四探針說明書

1、SZT-2C四探針測試儀使用說明書一概述SZT-2C型數(shù)字式四探針測試儀是運用四線法測量原理的多用途綜合測量裝置，配上專用的四探針測試架，即可以測量片狀，塊狀或 柱狀半導體材料的徑向和軸向電阻率， 測量擴散層的薄層電阻（亦稱 方塊電阻）。四探針測試架有電動，手動，手持三種可以選配，另外 還配有四個夾子的四線輸入插頭用來作為測量線狀或片狀電阻的 中，低阻阻值。儀器由主機，測試架等部份組成，測試結果由液晶顯示器顯示，同時，液晶顯示器還顯示測量類型（電阻率，方塊電阻和電阻）；探頭修正系數(shù)和溫度值，用來監(jiān)測儀器使用時的環(huán)境溫度。主機由開關電源，DC/DC變換器，高靈敏度電壓測量部份，高穩(wěn) 定度恒流源，

2、和微電腦控制系統(tǒng)組成。由於采用大規(guī)模集成電路，所 以儀器可靠性高，測量穩(wěn)定性好。測試探頭采用寶石導向軸套和高硬度鋼針， 定位準確，游移率小， 使用壽命長。儀器適用於半導體材料廠，半導體器件廠，科研單位，高等院校對半導體材料電阻性能的測試。本儀器工作條件為：使用溫度： 23C 士 3C相對濕度:50%70%工作室內應無強磁場干擾，不與高頻設備共用電源, 二，技術參數(shù)1，測量范圍6電阻率：10 7?10 ?-cm 方塊電阻10 ? 10 6?/ 電阻 10-? - 10 6 ?2，可測半導體材尺寸直徑： 5-250mm長(或高)度：10?(4) 最大分辨率:10卩V(5) 點陣液晶顯示，過載顯示。

3、5, 恒流源：(1)電流輸出：共分10卩A,100uA,1mA,10mA,100m六擋可 通過按鍵選擇，各擋均為定值不可調節(jié)，電阻率探頭修正系和擴散層方塊電阻修正系數(shù)均由機內CPU運算后，直接顯示修正后的結果。(2)誤 差：士0.5%士 2字，在使用1卩A恒流電流輸出時為士 0.5%士 5字6, 四探針測試頭；(1)探針間距：1mm探針機械游移率：士 1.0%探針材料:碳化鎢,0.5mm0-2Kg 可調，最大壓力約2Kg7，溫度傳感器；本儀器增加了高精度的溫度傳感器，以監(jiān)測儀器使用時的環(huán)境 溫度。溫度測量的范圍；+99C -55 C溫度測量的精度；士 0.5 C8,電 源：交流 220V 士

4、10%功耗 35W本儀器可以選配電動測試架，手動測試架，手持探險頭或四夾子電阻 測量輸入線。1, 電動測試架；電動測試架是用步進電機驅動測試頭升降，只要將被測工件放在測試 平臺中心位置，按一次啟動按鈕，測試頭自動下降，直到針頭和被測 工件接觸，探頭將自動以慢速下降一段距離壓緊探針使針與工件接觸 良好并等待測量，稍候測量結束，探頭上行并恢復到原來位置。所以 電動測試架的操作簡便，探針對被測工件所施壓力恒定，測量結果穩(wěn) 定，建議優(yōu)先選配。2, 手動測試架以其結構簡單不用電源見長，只要操作熟練，測量精度和穩(wěn)定性也很 好。3, 手持式四探針測試頭，使用靈活可以對任意形狀的半導體材料進 行測試，而且脫離

5、了測試架尺寸的限止，可以對大尺寸單晶硅柱的任 意部位進行單點或多點測試，但由於探針對被測材料的壓力是由手感 控制的，因此，測量時必須將探頭持穩(wěn)壓緊，保證探針和被測工件接 觸良好。4帶夾四線測試頭，是必配件，可以用四線法測量低阻值電阻。三，工作原理；1，測試原理；直流四探針法測試原理簡介如下；（1）電阻率測量；（圖一）：當1, 2, 3, 4四根金屬針排成一直線時體材料上時，在1, 4兩根探針間通過電流I，則在2, 3探針間產(chǎn)生電位差V,材料電阻率p =CV ( ?-cm)(3-1)式中C為探針修正系數(shù)，由探針的間距決定。當試樣電阻率分布均勻，試樣尺寸滿足半無窮大條件時2C= 1S1111(cm

