特殊氣體安全

1、1氣體保送系統(tǒng)平安 2氣體保送系統(tǒng)平安After this training, you will be able to:了解半導(dǎo)體/電子行業(yè)氣體種類及特性了解低溫氣體的危害及防護(hù)了解如何確保氣體保送系統(tǒng)平安了解如何正確操作鋼瓶了解gas-handling設(shè)備及其功能了解系統(tǒng)保送系統(tǒng)的部件及其功能了解gas cabinet和VMB/P.3設(shè)計(jì)準(zhǔn)那么氣體保送系統(tǒng)的三大設(shè)計(jì)準(zhǔn)那么 Safety Process Control 工藝控制流量、壓力等 Purity Control 純度控制純度/顆粒度.4氣體分類一根據(jù)氣體儲(chǔ)存方式不同，分為：Bulk Gas 大宗氣體特指Ar, N2, O2, He,

2、H2Specialty Gas 特種氣體 (SiH4, NH3, CF4, etc.)Compressed Dry Air枯燥緊縮空氣.5 氣體分類一大宗氣體Bulk Gas 大宗氣體-N2/Ar/O2通常半導(dǎo)體工廠，廠務(wù)N2/ Ar/ O2以液態(tài)儲(chǔ)存在槽罐內(nèi).6氣體分類一大宗氣體低溫液體在常壓下沸點(diǎn)低于-240oF (-115oC)例如O2液化溫度(-297 oF) (-183oC)Ar液化溫度(-302 oF) (-186oC)N2液化溫度(-320 oF) (-196oC)oC=(oF-32)*5/9.7氣體分類一大宗氣體低溫液體危險(xiǎn)性低溫蒸氣分散低溫液體能夠引起凍傷.8氣體分類一大宗氣

3、體低溫氣體的其它危險(xiǎn)低溫能夠會(huì)引起周圍物品的損傷危險(xiǎn)危險(xiǎn)包括過冷過大的體積膨脹霧.9氣體分類一大宗氣體低溫引起的破裂.10膨 脹 率.11氣體分類一大宗氣體低溫危險(xiǎn)防護(hù)提供排風(fēng)系統(tǒng)正確操作氣瓶正確的系統(tǒng)設(shè)計(jì)適當(dāng)?shù)膫€(gè)人防護(hù)設(shè)備.12氣體分類一大宗氣體Bulk Gas 大宗氣體-H2 /He由于H2和He的液化溫度極低，加之自然界游離態(tài)氣體極少，故H2和He普通以高壓氣態(tài)方式儲(chǔ)存在鋼瓶?jī)?nèi)國(guó)外運(yùn)用液態(tài)儲(chǔ)存，并且以鋼瓶組供應(yīng)H2常用電解水得到，He從礦石中提煉得到絕大部分產(chǎn)自美國(guó)H2液化溫度(-423 oF) (-253oC), He液化溫度(-452 oF) (-269oC) 絕對(duì)零度為 -273o

4、C.13氣體分類一特種氣體什么是Specialty Gas特種氣體大宗氣體&CDA以外的氣體空氣中極稀有氣體如Xe 氙氣不存在空氣中，人工合成之氣體 如AsH3砷烷特殊用途之超高純氣體又稱電子級(jí)氣體 .14氣體分類二根據(jù)氣體危險(xiǎn)性，氣體分為：不可燃?xì)怏w (N2, SF6, NF3等)可燃性氣體 (H2, SiH4, CH4等)氧化性氣體 (O2, N2O等)毒性氣體 (AsH3, PH3等腐蝕性氣體 (Cl2, DCS等.15氣體分類二常見危險(xiǎn)符號(hào)不可燃性等級(jí) 可燃性等級(jí) 氧化性等級(jí) 毒性等級(jí) 腐蝕性等級(jí).16氣體分類二不可燃?xì)怏w常見不可燃?xì)怏w種類通常指類似的惰性氣體不可燃?xì)怏w之危險(xiǎn)性窒息性

5、取代肺中的氧氣壓強(qiáng) 單位面積所接受的壓力能量 氣體在形狀轉(zhuǎn)變過程中產(chǎn) 生的能量.17氣體分類二不可燃?xì)怏w氧氣被其他氣提所取代之危害:19.5% 人類正常生活所需求的最低氧氣濃度極限15-19.5%任務(wù)才干下降，冠狀動(dòng)脈，肺部和循環(huán)系統(tǒng)出現(xiàn)先期病癥，12-14% 呼吸，脈搏加快，漸漸失去知覺10-12% 呼吸，脈搏進(jìn)一步加快，喪失判別才干，嘴唇發(fā)紫8-10%無認(rèn)識(shí)，嘔吐6-8% 8 分鐘死亡率100%，6分鐘死亡率50%，4-5分鐘尚可恢復(fù)4%40秒鐘內(nèi)昏迷，抽搐，停頓呼吸，直至死亡.18氣體分類二可燃?xì)怏w常見可燃?xì)怏w種類H2/ SiH4等可燃?xì)怏w之危險(xiǎn)性窒息性壓力可燃性爆炸能夠性.19氣體分類

