()200.7 121.7 213.3 120.9 209.2 114.1 207.9 109.6 204.9 114.8 Bstore 7 days after SESR()199.6 117.8 211.8 119.3 209.3 114.2 207.6 110.0 205.2 115.0 (B-A)/A%-0.53%-3.14% -0.72% -1.29% 0.06% 0.06% -0.14% 0.34% 0.18% 0.12%Cafter SM per-

42、treatmentR()194.1 110.6 211.7 115.4 210.2 113.8 208.1 110.3 205.7 114.1 (C-B)/B%-2.76%-6.15% -0.04% -3.30% 0.44% -0.32% 0.23%0.27% 0.21% -0.78%ESD測試板電測試結(jié)果相對阻焊前處理后測試板電測試結(jié)果相對阻焊前處理后電阻值該變量電阻值該變量2015-1-27測量結(jié)果測量結(jié)果DesignW(m)50507575100100150150200200L(m)100200150300200400300600400800阻焊前處理后R（）106.32 200.30

43、119.68 214.40 121.17 208.33 114.54 207.62 110.00 203.79 電測試結(jié)果（）79.88 195.97 114.83 205.99 117.69 206.35 114.07 208.83 110.63 204.57 電測試結(jié)果-阻焊前處理后R-26.44 -4.34 -4.85 -8.41 -3.48 -1.98 -0.47 1.21 0.63 0.78 50/100的長寬設(shè)計收阻焊制作過程影響較大，其它設(shè)計影響在5%內(nèi)。建議ESD測試舍去50/100設(shè)計方案的測試，其它設(shè)計使用電測試結(jié)果作為ESD測試的初始電阻值。ESD初步測試結(jié)果初步測試結(jié)果

44、2015-1-29Unit內(nèi)電阻差異內(nèi)電阻差異R1R2set編號 unit編號設(shè)計電阻寬W（m）設(shè)計電阻長L（m）實測電阻值（）實測電阻寬W（m）實測電阻長L（m）實測L/W實測方阻率（）70000192100200R1106.2115.45 197.50 1.71 62.08 R2141.1115.74 195.58 1.69 83.50 70001127100400R1241.5115.45 390.63 3.38 71.37 R2208.3120.09 390.21 3.25 64.11 單個unit內(nèi)兩個電阻相差極大部分樣品。電阻值為電測試結(jié)果，長寬測量值為褪去阻焊后LCSM測量結(jié)果。

45、R1R2192127電阻經(jīng)電阻經(jīng)ESD沖擊后改變情況沖擊后改變情況測試前測試后變化率SetWL設(shè)計號電壓R1R2R1R2R1R2700005010010.5KV69.9471.5969.671.19-0.49%-0.56%700005020020.5KV197.9208.5164177.3-17.13%-14.96%700005020020.5KV229191.7184.3175.1-19.52%-8.66%700007515030.5KV144.5105.5107.1991.66-25.82%-13.12%700017530040.5KV210.4219.6172.7183.9-17.92%

46、-16.26%7000110020050.5KV130.3106.5109.43105.7-16.02%-0.75%7000110020050.5KV118.5133.9103.67110.1-12.51%-17.77%700005010010.8KV102.871.6473.3771.19-28.63%-0.63%700005010010.8KV109.8113.400FailFail700005020020.8KV207.3154.40152.7Fail-1.10%700007515030.8KV110.3119.297.4493.77-11.66%-21.33%700007515030.

47、8KV112.2119.986.9195.46-22.54%-20.38%700017530040.8KV211.2202.5181.7181.5-13.97%-10.37%7000110020050.8KV98.76117.598.93100.990.17%-14.05%700005010011.0KV68.7172.7300FailFail7000110020051.0KV98.76119.998.1494.82-0.63%-20.92%7000110040061.0KV220.1225.1208.1211.8-5.45%-5.91%7000015030071.0KV108.6116.61

48、06.4100.36-2.03%-13.93%700005010011.2KV77.7471.300FailFail700005010011.2KV106.574.7400FailFail700005010011.2KV77.67107.400FailFail7000110020051.2KV140.4123.1112.799.9-19.73%-18.85%7000110040061.2KV213.1209.5188206.9-11.78%-1.24%7000015030071.2KV106100.296.0295.04-9.42%-5.15%7000015060081.2KV216220.1

49、200.2204.8-7.31%-6.95%7000110040061.5KV189.3197.4179.90-4.97%Fail7000015030071.5KV114.6112.798.0296.85-14.47%-14.06%7000015060081.5KV210.7196.2197.7177.5-6.17%-9.53%7000020040091.5KV108.2100.998.66100.8-8.82%-0.10%7000015060081.8KV213.6202191.9183.8-10.16%-9.01%7000020040091.8KV107.2117.10101.7Fail-13.15%7000020040091.8KV108.2100.988.6790.85-18.05%-9.96%7000020040092.0KV117.3101.2105.399.33-10.23%-1.85%70000200800102.0KV198.4219.6188.75209.1-4.86%-4.78%7000020040092.2KV113.4102.199