6、)S 2S 1S 2S 2S 3(3-2)式中：Si, S2 S 分別為探針對1與2, 2與3, 3與4之間的距離，探頭系數(shù)由制造廠對探針間距進行測定后確定，并提供給用戶。每個探頭都有自已的系數(shù)。C 6.28 士 0.05,單位為 cm。(a) 塊狀或棒狀樣品體電阻率測量：由於塊狀或棒狀樣品外形尺寸遠大於探針間距，符合半無窮大的邊界條件，電阻率值可直接由(3-1 )式求出。(b) 薄片電阻率測量：薄片樣品因為其厚度與探針間距相近，不符合半遠窮大邊界條件,測量時要附加樣品的厚度，形狀和測量位置的修正系數(shù)。其電阻率值可由下面公式得出p =CVG (W) D ( - )=p o G( W) D( d

7、 )(3-3 )ISSSS式中p o為塊狀體電阻率測量值G( W )為樣品厚度修正系數(shù)，可由附錄1A或附錄1B查得SW樣品厚度(a m ;S探針間距(mr)D: ( d )為樣品形狀與測量位置的修正函數(shù)可由附錄 S2查得。當園形硅片的厚度滿足 W 120010 uA1 uA樣品厚度較?。篠 =0.0011見表5W :樣品厚度(m):S:探針間距(mm)W/SW01234567890.000.000.001.001.002.003.004.004.005.006.0060.0110.007.008.009.009.010.011.012.012.013.0140.0220.014.015.016

8、.017.017.018.019.019.020.0210.0330.022.022.023.024.025.025.026.027.027.0280.0440.029.030.030.031.032.032.033.034.035.0350.0550.036.037.038.038.039.040.040.041.042.0430.0660.043.044.045.045.046.047.048.048.049.0500.0770.051.051.052.053.053.054.055.056.056.0570.0880.058.058.059.060.061.061.062.063.063

9、.0640.0990.065.066.066.067.068.069.069.070.071.0710.10100.072.073.074.074.075.076.077.077.078.0790.11110.079.080.081.082.082.083.084.084.085.0860.12120.087.087.088.089.089.090.091.092.092.0930.13130.094.095.095.096.097.097.098.099.100.1000.14140.101.102.102.103.104.105.105.106.107.1070.15150.108.109

10、.110.110.111.112.113.113.114.1150.16160.115.116.117.118.118.119.120.120.121.1220.17170.123.123.124.125.126.126.127.128.128.1290.18180.130.131.131.132.133.133.134.135.136.1360.19190.137.138.139.139.140.141.141.142.143.1440.20200.144.145.145.146.147.148.149.149.150.1510.21210.151.152.153.154.154.155.1

11、56.157.157.1580.22220.159.159.160.161.162.162.163.164.164.1650.23230.166.167.167.168.169.170.170.171.172.172W/SW01234567890.24240.173.174.175.175.176.177.177.178.197.1800.25250.180.181.182.183.183.184.185.185.186.1870.26260.188.188.189.190.190.191.192.193.193.1940.27270.195.195.19.197.198.199.199.20

12、0.201.2010.282803202.203.203.204.205.205.206.207.208.2080.29290.209.210.211.211.212.213.214.214.215.2160.30300.216.217.218.219.219.220.221.221.222.2230.31310.224.224.225.226.227.227.228.229.229.2300.32320.231.232.232.233.234.234.235.236.237.2370.33330.238.239.239.240.241.242.242.243.244.2450.34340.2

13、45.246.247.247.248.249.250.250.251.2520.35350.252.253.254.255.255.256.257.257.258.2590.36360.260.260.261.262.263.263.264.265.265.2660.37370.267.268.268.269.270.270.271.272.273.2730.38380.274.275.275.276.277.278.278.279.280.2810.39390.281.282.283.283.284.285.286.286.287.2890.40400.288.289.290.291.291

