擴散硅壓阻式壓力傳感器的壓力測量實驗

實驗十一擴散硅壓阻式壓力傳感器的壓力測量實驗一、實驗目的：了解擴散硅壓阻式壓力傳感器測量壓力的原理與方法。二、實驗儀器壓力傳感器模塊、溫度傳感器模塊、數(shù)顯單元、直流穩(wěn)壓源+5V、±15V。三、實驗原理在具有壓阻效應的半導體材料上用擴散或離子注入法，摩托羅拉公司設計出X形硅壓力傳感器如下圖所示：在單晶硅膜片表面形成4個阻值相等的電阻條。并將它們連接成惠斯通電橋，電橋電源端和輸出端引出，用制造集成電路的方法封裝起來，制成擴散硅壓阻式壓力傳感器。擴散硅壓力傳感器的工作原理：在X形硅壓力傳感器的一個方向上加偏置電壓形成電流展當敏感芯片沒有外加壓力作用，內部電橋處于平衡狀態(tài)，當有剪切力作用時，在垂直電流方向將會產(chǎn)生電場變化E=Ap-i，該電場的變化引起電位變化，則在端可得到被與電流垂直方向的兩測壓力引起的輸出電壓Uo。U=d-E=d-Ap-i（11-1）O式中d為元件兩端距離。Uo圖1T電流實驗接線圖如圖11-2所示，MPX10有4個引出腳，1腳接地、2腳為Uo+、3腳接+5V電源、4腳為Uo-；當P1>P2時，輸出為正；Uo圖1T電流四、實驗內容與步驟1.接入+5丫、±15丫直流穩(wěn)壓擇20V檔，打開實驗臺總電源。.調節(jié)Rw2到適當位置并保與節(jié)Rw3使直流電壓表200mV檔顯力一.氣室1、2的兩個活塞退回到刻度"1/"的小孔后，便兩，1、氣至的壓刀和河天氣壓咫為0，氣壓計指在“零”刻度處，將MPX10的輸出接到差動放大器的輸入端Ui，調節(jié)Rw1使直流電壓表200mv檔顯示為零。.保持負壓力輸入P2壓力零不變，增大正壓力輸入P1的壓力到0.01MPa，每隔0.005Mpa記下模塊輸出Uo2的電壓值。直到P1的壓力達到0.095Mpa；填入下表1。.保持正壓力輸入P1壓力0.095Mpa不變，增大負壓力輸入P2的壓力，從0.01MPa每隔0.005Mpa記下模塊輸出Uo2的電壓值。直到P2的壓力達到0.095Mpa；填入下表2。.保持負壓力輸入P2壓力0.095Mpa不變，減小正壓力輸入P1的壓力，每隔0.005Mpa

記下模塊輸出Uo2的電壓值。直到P1的壓力為0.005Mpa；填入下表3。.保持負壓力輸入P1壓力0Mpa不變，減小正壓力輸入P2的壓力，每隔0.005Mpa記下模塊輸出Uo2的電壓值。直到P2的壓力為0.005Mpa；填入下表。10．實驗結束后，關閉實驗臺電源，整理好實驗設備。五、實驗數(shù)據(jù)記錄與分析1、保持負壓力輸入P2壓力零不變，增大正壓力輸入P1的壓力P1(kP)0.010.0150.0200.0250.0300.0350.0400.0450.050Uo2(V)1.6082.283.023.544.224.895.456.076.63P1(kP)0.0550.0600.0650.0700.0750.0800.0850.0900.095Uo2(V)7.057.798.218.739.259.6210.0310.5811.04（表1）用matlab繪制P1-Uo2曲線圖如下圖所示P1-UC曲線圖2、保持正壓力輸入P1壓力0.095Mpa不變，增大負壓力輸入P2的壓力P2(kP)0.010.0150.0200.0250.0300.0350.0400.0450.050Uo2(V)10.149.769.328.828.367.857.416.796.23P2(kP)0.0550.0600.0650.0700.0750.0800.0850.0900.095Uo2(V)5.725.084.593.853.262.561.681.120.32（表2）用matlab繪制P2-Uo2曲線圖如下圖所示減減/JP2-U02線003、保持負壓力輸入P2壓力0.095Mpa不變，減小正壓力輸入P1的壓力P1(kP)0.0900.0850.0800.0750.0700.0650.0600.0550.050Uo2(V)-0.67-1.33-1.95-2.57-3.13-3.67-3.95-4.51-5.13P1(kP)0.0450.0400.0350.0300.0250.0200.0150.0100.005Uo2(V)-5.57-6.01-6.27-6.70-7.18-7.52-7.90-8.22-8.55（表3）用matlab繪制P1-Uo2曲線圖如下圖所示0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P2/kPO7-V/2oU00.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P1/kP減0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P2/kPO7-V/2oU00.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P1/kP減/JP1-U曲線圖0-4-5V/2oU-8-9

4、保持負壓力輸入P1壓力0Mpa不變，減小正壓力輸入P2的壓力P2(kP)0.0900.0850.0800.0750.0700.0650.0600.0550.050Uo2(V)-8.05-7.71-7.30-6.92-6.50-6.11-5.70-5.34-4.89P2(kP)0.0450.0400.0350.0300.0250.0200.0150.0100.005Uo2(V)-4.39-3.92-3.42-2.86-2.30-1.65-1.07-0.400.29（表4）用matlab繪制的P2-Uo2曲線圖如下圖所示減小P2-UC曲線V/2oU0.0050.010.0150.02V/2oU0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P2/kPO5、靈敏度及非線性誤差計算線性擬合直線的斜率即為所求的靈敏度，故對上面的曲線圖依次進行線性擬合，如下圖所示（紅色為擬合直線），并由此算出其靈敏度和非線性誤差。靈敏度L=AU/AP擬合直線斜率非線性誤差6f=△m/yFSX100%（△m為輸出值與擬合直線的最大偏差，yF.S為滿量程輸出平均值）（1）P1-UC擬合直線0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.090.0950.1P1/kP2（1）P1-UC擬合直線0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.090.0950.1P1/kP2O8642V/2oUy=p1*x+p2pl=110.3p2=0.87657由圖讀出^m=0.392故靈敏度S=L=AU/AP非線性誤差6f=(0.392/11.4)X100%=3.5%P2-Uo2曲線圖0.0050.010.0150.020.0250.030.0350.040.0450.050.055P2-Uo2曲線圖0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.090.095氣壓P2/kPp2=11.765由圖讀出Am=0.650.1208642V/2oUy=p1*x+p2p1=-115.24故靈敏度L=AU/AP-1v1/k5p.24非線性誤差6f=(0.65/10.72)X100%=6.1%減小「1山。2曲線圖0.005減小「1山。2曲線圖0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P1/kPy=p1*x+p2p1=91.498p2=-9.3923由圖讀出Am=0.450-7V/2oU故靈敏度L=AU/AP非線性誤差6f=(0.45/8.87)X100%=5.1%減小P2-Uo曲線0.0050.010.0150.020.0250.030.0350.040.0450.050.0550.060.0650.070.0750.080.0850.09P2/kPy=p1*x+p2pl=-96