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1、developmentofsensornewtechnologysensor is one kind component which can transform the physical quantity, chemistry quantity and the biomass into electrical signal. the output signal has the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can satisfy t

2、he signal transmission, processing, recording, and demonstration and control demands. so it is the automatic detection system and in the automatic control industry .if automatic technology is used wider, then sensor is more important. in information age, the information industry includes information

3、 gathering, transmission, process three parts, namely sensor technology, communication, computer technology. because of ultra large scale integrated circuits rapid development after having been developed modern computer technology and communication, not only requests sensor precision reliability, sp

4、eed of response and gain information content request more and more high but also requests its cost to be inexpensive. the obvious traditional sensor is eliminated gradually because of the function, the characteristic, the volume, the cost and so on. as world develop many countries are speeding up to

5、 the sensor new technologys research and the development, and all has obtained the enormous breakthrough. now the sensor new technology development mainly has following several aspects:using the physical phenomenon, the chemical reaction, the biological effect as the sensor principle therefore the r

6、esearches which discovered the new phenomenon and the new effect are the sensor technological improving ways .it is important studies to developed new sensors the foundation. japanese sharp corporation uses the superconductivity technology to develop successfully the high temperature superconductivi

7、ty magnetic sensor and get the sensor technology significant breakthrough. its sensitivity is so high and only inferior in the superconductivity quantum interference component. its manufacture craft is far simpler than the superconductivity quantum interference component. may use in magnetism image

8、formation technology. so it has the widespread promoted value.using the immune body and the antigen meets one another compound when the electrode surface. it can cause the electrode potential change and use this phenomenon to be possible to generate the immunity sensor. the immunity sensor makes wit

9、h this kind of immune body may to some organism in whether has this kind of ant original work inspection. like may inspect somebody with the hepatitis virus immune body whether contracts the hepatitis, plays to is fast, the accurate role. the us uc sixth branch has developed this kind of sensor.the

10、sensor material is the important foundation for sensor technology, because the materials science is progressive and the people may make each kind of new sensor for example making the temperature sensor with the high polymer thin film; the optical fiber can make the pressure, the current capacity, th

11、e temperature, the displacement and so on the many kinds of sensors; making the pressure transmitter with the ceramics. the high polymer can become the proportion adsorption and the release hydrogen along with the environment relative humidity size. the high polymer electricity lies between the cons

12、tant to be small, the hydrogen can enhance the polymer the coefficient of dialectical loss. making the capacitor the high polymer dielectric medium, determines the electric capacity cape city the change, then obtains the relative humidity. making the plasma using this principle to gather the legitim

13、ate polystyrene film temperature sensor below, it has the characteristic.measured the wet scope is wide; the temperature range is wide, may reach -400 +1,500 ; the speed of response is quick, is smaller than 1s; the size is small, may use in the small space measuring wet; the temperature coefficient

14、 is small.the ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. uses the advanced ceramic technology, the heavy film electronic technology, its technical performance is stable, the year drifting quantity is smaller

15、 than 0.1%f.s, warm floats is smaller than 0.15%/10k, anti- overloads strongly, may reach the measuring range several hundred times. the survey scope may from 0 to 60mpa.german e+h corporation and the american kahlo corporation product is at the leading position.the optical fiber application is send

16、 the material significant breakthrough, its uses in most early the optical communication techniques. in the optical communication use discovered works as environmental condition change and so on the temperature, pres-sure, electric field, magnetic field, causes the fiber optic transmission light wav

17、e intensity, the phase, the frequency, change and so on the polarization condition, the survey light wave quantity change, may know causes these light wave physical quantity the and so on quantitative change temperature, pressure ,electric field, magnetic field size, uses these principles to be poss

18、ible to develop the optical fiber sensor. the optical fiber sensor and the traditional sensor compare has many characteristics: sensitivity high, the structure simple, the volume small, anti-corrosive, the electric insulation good, the path of rays may be curving, be advantageous for the realization

19、 telemeter and so on. optical fiber sensor japan is in the advanced level. like idec izumi corporation and sun x corporation. the optical fiber send receiver and the integrated path of rays technology unify, accelerates the optical fiber sensor technology development. will integrate the path of rays

20、 component to replace the original optics part and the passive light component; enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low.in semiconductor technology processing method oxygenation, the photo etc hang, th

