金屬鍵合技術(shù)及其在光電器件中的應(yīng)用_圖文

1、 中國(guó)光學(xué)期刊網(wǎng) Vol.44, No.1Jan. 2007www. opticsjournal. net Vol.44, No.1Jan. 2007激光與光電子學(xué)進(jìn)展 aser &Optoelectronics Progress 中國(guó)光學(xué)期刊網(wǎng) www. opticsjournal. net 中國(guó)光學(xué)期刊網(wǎng) Vol.44, No.1Jan. 2007www. opticsjournal. net Vol.44, No.1Jan. 2007激光與光電子學(xué)進(jìn)展 aser &Optoelectronics Progress 中國(guó)光學(xué)期刊網(wǎng) www. opticsjournal. n

2、et 中國(guó)光學(xué)期刊網(wǎng) Vol.44, No.1Jan. 2007www. opticsjournal. net綜合 評(píng)述 Review 光學(xué)器件 參考文獻(xiàn) Vol.44, No.1 Jan. 2007 1 Lasky J B, Stiffler S R, White F R et al. Silicon-on-insulator (SOI by bonding and etch-backJ. Proc. IEDM, 1985, 28 (4:684689 2 Albaugh K B, Cade P E, Rasmussen D H et al. Mechanisms of anodic bond

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