付俊興-開(kāi)題報(bào)告

1、微結(jié)構(gòu)耦合薄膜的制備及摩擦學(xué)微結(jié)構(gòu)耦合薄膜的制備及摩擦學(xué)特性研究特性研究姓 名： 付俊興指導(dǎo)老師： 周飛教授日 期： 2011.12.8一、選題依據(jù)一、選題依據(jù)角度尺寸形貌方向高溫熔融精度低曲面應(yīng)用有限高清潔度和工藝技術(shù)要求環(huán)境污染穩(wěn)定性差I(lǐng)nfluence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD Jiong-Shiun H/Vacuum(2007)二、國(guó)內(nèi)外研究現(xiàn)狀二、國(guó)內(nèi)外研究現(xiàn)狀圖1 不同氣源比對(duì)DLC膜硬度和彈性模量影響圖2 不同

2、氣源比對(duì)DLC膜表面粗糙度影響圖3 不同摻雜DLC膜抗磨損能力Characteristics and tribological properties in waterof Si-DLC coatings Xingyang Wu,Ma/Diamond and Related Materials/2007圖4 不同摻雜DLC膜摩擦系數(shù)圖5 四種表面鍍覆DLC的微結(jié)構(gòu)(a)垂直;(b)平行;(c)微坑(d)凸起Micro-texture at the coated tool face for high performance cutting Toshiyuki Obikawa et al. / In

3、ternational Journal of Machine Tools & Manufacture (2011)圖6 面積比對(duì)摩擦系數(shù)的影響Improved Tribological Behavior of DLC Films Under WaterLubrication by Surface TexturingQi Ding et al. / Tribol Lett (2011)圖7 磨損率隨面積比變化關(guān)系圖Tribological behavior of patterned PVD TiN coatings on M2 steel H.Y. Ma et al. / Tribol

4、Lett (2004)圖8 掩膜板設(shè)計(jì)簡(jiǎn)圖Patterned PVD TiN spot coatings on M2 steel Tribological behaviors under different sliding M. Hua et al. / WEAR (2006)圖9 對(duì)磨銷(xiāo)磨損率隨滑移速度關(guān)系圖10 對(duì)磨盤(pán)磨損率隨滑移速度關(guān)系三、課題研究方案三、課題研究方案1 1、研究目標(biāo)與內(nèi)容、研究目標(biāo)與內(nèi)容本研究致力于： 1.確定薄膜制備的最優(yōu)工藝參數(shù)及各參數(shù)對(duì)薄膜特性的影響。 2.揭示不同薄膜種類(lèi)、沉積參數(shù)和試驗(yàn)環(huán)境下摩擦副摩擦磨損特性。 3.優(yōu)化微結(jié)構(gòu)耦合薄膜制備工藝。 4.探索微結(jié)構(gòu)

5、耦合薄膜的水潤(rùn)滑磨損機(jī)制。2 2、具體方案、具體方案基材準(zhǔn)備基材準(zhǔn)備薄膜制備薄膜制備摩擦實(shí)驗(yàn)?zāi)Σ翆?shí)驗(yàn)拉拉曼曼光光譜譜實(shí)實(shí)驗(yàn)驗(yàn)?zāi)Σ聊Σ帘砻姹砻婀鈱W(xué)光學(xué)顯微顯微鏡鏡X射射線線能能譜譜薄薄膜膜厚厚度度測(cè)測(cè)試試環(huán)境環(huán)境載荷載荷速度速度摩擦摩擦表面表面掃面掃面電鏡電鏡分析分析摩擦摩擦表面表面三維三維形貌形貌分析分析實(shí)驗(yàn)結(jié)果處理實(shí)驗(yàn)結(jié)果處理論文論文寫(xiě)作寫(xiě)作磨屑磨屑拉曼拉曼及光及光電子電子能譜能譜掩膜板制備掩膜板制備種類(lèi)種類(lèi)氣源氣源偏壓偏壓膜厚膜厚試樣前處理試樣前處理薄膜制備與性能表征薄膜制備與性能表征耐腐蝕耐腐蝕試驗(yàn)試驗(yàn)表表面面粗粗糙糙度度測(cè)測(cè)試試摩擦摩擦表面表面光學(xué)光學(xué)顯微顯微鏡鏡薄薄膜膜物物相相分分析

