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1、與激光有關(guān)的英文文獻(xiàn)ComPany number :0089WT-8898YT-W8CCB-BUUT-202108LaSer technologyR. E. SlUSher Ben Laboratories5 LUCent Technologies, MUrray Hill, NeW JerSey 07974LaSer technology during the 20th CentUry is reviewed emphasizing the IaSer,s 己VOIUtiOll from SCienCe to technology and SUbSeqUent COntribUtiOnS O

2、f IaSer technology to SCienCe AS the CentUry draws to a close, IaSerS are Inaking StrOng COntribUtiOnS to communications, materials processing, data storage, image recording, medicine, and defense EXanIPleS from these areas demonstrate the StUnning impact Of IaSer Iight On OUr SOCiety. LaSer advance

3、s are helping to generate new SCienCe as illustrated by SeVeral examples in PhySiCS and biology. Free-electron IaSerS USed for materials PrOCeSSing and IaSer accelerators are described as developing laser technologies for the next CentUry.S0034-6861(99)02802-01. INTRODUCTIONLight has always PIayed a

4、 Central role in the StUdy Of physics, ChemiStry, and biology. Light is key to both the evolution Of the UniVerSe and to the evolution Of Iife On earth ThiS CentUry a new form Of light, IaSer light, has been discovered On Our Small PIanet and is already facilitating a global information transformati

5、on as Well as PrOViding important COntribUtiOnS to medicine, industrial Inaterial processing, data storage, Printing, and defense. ThiS review Will trace the developments in SCienCe and technology that Ied to the invention Of the IaSer and give a few examples Of how IaSerS are COntribUting to both t

6、echnological applications and PrOgreSS in basic SCienCe There are many Other excellent SOUrCeS that COVer VariOUS aspects Of the IaSerS and IaSer technology including articles from the 25th anniversary Of the IaSer (AUSUben and LangfOrd, 1987) and textbooks ,Siegman, 1986; AgraWal and Dutta9 1993; a

7、nd Ready, 1997).Light amplification by StimUlated emission Of radiation (LASER) is achieved by exciting the electronic, vibrational, rotational, Or COOPeratiVe modes Of a material into a Iionequilibrium State SO that PhOtOnS PrOPagating through the SyStem are amplified COherently by StimUlated emiss

8、ion. EXCitatiOn Of this OPtiCal gain IneciiUm Can be accomplished by USing OPtiCal radiation, electrical CUrrent and discharges, Or ChemiCal reactions. The amplifying medium is PIaCed in an OPtiCal resonator structure, for example between two high reflectivity mirrors in a Fabry-PerOt interferometer

9、 COnfigUration. When the gain in PhOtOn number for an OPtiCal mode Of die CaVity resonator exceeds the CaVity loss, as Well as IOSS from nonradiative and absorption processes, the COherent State amplitude Of the mode increases to a IeVel Where the mean PhOtOn number in the mode is Iarger than One. A

10、t PUnIP IeVeIS above this threshold COnditiOnhe SyStem is IaSing and StimUlated emission dominates SPOntaneOUS emission. A IaSer beam is typically COUPIed OUt Of the resonator by a Partiany transmitting mirror. The WOnderfUny USefUl PrOPertieS Of IaSer radiation include SPatial coherence, narrow SPe

11、Ctral emission, high power, and well-defined SPatial InOdeS SO that the beam Can be focused to a diffraction-limited SPOt SiZe in Order to achieve Very high intensity. The high efficiency Of IaSer Iight generation is important in many applications that require IOW POWer input and a minimum Of heat g

12、enerationWhen a COherent State IaSer beam is detected USing PhOtOn-COUnting techniques, the PhOtOn COUnt distribution in time is Poissonian. FOr example, an audio OUtPUt from a high efficiency PhOtOmUltiPlier detecting a IaSer field SOUndS Iike rain in a Steady downpour ThiS IaSer noise Can be modif

13、ied in SPeCial cases, .5 by COnStant CUrrent PUnIPing Of a diode IaSer to Obtain a SqUeeZed number State Where the detected PhOtOnS SOUnd more Iike a machine gun than rain. An OPtiCal amplifier is achieved if the gain medium is not in a resonant CaVity. OPtiCal amplifiers Can achieveVery high gain a

14、nd IOW noise. In fact they PreSentIy have noise figures Within a few dB Of the 3 dB quantum noise Iimit for a PhaSe-insensitive Iinear amplifier,., they add IittIe more than a factor Of two to the noise POWer Of an input signal. OPtiCal ParametriC amplifiers (OPAs), Where Signal gain is achieved by

15、nonlinear COUPling Of a PUmP field With Signal modes, Can be COnfigured to add IeSS than 3 dB Of noise to an input SignaL In an OPA the noise added to the input Signal Can be dominated by PUmP noise and the noise COntribUted by a IaSer PUInP beam Can be negligibly Small COmPared to the Iarge amplitu

16、de Of the PUmP field.2. HISTORYEinStein (1917) PrOVided the first essential idea for the laser, StinIUIated emission. Why WaSl,t the IaSer imented earlier in the CentUry MUCh Of the early WOrk On StinIUIated emission COnCentrateS On SyStemS near equilibrium, and the IaSer is a highly nonequilibrium

