SAT 原理 檢測(cè)方法及識(shí)別介紹

1、16Hz - 20,000HzPropagationVibrationPropagationVibrationAir100%100%DieEMC MaterialsAirEMCSiliconEpoxyGold42 alloyCopperAlSteelNickelGlassWater(20c)(for IC)for D/A(quartz)(20c)Acoustic impedance06.7620.043.1262.5340.9141.8316.945.4349.5415.041.48(10 kg/m s)Air (20c)0-100100100100100100100100100100100R

2、esin(for ic)6.76100-49.636.880.571.672.242.974.1763864.1Silicon20.0410049.6-73.151.534.235.28.538.842.414.386.2Epoxy resin3.1210036.873.1-90.585.886.168.887.188.265.635.7Gold62.5310080.551.590.5-20.919.857.515.811.661.295.442 alloy40.9110071.634.285.820.9-1.141.55.29.546.293Copper41.8310072.235.286.

3、119.81.1-42.44.18.447.193.2Aluminum16.910042.98.568.857.541.542.4-45.849.15.883.9Steel45.4310074.138.887.115.85.24.145.8-4.350.393.7Nickel49.541007642.488.211.69.58.449.14.3-53.494.2Glass(quartz)15.041003814.365.661.246.247.15.850.353.4-82.1Water(20c)1.4810064.186.235.795.49393.283.993.794.282.1-R(%

4、) = X 100Z2 + Z1Z2 - Z1rough surfacebubblesDie Attach AdhesiveDieEMCDie SurfaceDie BottomPackage SurfaceUltrasonic超超聲聲波波Transducer超超聲聲波探波探頭頭Water 水水Transducer for Thru-Transmission接收探接收探頭頭用于透射用于透射DelaminationPKG CrackVoidPKG CrackChip Cracku 分層分層 (Delamination)u 塑封體裂縫塑封體裂縫 (Package Crack)u 晶片裂縫晶片裂縫

5、(Die Crack)u 孔洞孔洞 (Void)u 傾斜傾斜 (Tilt) u 手指下陷手指下陷(Finger )PKG SurfaceDie Surface波的強(qiáng)度50%50%50%50%Air100%100%DieEMC黑色紅色uQA正常monitor的圖像Normal紅色的負(fù)波正波黑色的Fail波的強(qiáng)度波的強(qiáng)度100%PKG BottomPKG CrackPad BottomuQA正常monitor的圖像Package CrackDie CrackDelamuPackage Crack：掃橫向容易掃到，縱向不容易掃到uDie Crack：灰、黑、白的部分形狀有變異uDelam：正常是灰、

6、黑、白NormalDelam灰黑白白黑灰TiltInner VoiduTilt：灰、黑、白的部份傾斜uInner Void：灰、黑、白的部分某一個(gè)地方會(huì)跑到上方EMCEMCu可檢測(cè)的缺點(diǎn)可檢測(cè)的缺點(diǎn) : Peeling、Crack 、Void、Delam31 Cuts31片片Swordsman劍俠劍俠31 inspection layersof TAMI-ScanTAMI-Scan 的的31層層測(cè)試層測(cè)試層D/A EpoxyPaddleEMCSilicon Chip31 Gates for TAMIPackageSurface封裝表面封裝表面Die Top& BottomDie的頂端的

7、頂端與底部與底部PaddleSurface焊料表面焊料表面u超聲波斷層顯微成象掃描的超聲波斷層顯微成象掃描的31張圖片張圖片水水接收器接收器探頭探頭u探頭傳遞訊號(hào)穿過(guò)待測(cè)樣品，接收器接收訊號(hào)u因?yàn)槌舨A(yù)到空氣，無(wú)法傳遞訊號(hào)，所以檢測(cè)樣品任何一層有脫層，下面接收器將收不到訊號(hào)，所以呈現(xiàn)黑色區(qū)域 u水泡未清除乾淨(jìng)也會(huì)影響穿透判定u可使用 A-Scan 證實(shí)檢驗(yàn)結(jié)果u穿透式的缺點(diǎn)是不能確切的知道那一層有缺陷, 必須要用反射式再次檢驗(yàn)u圖A：接收器有接收到探頭穿過(guò)待測(cè)樣品傳遞的 訊號(hào)，所以會(huì)有波的反應(yīng)u圖B：接收器沒(méi)有接收到探頭穿過(guò)待測(cè)樣品傳遞 的訊號(hào)，所以會(huì)沒(méi)有波的反應(yīng)，反射呈現(xiàn) 黑色有波的強(qiáng)度沒(méi)有波的強(qiáng)度NormalDelam反紅白、黑、灰負(fù)波反紅波強(qiáng)度:100%正波VoidFinger 變形Finger Scanning Acoustic Microscope(S.A.M.) is a very useful tool