21、e proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor techn

22、ology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.the japanese horizontal river company uses various guides corrosion technology to carry on the high accuracy three dime

23、nsional processing; the system helps the silicon resonance type pressure transmitter. the core partially presses two resonant liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant liangs frequency difference correspondence different press

24、ure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. when ambient temperature change, two resonant liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity

25、can counterbalance mutually. its survey most high accuracy may reach 0.01%fs.american silicon microstructure inc.(smi) the company develops a series of low ends, linear in 0.1% to 0.in 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1kpa), it makes take the

26、silicon as the material, has the unique three dimensional structure, the light slight machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti- effect but to l

27、ose the bridge balance, the output and the pressure becomes the proportion the electrical signal.such silicon micro sensor is the front technology which now the sensor develops, its essential feature is the sensitive unit volume is a micron magnitude, is the traditional sensor several dozens, severa

28、l 1%. in aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter.the chinese av

29、iation main corporation beijing observation and control technical research institute, the development cyj series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily the temperature

30、influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shortcoming and so on slow change, had the precision high, the re-liability i

31、s high, the volume small characteristic, widely used in domain and so on aviation, petroleum, chemical industry, medical service.integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part a

32、nd send the part will integrate on together the chip, will cause it to have the calibration, to compensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which american lucas, novasensor corporation will de

33、velop, each week will be able to produce 10,000.the intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor unifies, it has at the same time the examination, the judgment and the information processing function, compares with the tradi

34、tional sensor has very many characteristics:has the judgment and the information processing function, can carry on the revision, the error to the observed value compensates, thus enhancement measuring accuracy; may realize the multi-sensor multi parameters survey; has from the diagnosis and from the

35、 calibration function, enhances the reliability; the survey data may deposit and withdraw, easy to operate; has the data communication interface, can and the microcomputer direct communication.the sensor, the signal adjustment electric circuit, the monolithic integrated circuit integration forms ult

36、ra large-scale integrated on a chip the senior intelligence sensor. american hony well corporation st-3000 intelligence sensor, the chip size only then has 342mm3, uses the semiconductor craft, makes cpu, eprom, the static pressure, the differential pressure, the temperature on the identical chip an

37、d so on three kind of sensitive units.the intellectualized sensor research and the development, us is at the leading position. american space agency when development spaceship called this kind of sensor for the clever sensor (smart sensor), on the spaceship this kind of sensor is extremely important

38、. our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited.the sensors development is changing day after day since especially the 80s humanities have entered into the high industrialization th

39、e information age, sensor techno-logy to renewal, higher technological development. us, japan and so on developed country sensor technological development quickest, our country because the foundation is weak, the sensor technology compares with these developed countries has the big disparity. theref

40、ore, we should enlarge to the sensor engineering research, the development investment, causes our country sensor technology and the foreign disparity reduces, promotes our country instrument measuring appliance industry and from the technical development.傳感器新技術(shù)的發(fā)展傳感器是一種能將物理量、化學(xué)量、生物量等轉(zhuǎn)換成電信號(hào)的器件。輸出信號(hào)有不

41、同形式,如電壓、電流、頻率、脈沖等,能滿足信息傳輸、處理、記錄、顯示、控制要求,是自動(dòng)檢測(cè)系統(tǒng)和自動(dòng)控制系統(tǒng)中不可缺少的元件。如果把計(jì)算機(jī)比作大腦,那么傳感器則相當(dāng)于五官,傳感器能正確感受被測(cè)量并轉(zhuǎn)換成相應(yīng)輸出量,對(duì)系統(tǒng)的質(zhì)量起決定性作用。自動(dòng)化程度越高,系統(tǒng)對(duì)傳感器要求越高。在今天的信息時(shí)代里,信息產(chǎn)業(yè)包括信息采集、傳輸、處理三部分,即傳感技術(shù)、通信技術(shù)、計(jì)算機(jī)技術(shù)?,F(xiàn)代的計(jì)算機(jī)技術(shù)和通信技術(shù)由于超大規(guī)模集成電路的飛速發(fā)展,而已經(jīng)充分發(fā)達(dá)后,不僅對(duì)傳感器的精度、可靠性、響應(yīng)速度、獲取的信息量要求越來(lái)越高,還要求其成本低廉且使用方便。顯然傳統(tǒng)傳感器因功能、特性、體積、成本等已難以滿足而逐漸被淘