17、SyStem. In retrospect the IaSer COUId easily have been COnCeiVed and demonstrated USing a gas discharge ClUring the PeriOd Of intense SPeCtrOSCOPiC StUClieS from 1925 to 194O. However, it took the microwave technology developed during WOrId War II to Create the atmosphere for thelaser concept. CharI

18、eS TOWneS and his group at COkImbia COnCeiVed the maser (IniCrOWaVe amplification by StimUlated emission Of radiation) idea, based On their background in IniCrOWaVe technology and their interest in high-resolution microwave spectroscopy. SimiIar maser ideas evolved in MOSCOW (BaSOV and Prokhorov, 19

19、54) and at the UniVerSity Of Maryland (Weben 1953) The first experimentally demonstrated maser at COlUmbia UniVerSity (GOrdOn et al., 1954, 1955) WaS based On an ammonia molecular beam BlOemberge,s ideas for gain in three IeVel SyStemS resulted in the first PraCtiCal maser amplifiers in the ruby sys

20、tem. TheSe devices have noise figures Very CIOSe to the quantum IinIit and Were USed by PenZiaS and WiISOn in the discovery Of the COSnIiC background radiation.TOWneS WaS COnfident that the maser COnCePt COUId be extended to the OPtiCal region (TOWnes, 1995) The IaSer idea WaS born (SChaWlOW and Tow

21、nes, 1958) When he discussed the idea With ArthUr Schawlow, WhO UnderStOOd that the resonator modes Of a Fabry-PerOt interferometer COUld reduce the number Of modes interacting With the gain material in Order to achieve high gain for an individual mode. The first IaSer WaS demonstrated in a flash Ia

22、mP PUmPed ruby CryStal by Ted Maiman at HUgheS ReSearCh LZabOratOrieS (Maiman, 1960). ShOrtIy after the demonstration Of PUlSed CryStal lasers, a COntinUOUSWaVe (CW) He:Ne gas discharge IaSer WaS demonstrated at Bell LabOratOrieS (JaVan et al., 1961), first at mm and Iater at the red nm WaVeIength I

23、aSing transition. An excellent article On the birth Of the IaSer is PUbIiShed in a SPeCial issue Of PhySiCS TOday (BrOmberg, 1988).The maser and IaSer initiated the field Of quantum electronics that SPanS the CiiSCiPlineS Of PhySiCS and electrical engineering FOr PhySiCiStS WhO thought PrinIariIyin

24、terms Of photons, SOnIe IaSer COnCePtS Were difficult to UnderStand WithOUt the COherent WaVe COnCePtS familiar in the electrical engineering community. FOr example, the laser IineWidth Can be much narrower than the Iimit that One might think to be imposed by the IaSer transition SPOntaneOUS Iifetim

25、e. CharleS TOWneS WOn a bottle Of SCOtCh OVer this POint from a COneagUe at Columbia. The IaSer and maser also beautifully demonstrate the interchange Of ideas and impetus between industry, government, and UniVerSity research.Initially, during the PeriOd from 1961 to 1975 there Were few applications

26、 for the laser. It WaS a SOkltiOn IOOking for a PrObIem SinCe the mid-1970s there has been an explosive growth Of IaSer technology for industrial applications. AS a result Of this technology growth, a new generation Of IaSerS including SemiCOndUCtOr CiiOde lasers, dye lasers, UltrafaSt mode-locked T

27、i:SaPPhire lasers, OPtiCal Parameter OSCinators, and ParametriC amplifiers is PreSently facilitating new research breakthroughs in physics, ChemiStry, and biology.3 LASERS AT THE TURN OF THE CENTURYSCIIaWIow,s "law" StateS that Fvurything IaSeS if PUmPed hard enough IndeCd thousands Of mat

28、erials have been demonstrated as IaSerS and OPtiCal amplifiers resulting in a Iarge range Of IaSer sizes, WaVelengths, PUISe lengths, and POWerS LaSer WaVelengthS range from the far infrared to the x-ray region. LaSer Iight PUISeS as ShOrt as a few femtoseconds are available for research On material

29、s dynamics Peak POWerS in the PetaWatt range are now being achieved by amplification Of femtosecond PUlSeS When these POWer IeVelS are focused into a diffractionlimited spot, the intensities approach 1023 Wcm2. EleCtrOnS in these intense fields are accelerated into the relativistic range during a Si

30、ngIe OPtiCal cycle, and interesting quantum electrodynamic effects Can be studied. The PhySiCS Of UltraShOIi IaSer PUlSeS is reviewed is this Centennial SerieS (BlOembergen, 1999).A recent example Of a large, POWerfUl IaSer is the ChemiCal IaSer based On an iodine transition at a WaVeIength Of nm th

31、at is envisioned as a defensive WeaPOn (FOrdeIL 1997). It COUId be mounted in a BOeing 747 aircraft and WOUld PrOdIICe average POWerS Of 3 megawatts, equivalent to 30 acetylene torches. NeW advances in high quality dielectric mirrors and deformable mirrors allow this intense beam to be focused relia