14、.292.293.293.294.2950.41410.296.296.297.298.298.299.300.301.301.3020.42420.303.303.304.305.306.306.307.308.308.3090.43430.310.311.311.312.313.314.314.315.316.3160.44440.317.318.319.319.320.321.321.323.323.3240.45450.324.325.326.326.327.328.329.329.330.3310.46460.331.332.333.333.334.335.336.336.337.3

15、380.47470.338.339.340.341.341.342.343.343.344.3450.48480.346.346.347.348.348.349.350.351.351.3520.49490.353.353.354.355.355.356.357.358.358.3590.50500.360.360.361.362.363.363.364.365.3653.68W/SW01234567890.51510.367.368.368.369.370.370.371372372.3730.52520.374.375.375.376.377.377.378.379.379.3800.53

16、530.381.382.382.383.384.384.385.386.386.3870.54540.388.389.389.390.391.391.392.393.393.3940.55550.395.396.396.397.398.398.399.400.400.401056560.402.402.403.404.405.405.406.407.407.4080.57570.409.409.410.411.411.412.413.414.414.4150.58580.416.416.417.418.418.419.420.420.421.4220.59590.422.423.424.425

17、.425.426.427.427.428.4290.60600.429.430.431.431.432.433.433.434.435.4350.61610.436.437.437.438.439.439.440.441.442.4420.62620.443.444.444.445.446.446.447448.448.4490.63630.450.450.451.452.452.453.454454.455.4560.64640.456.457.458.458.459.460.460461.462.4620.65650.463.464.464.465.466.466.467468.468.4

18、690.66660.470.470.471.472.472.473.474.474.475.4760.67670.476.477.477.478.479.479.480.481.481.4820.68680.483.483.484.485.485.486.487.488.488.4890.69690.489.490.491.491.492.492.493.494.494.4950.70700.496.496.497.498.498.499.500.500.501.5010.71710.502.503.503.504.505.505.506.507.507.5080.72720.508.509.

19、510.510.511.512.512.513.514.5140.73730.515.516.516.517.517.518.519.519.520.5200.74740.521.522.522.523.524524.525.525.526.5270.75750.527.528.529.529.530.530.531.532.532.5330.76760.533.534.535.535.536.537.537.538.538.5390.77770.540.540.541.541.542.543.543.544.544.545W/SW01234567890.78780.546.546.547.5

20、47.548.549.549.550.550.5510.79790.552.552.553.553.554.555.555.556.556.5570.80800.558.558.559.559.560.561.561.562.562.5630.81810.564.564.565.565.565.567.567.568.568.5690.82820.569.570.571.571.572.573.573.573.574.5750.83830.575.576.576.577.577.579.579.579.580.5800.84840.581.581.582.583.583.584.584.585

21、.585.5860.85850.587.587.588.588.589590.590.591.591.5920.86860.592.593.593.594.594.596.596.596.597.5970.87870.598.598.599.599.600.601.601.602.602.6030.88880.603.604.604.605.605.607.607.607.608.6080.89890.609.609.610.610.611.612.612.613.613.6140.90900.614.615.615.616.616.617.617.618.618.6190.91910.619

22、.620.621.621.622.623.623.623.624.6240.92920.625.625.626.626.627.628.628.628.629.6290.93930.630.630631.631.632.633.633.634.634.6350.94940.635.636.636.637.637.638.638.639.639.6400.95950.640.641.641.642.642.643.643.644.644.6450.96960.645.646.646.647.647.648.648.649.649.6500.97970.650.651.651.652.652.65

23、3.653.654.654.6550.98980.655.656.656.657.657.658.658.658.658.6590.99990.660.660.661.661.662.663.663.663.664.6641.001000.665附錄1B 樣品厚度修正系數(shù) G（S ）樣品厚度較厚：WS =0.013.49見表W:樣品厚度（口 m）: S:探針間距（mm）W/S0.000.010.020.030.040.050.060.070.080.090.000.00000.00720.01440.02160.02890.03610.04330.05050.05770.06490.100.0

24、7210.07940.08660.09380.10100.10820.11540.12260.12980.13710.200.14430.15150.15870.16590.17310.18030.18750.19480.20200.20920.300.21640.22360.23080.23800.24520.25240.25960.26680.27400.28120.400.28840.29560.30270.30990.31710.32420.33130.33850.34560.35260.500.35970.36680.37380.38080.38780.39480.40180.408

