TFTLCD制造教材

1、Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)0/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD制造CHINA STAROPTOELECTRONICS TECHNOLOGYCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)1/68CHINA STAROPTOELECTRONICS TECHNOLOGY課程內(nèi)容課程目標(biāo)了解TFT LCD產(chǎn)品輪廓建立TF

2、T LCD工藝流程概念1. TFT LCD概論2. 工藝流程與顯示原理3. 新技術(shù)介紹CHINA STAROPTOELECTRONICS TECHNOLOGYCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)2/68CHINA STAROPTOELECTRONICS TECHNOLOGY TFT LCD概論概論 工藝流程與顯示原理工藝流程與顯示原理 新技術(shù)介紹新技術(shù)介紹Company Confidential Ver.Do not copy or distribute. Copyright 20

3、10 CSOT入職培訓(xùn)3/68CHINA STAROPTOELECTRONICS TECHNOLOGYn 技術(shù)、資金密集性的產(chǎn)業(yè)與藝術(shù)n 站在別人的肩上奮力一跳n 要做第一流的企業(yè)Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)4/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD應(yīng)用概論 n Thinner , Lighter (輕薄)n Power Saving (節(jié)能)n Flat Display (全平面)n High Definition (高

4、解像力, HD,FHD)產(chǎn)品特性CRTTFT LCDCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)5/68CHINA STAROPTOELECTRONICS TECHNOLOGY世界上第一臺LCD顯示器,1968年在RCA的David Sarnoff 研發(fā)中心制作出來 液晶被發(fā)現(xiàn)后, 并沒有被加以利用, 直到經(jīng)過80年后的1968年, 美國RCA公司的工程師利用液晶分子會隨電壓改變而排列, 進而使入射光線偏轉(zhuǎn)的特性, 制造出世界第一臺液晶顯示器, 雖然第一臺液晶顯示器在美國誕生, 但真正加以

5、開發(fā)并商業(yè)化的卻是在1970年代的SHARP與SONY . 從液晶被發(fā)現(xiàn)到應(yīng)用于商業(yè)與民生用途, 花了約100年的時間, 巧妙的是, 液晶被發(fā)現(xiàn)的年代同時陰極射線管(CRT)也被發(fā)明! 但這兩種顯示器的發(fā)展卻差了數(shù)十年, CRT獨領(lǐng)風(fēng)騷一個世紀(jì), 但現(xiàn)在可確定的是 液晶顯示器將取而代之, 并開創(chuàng)一個新的世紀(jì)! 附注 : 當(dāng)時液晶發(fā)展過程遇到的瓶頸為半導(dǎo)體技術(shù)與制程尚未開始, 驅(qū)動液晶的微型化技術(shù)在那個年代不易達成, 直到1970年代半導(dǎo)體技術(shù)的發(fā)展, 液晶顯示器才得以商業(yè)化!光學(xué)顯微鏡底下的液晶Company Confidential Ver.Do not copy or distribute

6、. Copyright 2010 CSOT入職培訓(xùn)6/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD應(yīng)用概論 1.2 應(yīng)用范疇 TFT LCD Audio / VideoCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)7/68CHINA STAROPTOELECTRONICS TECHNOLOGYFrom Display Search各應(yīng)用類別成長率Company Confidential Ver.Do not copy or distribute.

7、 Copyright 2010 CSOT入職培訓(xùn)8/68CHINA STAROPTOELECTRONICS TECHNOLOGY特殊應(yīng)用Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)9/68CHINA STAROPTOELECTRONICS TECHNOLOGY TFT LCD概論概論 工藝流程與顯示原理工藝流程與顯示原理 新技術(shù)介紹新技術(shù)介紹Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)

8、10/68CHINA STAROPTOELECTRONICS TECHNOLOGY模塊組成要素 薄膜 薄膜n 背光源 (Back Light) n 偏光片 (Polarizer)n 玻璃+液晶 (Cell)n 驅(qū)動芯片 (Driver IC)n 其他零件Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)11/68CHINA STAROPTOELECTRONICS TECHNOLOGY化學(xué)材料物理性材料電子零件型材料光學(xué)材料模塊材料類別Company Confidential Ver.Do not

9、 copy or distribute. Copyright 2010 CSOT入職培訓(xùn)12/68CHINA STAROPTOELECTRONICS TECHNOLOGY單一像素結(jié)構(gòu)漏極(Drain)源極(Source)水廠柵極(Gate)水龍頭開關(guān)決定水是否可流過亦可決定水的流量大小每個像素皆有獨立的開關(guān)元件(TFT)與儲存電容(Cst)及像素透明電極(Pixel Electrode)B儲存電容?透明電極Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)13/68CHINA STAROPTOE