6、析薄薄膜膜硬硬度度測(cè)測(cè)試試阻抗分析阻抗分析極化分析極化分析摩擦摩擦表面表面掃面掃面電鏡電鏡分析分析摩擦摩擦表面表面三維三維形貌形貌分析分析試驗(yàn)結(jié)果后處理試驗(yàn)結(jié)果后處理TaNTa-DLCCr-DLC摩擦摩擦試驗(yàn)試驗(yàn)拋光拋光清洗清洗膜膜面面結(jié)結(jié)合合力力測(cè)測(cè)試試四、研究基礎(chǔ)四、研究基礎(chǔ)1.已具備的實(shí)驗(yàn)條件： 樣片拋光機(jī)、超聲波清洗機(jī)、金相顯微鏡、摩擦磨損試驗(yàn)機(jī)、磁控濺射鍍膜設(shè)備等。 教研室往屆工作下已經(jīng)優(yōu)化的織構(gòu)參數(shù)和DLC、TiN等制備參數(shù)經(jīng)驗(yàn)。2.實(shí)驗(yàn)存在的困難： 磁控濺射鍍膜工藝參數(shù)的選定，通過(guò)閱讀文獻(xiàn)和實(shí)踐優(yōu)化改進(jìn)。 相關(guān)微結(jié)構(gòu)耦合薄膜制備和摩擦實(shí)驗(yàn)研究數(shù)據(jù)較少，實(shí)驗(yàn)結(jié)果參考存在一定困難，需

7、要在實(shí)驗(yàn)過(guò)程中主動(dòng)探索和總結(jié)經(jīng)驗(yàn)。2012.2前：基材準(zhǔn)備、掩膜板設(shè)計(jì)制作2012.2-8：薄膜制備與參數(shù)探索、相關(guān)檢測(cè)實(shí)驗(yàn)（膜厚、納米 硬度、三維形貌、SEM 、XRD、EDS等）2012.5-8：水潤(rùn)滑實(shí)驗(yàn)、相關(guān)檢測(cè)實(shí)驗(yàn)（納米硬度、三維形 貌、SEM 、XRD、EDS等）2012.9-10：實(shí)驗(yàn)總結(jié)，數(shù)據(jù)處理。2012.11-12：完善實(shí)驗(yàn)數(shù)據(jù)，書(shū)寫(xiě)論文五、研究計(jì)劃與進(jìn)度五、研究計(jì)劃與進(jìn)度六、參考文獻(xiàn)六、參考文獻(xiàn)1 溫詩(shī)鑄,黃平.摩擦學(xué)原理(第3版)M.北京:清華大學(xué)出版社, 2008.2 Ma Yuping,Chen Ming,Xiang Daohui.FABRICATION OF DL

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9、abot.Ion-beam deposition of thin films of diamond-like carbon J.Journal of Applied Physics,1971.5 馬國(guó)佳,鄧新綠.類(lèi)金剛石膜的應(yīng)用及制備J.真空,2002.6 曾群鋒,董光能,謝友柏等.高速鋼表面鍍覆DLC膜的結(jié)構(gòu)及其摩擦特性研究J.潤(rùn)滑與密封,2007.7 Xingyang Wu,Masahiro Suzuki,Tsuguyori Ohana. Characteristics and tribological properties in water of Si-DLC coatingsJ.Dia

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12、ts in base oilJ. Tribology International,2011.11 Qi Ding Liping Wang Yongxin Wang. Improved Tribological Behavior of DLC Films Under Water Lubrication by Surface TexturingJ. Tribol Lett,2011.12 任露泉,佟金,李建橋等.松軟地面機(jī)械仿生理論與技術(shù)J.農(nóng)業(yè)機(jī)械學(xué)報(bào),2000.13 王霄,夏立齊,高傳玉等.表面微造型技術(shù)改善物體表面摩擦性能的研究J. 潤(rùn)滑與密封,2006.14 Toshiyuki Obika

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