32、bly On a Small missile Carrying biological Or ChemiCal agents and CkStrOy it from distances Of UP to IOO km. TlIiS "star WarS, attack Can be accomplished during the IaUnCll PhaSe Of the target missile SO that POrtiOnS Of the destroyed missile WOUld fall back On its IaUnCher, quite a good deterr

33、ent for these evil weapons. CaPtain Kirk and the StarShiP EnterPriSe may be USing this One On the KlingOns!At the OPPOSite end Of the IaSer SiZe range are IniCrOlaSerS SO Small that OnIy a few OPtiCal modes are COntained in a resonator With a VOkIme in the femtoliter range TheSe resonators Can take

34、the form Of rings Or disks Only a few microns in diameter that USe total internal reflection instead Of COnVentiOnal dielectric StaCk mirrors in Order to Obtain high reflectivity. Fabry-PerOt CaVitieS Only a fraction Of a micron in Iength are USed for VCSELS (VertiCal CaVity SUrfaCe emitting IaSerS)

35、 that generate high quality OPtiCal beams that Can be efficiently COUPled to OPtiCal fibers (ChOqUette and Hou, 1997). VCSELS may find WideSPread application in OPtiCal Ciata IinkS4. MATERIALS PROCESSING AND LITHOGRAPHYHigh POWer CO2 and Nd: YAG IaSerS are USed for a Wide Variety Of engraving, cutti

36、ng, welding, soldering, and 3D PrOtOtyPing applications, rf-excited, Sealed Off CO2 IaSerS are COnlnIerCiany available that have OUtPUt POWerS in the 10 to 600 W range and have IifetinleS Of OVer 10 OOO hours LaSer CUtting applications include SailClOtlies, parachutes, textiles, airbags, and IaCe Th

37、e CUtting is Very quick, accurate, there is no edge discoloration, and a CIean fused edge is Obtained that eliminatesfraying Of the material. COnIPIeX designs are engraved in wood, glass, acrylic, ubber StJmPs, Printing plates, PleXiglass, signs, gaskets, and PaPer ThreedimenSiOnal models are quickl

38、y made from PlaStiC Or WOOd USing a CAD (COmPUter-aided design) COmPUter file.Fiber IaSerS (Rossi, 1997) are a recent addition to the materials PrOCeSSing field. The first fiber IaSerS Were demonstrated at Ben LabOratOrieS USing CryStal fibers in an effort to develop IaSerS for UnderSea IightWaVe co

39、mmunications. DOPed fused SiliCa fiber IaSerS Were SOOn developed DUring the Iate 1980s researchers at POIarOid COrP and at the UniVerSity Of SOUthamPtOn invented CIadding-PUnIPed fiber IaSerS The glass SUrrOUnding the guiding COre in these IaSerS SerVeS both to guide the Iight in the Single mode CO

40、re and as a multimode COndUit for PUlnP Iight WhOSe PrOPagatiOn is COnfined to the inner CIadding by a IOW-refractive index OUter POIyIner Cladding TyPiCal OPeratiOn SChemeS at PreSent USe a multimode 20 W diode IaSer bar that COUPIeS efficiently into the Iarge diameter inner CIadding region and is

41、absorbed by the doped COre region OVer its entire Iength (typically 50 m). The dopants in the COre Of the fiber that PrOVide the gain Can be erbium for the mm WaVelength region Or ytterbium for the mm region. High quality CaVity mirrors are deposited directly On the ends Of the fiber. TheSe fiber Ia

42、SerS are extremely efficient, With OVerall efficiencies as high as 60% The beam quality and delivery efficiency is excellent SinCe the OUtPUt is formed as the Single mode OUtPUt Of the fiber. TheSe IaSerS now have OutPUt POWerS in the 10 to 40 W range and IifetimeS Of nearly 5000 hours ClIrrent appl

43、ications Of these IaSerS include annealing micromechanical components, CUtting Of 25 to 50 mm thick StainleSS Steel parts, SeIeCtiVe SOIdering and Welding Of intricate mechanical parts, marking PIaStiC and metal components, and Printing applications.EXCimer IaSerS are beginning to Play a key role in

44、 PhOtOlithOgraPhy USed to fabricate VLSl (Very Iarge SCale integrated CirCIIit) ChiPS AS the IC (integrated CirCUit) design rules decrease from mm (1995) to mm (2002), the WaVeIength Of the Iight SOUrCe USed for PhOtOIithOgraPhiC Patterning must COrreSPOndingIy decrease from 400 nm to below 200 nm.

45、DUring the early 1990s mercury arc radiation PrOdUCed enough POWer at SUffiCiently ShOrt WaVelengthS Of 436 nm and 365 nm for high PrOdUCtiOn rates Of IC devices Patterned to mm and mm design *ules respectively. AS the CentUry CIOSeS excimer IaSer SOUrCeS With average OUtPUt POWerS in the 200 W range are replacing the mercury arcs The excimer IaSer IineWidthS are broad enough to PreVent SPe

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