10、LECTRONICS TECHNOLOGYGate VoltagePixel Electrode像素電極Data Voltagen Gate功能 : 擔(dān)任開與關(guān)的功能 n Data功能 : 負(fù)責(zé)將畫面訊號送入像素中像素陣列電路示意圖Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)14/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT驅(qū)動簡易原理圖：四種必要電壓的相互關(guān)系Company Confidential Ver.Do not copy or distri

11、bute. Copyright 2010 CSOT入職培訓(xùn)15/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT(Array)Thin-Film TransistorLC(Cell)Liquid CrystalLCMModuleCFColor FilterTFTLCD 制造概念Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)16/68CHINA STAROPTOELECTRONICS TECHNOLOGYThin film 成膜Photo - photo-re

12、sist coating 光阻涂布Photo exposure 曝光Photo development 顯影Etching 蝕刻Stripper 光阻剝離2.1 Array Process Flow Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)17/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT substrate glassSource electrodeGate electrodeSiNxa-Sin+Al-NdMoMoNAlMoNSiNx (pass

13、ivation)ITOCSDrain electrodeReviewLayerThickness (reference value)1st3000 (AlNd: 17502000, Mo: 1200)2ndSiNx - 3500a-Si - 1100n+ - 4503rd2500 (MoNbuttom: 250, Al: 2000, MoNtop: 375)4th32005th700Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)18/68CHINA STAROPTOELECTRONICS T

14、ECHNOLOGYTFT substrate glassTop viewaabbCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)19/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT substrate glassSiNxa-Sin+Al-NdMoMoNAlMoNSiNx (passivation)ITOSEMAAA-A cross-sectionBBB-B cross-sectionAlNdMoSiNxa-Si, n+MoNAlMoNPassITOCompa

15、ny Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)20/68CHINA STAROPTOELECTRONICS TECHNOLOGY陣列檢查設(shè)備Array 檢查設(shè)備中文名英文名陳列檢測設(shè)備裝置Array Tester Machine光學(xué)自動外觀檢查裝置Auto Optical Inspection Machine（AOI )特性測試設(shè)備TEG Prober Equipment激光修補儀Laser Repair Machine激光化學(xué)氣相沉積修補設(shè)備Laser CVD Repair Machine斷路或短路

16、檢驗裝置O/S TEST of Machine微觀/宏觀檢查裝置Macro/Micro Check of Machine宏觀檢查裝置Macro Check of Machine自動宏觀檢查裝置Auto Macro Check of MachineCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)21/68CHINA STAROPTOELECTRONICS TECHNOLOGY陣列檢查原理AOI的檢查原理 : 是通過對相鄰像素pattern的比較來檢測是否有defectCompany Confid

17、ential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)22/68CHINA STAROPTOELECTRONICS TECHNOLOGYMacro的檢查原理：是在Array基板搖動時，通過切換照明方式，從不同角度目視檢查基板。從而可以檢查出薄膜的厚度均勻性差別。Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)23/68CHINA STAROPTOELECTRONICS TECHNOLOGYO/S short 的原理：通過對給電

18、側(cè)施加200v的交流電壓，給電端同基板的距離十分接近，形成電容，這樣電壓可以加到基板的線路，通過基板線路對交流信號的傳送，在受電端檢出，通過對放大后的信號的處理和判定，可以檢出Open /Short缺陷。ACInputKHz給電側(cè)AMP基板Sensor sideCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)24/68CHINA STAROPTOELECTRONICS TECHNOLOGYLaser repair：根據(jù)坐標(biāo)的信息，在短路的地方用，利用Laser 能量切斷Company Conf

19、idential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)25/68CHINA STAROPTOELECTRONICS TECHNOLOGYLaser CVD : 以成膜方式修補斷線Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)26/68CHINA STAROPTOELECTRONICS TECHNOLOGYColor Filter 彩色濾光片以自然界的三原色進行混色, 并調(diào)整其亮度(灰階)來呈現(xiàn)不同的色彩CF Glass

20、結(jié)構(gòu)Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)27/68CHINA STAROPTOELECTRONICS TECHNOLOGY光罩CF Process FlowBM 玻璃照射光照射光Process Flow : BMRGB( OC )ITO PS Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)28/68CHINA STAROPTOELECTRONICS TECHNOLOGYBM PR

21、 Process Flow玻璃清洗BM光阻涂布(1)BM光阻涂布(2)Pre-cleanerSlit coater紫外線曝光顯影烘烤去掉邊緣光阻EBR(Edge Bead Rinse) (Spinless無此unit)AlignerDeveloperHot plate真空干燥Vacuum Dryer預(yù)烘烤與冷卻Pre-bake & Cool plateCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)29/68CHINA STAROPTOELECTRONICS TECHNOLOGY光阻涂布旋轉(zhuǎn)P

