バーニア効果を用いた 外部共振器型半導(dǎo)體レーザー

1、秋山研木下基効果用外部共振器型半導(dǎo)體発表內(nèi)容1. 目的2. 原理3. 機(jī)械的発振周波數(shù)制御実験4. 電気的発振周波數(shù)制御原理予備実験5. 今後展望 背景光通信本光波長(zhǎng)異複數(shù)光信號(hào)多重化同時(shí)伝送方法WDM (Wavelength Division Multiplexing)大容量伝送実現(xiàn)半導(dǎo)體l1半導(dǎo)體l2半導(dǎo)體l3半導(dǎo)體ln合波器0.8nm(=100GHz)間隔複數(shù)半導(dǎo)體広帯域変調(diào)困難波長(zhǎng)対光源必要現(xiàn)狀1.5mm 帯半導(dǎo)體高速広帯域発振周波數(shù)制御100 GHz100 GHz100 GHz100 GHz間隔可変発振周波數(shù)Intensity (a.u.)detuning (GHz)01002003

2、00detuning (GHz)detuning (GHz)detuning (GHz)発振目的(= 0.4 meV)Sampled Grating DBR laser広帯域変調(diào)GainSampled Grating 1Sampled Grating 2Phase193.6193.8194194.2194.400.511.20.1T43 194.5193.5193.6193.8194194.2194.400.511.20.1T4 194.5193.5193.6193.8194194.2194.400.51T2 R1R2Beat反面、動(dòng)作複雑高度結(jié)晶加工技術(shù)必要短所。制御性拡張性良、溫度安定性見

3、込、外部共振器付半導(dǎo)體用。本実験通常結(jié)晶開面反射鏡働、共振器構(gòu)成。外部共振器型結(jié)晶開面反射防止加工(AR coating)施、外部共振器作成。反射防止膜注入電流周波數(shù)強(qiáng)度同時(shí)変調(diào)。狹帯域。外部作成共振器周波數(shù)広帯域制御可能。外部共振器型半導(dǎo)體LDLDlensAR coatinglaser diodemirror直線型外部共振器型外部共振器optical isolator長(zhǎng)所効率良扱易短所（本実験）戻光弱光往復(fù)長(zhǎng)所空間的戻光防光一方通行etalonetalon10T1 ()T2 ()19419310T()19419310T1 ()T2 ()19419310T()194193透過率00001111

4、透過率透過率透過率周波數(shù)周波數(shù)周波數(shù)周波數(shù)個(gè)共振器透過率共振器透過率個(gè)共振器透過率共振器透過率複合共振器作成、制御片方共振器FSR変化効果10T1 ()194193透過率00.51透過率周波數(shù) FSRFWHMFSRfcos2FSRnLc共振周波數(shù)間隔(Free Spectral Range)鋭(finesse)FWHM cos2sin411222cnLRRRATL屈折率 n光速 csinsinn損失 A反射率 R透過率周波數(shù) 透過100.100.160透過率透過率透過率196196.2196.4196.6195.8196196.2196.4196.6195.8196196.2196.4196.

5、6195.8周波數(shù)(THz)周波數(shù)(THz)周波數(shù)(THz)FSR=95 GHz, finesse=5.1枚分解能：6.4 GHzFSR=100 GHz, finesse=36機(jī)械的発振周波數(shù)制御実験LDoptical isolatoretalonl/2 platespectrumanalyzerlensmirrorlaser diodepolarizing beam splitter(PBS)angle66.5 deg0 degFSR95.0GHz100GHzFinesse5.136linewidth50 kHz外部共振器型半導(dǎo)體寫真LD結(jié)果6.16.26.36.46.5 (deg)1951

6、95.5196196.5197197.5intensity (a.u.)frequency (THz)角度発振変化100GHz16 ch解析10T43 197.519510T43 197.5195透過率透過率00.5100.51周波數(shù)周波數(shù)100GHz100GHzD板角度位置計(jì)算5.96.06.16.26.36.46.5195195.5196196.5197197.5角度発振周波數(shù)解析角度 (deg)発振周波數(shù) (THz)電気的制御今193.6193.8194194.2194.400.511.20.1T43 194.5193.5193.6193.8194194.2194.400.511.20.

7、1T4 194.5193.5193.6193.8194194.2194.400.51T2 次目的193.6193.8194194.2194.400.511.20.1T43 194.5193.5193.6193.8194194.2194.400.511.20.1T4 194.5193.5193.6193.8194194.2194.400.51T2 cos2FSRnLc屈折率角度機(jī)械的制御屈折率電気的制御遅変調(diào)速変調(diào)電気光學(xué)効果有石英板直接電圧印加屈折率変化期待。（E.O素子同様思）V1.5 mm帯以外半導(dǎo)體利用。濃度変化10-3程度屈折率変化、位置數(shù)十GHz変化期待。製品供給多、手入。共振器型。

8、顕微鏡寫真300 mm300 mm100 mm100 mm電流注入縦変化電流194.35194.3194.25194.201 電流(mA)194.35194.3194.25194.2周波數(shù)(THz)周波數(shù)(THz)透過光強(qiáng)度 (a.u.)透過位置変化問題點(diǎn)193.4193.45193.5193.55193.600.20.40.60.8110T3 T4 193.62193.4193.4193.45193.5193.55193.600.20.40.60.8111.362104T3 T4 193.62193.4193.503193.504193.505193.506193.507193.508193

9、.509193.5100.20.40.60.8117.543 105T3 T4 f 193.5104193.5024frequencyfrequencyfrequency共振器縦transmittancetransmittancetransmittance000111枚今枚考、共振器縦考慮必要？25 GHz25 GHz1 GHz枚共振器縦発振周波數(shù)制御193.4193.45193.5193.55193.6193.6500.20.40.60.8110T1 ( )193.7193.4193.4193.45193.5193.55193.6193.6500.20.40.60.8118.159 104f

10、 ( )193.7193.4GainPhase193.4193.45193.5193.55193.6193.6500.20.40.60.8110f ( ) T1 ( )()2193.7193.4共振器縦ARHRfrequencyfrequencyfrequencytransmittancetransmittancetransmittanceTransfer Matrix 発振反射型MEf+Ef- = rEf+ + tE-Er+ tEf+rEr-Er-rt伝搬型PEf+Ef- = Er-exp(-ikL)Er+ tEf+exp(-ikL)Er-LffrrEEttrtrtEE11ffrrEEikL

11、ikLEE)exp(00)exp(MPTransfer matrix光學(xué)的要素入射、反射、透過光関係行列表現(xiàn)発振計(jì)算GPHEMP1P2GPPEPMR12Ef+Er+EfEr発光出力帰還光外部rHffrrEEEERTransfer Matrix用出力光計(jì)算（帰還光計(jì)算発光+帰還光入力出力光求）1.94.10141.942.10141.944.10141.946.10141.948.10141.95.10141.952.10141.954.10141.956.10141.958.10141.96.10141.1061.1051.1041.1030.010.11101001.1031.1041.1051058.669 106Eout ( )219610121941012発振計(jì)算結(jié)果The calculated lasing spectrumfrequency (Hz)intensity (a.u.)SMSR 30 dB発振周波數(shù)様子frequency (Hz)intensity (a.u.)問題點(diǎn)挿入閾値増大0102030405009080706001020304050908070600.51.02.01.500.050.10.20.15current (mA)current (mA)power (mW)power (mW)自由発振