42、汰。世界許多發(fā)達(dá)國(guó)家都在加快對(duì)傳感器新技術(shù)的研究與開(kāi)發(fā),并且都已取得極大的突破。如今傳感器新技術(shù)的發(fā)展,主要有以下幾個(gè)方面:利用物理現(xiàn)象、化學(xué)反應(yīng)、生物效應(yīng)作為傳感器原理,所以研究發(fā)現(xiàn)新現(xiàn)象與新效應(yīng)是傳感器技術(shù)發(fā)展的重要工作,是研究開(kāi)發(fā)新型傳感器的基礎(chǔ)。日本夏普公司利用超導(dǎo)技術(shù)研制成功高溫超導(dǎo)磁性傳感器,是傳感器技術(shù)的重大突破,其靈敏度高,僅次于超導(dǎo)量子干涉器件。它的制造工藝遠(yuǎn)比超導(dǎo)量子干涉器件簡(jiǎn)單??捎糜诖懦上窦夹g(shù),有廣泛推廣價(jià)值。利用抗體和抗原在電極表面上相遇復(fù)合時(shí),會(huì)引起電極電位的變化,利用這一現(xiàn)象可制出免疫傳感器。用這種抗體制成的免疫傳感器可對(duì)某生物體內(nèi)是否有這種抗原作檢查。如用肝炎病

43、毒抗體可檢查某人是否患有肝炎,起到快速、準(zhǔn)確作用。美國(guó)加州大學(xué)巳研制出這類傳感器。傳感器材料是傳感器技術(shù)的重要基礎(chǔ),由于材料科學(xué)進(jìn)步,人們可制造出各種新型傳感器。例如用高分子聚合物薄膜制成溫度傳感器;光導(dǎo)纖維能制成壓力、流量、溫度、位移等多種傳感器;用陶瓷制成壓力傳感器。高分子聚合物能隨周圍環(huán)境的相對(duì)濕度大小成比例地吸附和釋放水分子。高分子電介常數(shù)小,水分子能提高聚合物的介電常數(shù)。將高分子電介質(zhì)做成電容器,測(cè)定電容容量的變化,即可得出相對(duì)濕度。利用這個(gè)原理制成等離子聚合法聚苯乙烯薄膜溫度傳感器,其有以下特點(diǎn):測(cè)濕范圍寬;溫度范圍寬,可達(dá)-400+1500;響應(yīng)速度快,小于1s;尺寸小,可用于小

44、空間測(cè)濕;溫度系數(shù)小。陶瓷電容式壓力傳感器是一種無(wú)中介液的干式壓力傳感器。采用先進(jìn)的陶瓷技術(shù),厚膜電子技術(shù),其技術(shù)性能穩(wěn)定,年漂移量小于0.1%f.s,溫漂小于0.15%/10k,抗過(guò)載強(qiáng),可達(dá)量程的數(shù)百倍。測(cè)量范圍可從0到60mpa。德國(guó)e+h公司和美國(guó)kahlo公司產(chǎn)品處于領(lǐng)先地位。光導(dǎo)纖維的應(yīng)用是傳感材料的重大突破,其最早用于光通信技術(shù)。在光通信利用中發(fā)現(xiàn)當(dāng)溫度、壓力、電場(chǎng)、磁場(chǎng)等環(huán)境條件變化時(shí),引起光纖傳輸?shù)墓獠◤?qiáng)度、相位、頻率、偏振態(tài)等變化,測(cè)量光波量的變化,就可知道導(dǎo)致這些光波量變化的溫度、壓力、電場(chǎng)、磁場(chǎng)等物理量的大小,利用這些原理可研制出光導(dǎo)纖維傳感器。光纖傳感器與傳統(tǒng)傳感器相比有許多特點(diǎn):靈敏度高,結(jié)構(gòu)簡(jiǎn)單、體積小、耐腐蝕、電絕緣性好、光路可彎曲、便于實(shí)現(xiàn)遙測(cè)等。光纖傳感器日本處于先進(jìn)水平。如idecizumi公司和suns公司。光纖傳感受器與集成光路技術(shù)相結(jié)合,加速光纖傳感器技術(shù)的發(fā)展。將集成光路器件代替原有光學(xué)元件和無(wú)源光器件,使光纖傳感器有高的帶寬、低的

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