22、re-cleanerSlit coaterSpin coaterBM Glass清洗紫外線曝光顯影去掉邊緣光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer預(yù)烘烤與冷卻Pre-bake & Cool plateRed PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)30/68CHINA STAROPTOELECTRONICS TECHNOLOGY綠色光阻涂布(1)綠色光阻涂布(2)Pre-cl

23、eanerSlit coaterSpin coaterR glass清洗紫外線曝光顯影去掉邊緣光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer預(yù)烘烤與冷卻Pre-bake & Cool plateGreen PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)31/68CHINA STAROPTOELECTRONICS TECHNOLOGY藍(lán)色光阻涂布(1)藍(lán)色光阻涂布(2)Pre-cleane

24、rSlit coaterSpin coaterR,G glass清洗紫外線曝光顯影去掉邊緣光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer預(yù)烘烤與冷卻Pre-bake & Cool plateBlue PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)32/68CHINA STAROPTOELECTRONICS TECHNOLOGYCF 制程檢查項目(一)1.Pixel CD2.Overlay

25、3.厚度4.角段差5.段差(RGB膜厚差異)6.色度量測50060070080040020406080100透過率 波 長 (nm)2134Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)33/68CHINA STAROPTOELECTRONICS TECHNOLOGYSide 1 ProcessLoad chamberUnload chamberSide 2 ProcessPre-cleanerRGB玻璃投入ITO sputteringITO膜濺鍍ITO sputterUV曝照UV Ashe

26、rITO玻璃ITO glassCF ITO Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)34/68CHINA STAROPTOELECTRONICS TECHNOLOGYPS光阻涂布(1)PS光阻涂布(2)Pre-cleanerSlit coaterSpin coaterglass清洗紫外線曝光顯影去掉邊緣光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum DryerPre-bake & Cool plat

27、e預(yù)烘烤與冷卻PS Process FlowPS : Photo SpacerCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)35/68CHINA STAROPTOELECTRONICS TECHNOLOGY50060070080040020406080100透過率 波 長 (nm)1.色度量測2. Rs量測3.穿透率量測4. ITO膜厚量測5. T/P量測6. PS CD,膜厚量測CF 制程檢查項目(二)膜厚CDCompany Confidential Ver.Do not copy or

28、distribute. Copyright 2010 CSOT入職培訓(xùn)36/68CHINA STAROPTOELECTRONICS TECHNOLOGY最終檢查(Final inspection)巨觀檢查光學(xué)檢查前清洗光學(xué)檢查出貨Micro review微觀檢查Judgement & Sorting判定與品質(zhì)分類Repair修補Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)37/68CHINA STAROPTOELECTRONICS TECHNOLOGY在組合前先準(zhǔn)備好彩色率光片（CF）及薄

29、膜電晶體（TFT）玻璃基板彩色濾光片薄膜晶體管1.在TFT及CF上涂上一層 化學(xué)薄膜(PI)( 2.在化學(xué)薄膜上開出紋路使液晶呈現(xiàn)一致性排列 for TN ) Cell Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)38/68CHINA STAROPTOELECTRONICS TECHNOLOGY3.四周涂上框膠后再滴入液晶 ( ODF )4.把TFT 及CF基板在真空的腔體內(nèi)進行高精密的組合5.將組合后的大基板切割成小尺寸面板6.切成小面板后上下兩面進行偏光板貼附C

30、ell Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)39/68CHINA STAROPTOELECTRONICS TECHNOLOGYPrintedcircuit board偏光板TFT框膠TABDriver LSIPhoto Spacer偏光板畫素電極液晶配向膜共通電極OvercoatColor filterBlack matrix成盒制程后示意圖Company Confidential Ver.Do not copy or distribute. Copyrig

31、ht 2010 CSOT入職培訓(xùn)40/68CHINA STAROPTOELECTRONICS TECHNOLOGY傳統(tǒng)制程與ODF制程比較 註: ODF 最早用於5代線毛細(xì)原理 v.s. One Drop FillingCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入職培訓(xùn)41/68CHINA STAROPTOELECTRONICS TECHNOLOGY新的滴下式液晶注入法則是在先將液晶直接滴在玻璃上，然后在進行上下玻璃的對組。這種新的制程可以大幅節(jié)省灌液晶的時間與液晶材料，尤其在超大尺寸面板具有絕對的優(yōu)勢新舊差異:以三十吋面板為例，傳統(tǒng)灌液晶方式灌一片大約需要五天的時間，ODF只需要2小時，并且節(jié)省約40%的液晶材料傳統(tǒng)LCD的液晶注入方式，是在上下玻璃對組之后以毛細(xì)原理將液晶慢慢吸入，這種灌液晶方法缺點是非常耗時且浪費液晶 ODF 設(shè)備ODF制程優(yōu)點Company Confidential Ver.Do not copy or distribute. Copyright