25、70.41560.42240.600.42930.43610.44290.44960.45630.46300.46960.47620.48270.48920.700.49570.50210.50850.51480.52100.52730.53340.53960.54560.55160.800.55760.56350.56940.57510.58090.58660.59220.59780.60330.60870.900.61410.61940.62470.62990.63510.64020.64520.65010.65510.65991.000.66470.66940.67410.67870.6

26、8330.68770.69220.69650.70090.70511.100.70930.71340.71750.72150.72550.72940.73330.73710.74080.74451.200.74820.75180.75530.75890.76220.76660.76890.71220.77540.77861.300.78170.78480.78790.79080.79380.79670.79960.80240.80520.80791.400.81060.81320.81580.81840.82090.82340.82580.82820.83060.83291.500.83520

27、.83750.83970.84190.84410.84620.84830.85030.85240.85441.600.85630.83820.86010.86200.86390.86570.86750.86920.87090.87261.700.87430.87600.87760.87920.88080.88230.88380.88530.88680.88831.800.88970.89110.89250.89390.89520.89650.89780.89910.90040.90161.900.9029 0.90410.9053 0.90640.9076 0.90870.9099 0.911

28、0 0.91210.9131W/S0.000.010.020.030.040.050.060.070.080.092.000.91420.91520.91620.91720.91820.91920.92020.92110.92210.92302.100.92390.92480.92570.92660.92740.92830.92910.92990.93070.93152.200.93230.93310.93380.93460.93530.93610.93680.93750.93820.93892.300.93960.94020.94090.94150.94220.94280.94350.944

29、10.94470.94532.400.94590.94020.94700.94760.94820.94870.94930.94980.95030.95092.500.95140.95190.95240.95290.95340.95380.95430.95480.95530.95572.600.95620.95660.95710.95750.95790.95830.95880.95920.95960.96002.700.96040.96080.96120.96160.96190.96230.96270.96300.96340.96372.800.96410.96440.96480.96520.9

30、6550.96580.96610.96640.96670.96712.900.96740.96770.96800.96830.96860.96890.96920.96940.96970.97003.000.97030.97050.97080.97110.97130.97160.97180.97210.97240.97263.100.97280.97310.97330.97360.97380.97400.97420.97450.97470.97493.200.97510.97530.97560.97580.97600.97620.97640.97660.97680.97703.300.97720

31、.97740.97760.97780.97790.97810.97830.97850.97870.97883.400.97900.97920.97940.97950.97970.97990.98000.98020.98030.9805如需所測值更精確，請查下表附錄2樣品形狀和測量位置的修正系數(shù) D (d )(1)圓形薄片(mm)探針位置0mm1/4 d5 mm4 mm3 mm2 mm200.97880.96330.96330.95080.92630.8702230.98390.97190.96620.95380.92950.8739250.98630.97610.96770.95530.931

32、20.8758270.98820.97940.96880.95650.93250.8773300.99040.98320.97020.95800.93420.8793320.99160.98520.97090.95880.93510.8804350.99290.98760.97180.95980.93620.8817380.99400.98940.97250.96060.93710.8829400.99460.99040.97290.96100.93770.8835420.99510.99130.97330.96140.93820.8841450.99570.99240.97380.96200

33、.94880.8849500.99650.99380.97440.96270.94970.8859550.99710.99190.97490.96330.94030.8868570.99730.99520.97510.96350.94060.8871600.99760.99570.97520.96380.94090.8875630.99780.99610.97550.96400.94120.8879650.99790.99630.97570.96410.94140.8881700.99820.99680.97600.96450.94180.8886750.99850.99720.97620.9

34、6480.94210.8891800.99860.99760.97640.96500.94240.8895900.99890.99810.97680.96540.94290.8901距圓心位置距邊緣位置1000.99910.99840.97700.96570.94330.8904(2)矩形薄片正方形矩形d/sa/d=1a/d=2a/d=3a/d 41.00.22040.22051.250.27510.27021.50.32630.32860.32861.750.37940.38030.38032.00.43010.42970.42972.50.51920.51940.51943.00.54220.59570.59580.59584.00.68700.71150.71150.71155.00.77440.78870.78880.78887.50.8846