6、二可燃?xì)怏w.20 氣體分類二可燃?xì)怏w熄滅過后的不銹鋼氣瓶.21氣體分類二可燃?xì)怏w可燃性氣體的危險(xiǎn)防護(hù)保證空氣的流動(dòng)，配備排風(fēng)正確的鋼瓶操作流程運(yùn)用防爆設(shè)備防止任何火化產(chǎn)生的能夠.22 氣體分類二氧化性氣體 用途： O2 無法呼吸時(shí)，醫(yī)生會(huì)用來維持呼吸 N2O - “笑氣 ，牙醫(yī)會(huì)用來做麻醉劑 這種氣體怎樣會(huì)有危險(xiǎn)性?.23氣體分類二氧化性氣體引燃物 燃料 氧化熄滅三角形三者缺一不可普通燃料木頭碳燃?xì)馊加脱趸锶剂箱X不銹鋼碳鋼引燃物緊縮且隔熱 (如柴油機(jī))沖擊高速度摩擦其他引燃物.24氣體分類二氧化性氣體用于氧化性氣體保送系統(tǒng)的資料必需:資料兼容與活潑的氧化性氣體不反響對(duì)資料系統(tǒng)作特殊清潔處置

7、(Oxygen clean)過高含氧量的危害當(dāng)含氧量=23.5% 時(shí)，熄滅特性發(fā)生改動(dòng)可燃范圍增大自燃溫度下降通常不會(huì)熄滅的物質(zhì)在高氧環(huán)境會(huì)熄滅通常會(huì)熄滅的物質(zhì)在高氧環(huán)境會(huì)極易熄滅，且熄滅速度極快.25氣體分類二氧化性氣體氧化性危險(xiǎn)防護(hù)提供排風(fēng)系統(tǒng)正確操作氣瓶運(yùn)用相容的原料防止引燃點(diǎn)確認(rèn)系統(tǒng)經(jīng)過適當(dāng)?shù)那逑?26氣體分類二毒性氣體例如AsH3PH3B2H6毒性氣體之危險(xiǎn)性對(duì)身體毒害中毒途徑吸入經(jīng)過皮膚吸收吞食注射.27氣體分類二毒性氣體專業(yè)術(shù)語TWA (Time Weighted Average) 工人每天8小時(shí)，每周40小時(shí)，無任何防護(hù)措施的情況下允許的最高接觸濃度，并且不會(huì)對(duì)人體產(chǎn)生損傷。T

8、LV (Threshold Limit Value) ACGIH允許的最高接觸濃度，等同于TWAPEL (Permissible Exposure Limit) OSHA美國(guó)職業(yè)平安與衛(wèi)生管理局建議的最高接觸濃度。Ceiling 任務(wù)中絕對(duì)不可以到達(dá)的最高濃度。IDLH (Immediately Dangerous to Life and Health) NIOSH 國(guó)立職業(yè)平安與安康研討所允許的30分鐘最高接觸濃度。LC50 (Lethal Concentration 50%) CGA美國(guó)緊縮氣體協(xié)會(huì)提出的 1小時(shí)內(nèi)有50%能夠性死亡的濃度。.28氣體分類二毒性氣體究竟有多毒?CO一氧化碳的

9、毒性允許濃度體積濃度 (ppm-part per million百萬分之一).29氣體分類二毒性氣體有毒氣體危險(xiǎn)防護(hù)提供排風(fēng)系統(tǒng)正確操作氣瓶毒氣監(jiān)測(cè)系統(tǒng)適當(dāng)?shù)膫€(gè)人配備培訓(xùn).30氣體分類二腐蝕性氣體低腐蝕性HFBCl3SiCl4高腐蝕性HClBF3DCS腐蝕性氣體之危險(xiǎn)性摧毀人體生理組織腐蝕設(shè)備以下幾種氣體的危險(xiǎn)性來自腐蝕性HF, BCl3, SiCl4.31氣體分類二腐蝕性氣體被腐蝕的瓶口閥.32氣體分類二腐蝕性氣體腐蝕性危險(xiǎn)的防護(hù)提供排風(fēng)系統(tǒng)正確操作氣瓶采用相容的原資料降低含水量適當(dāng)?shù)膫€(gè)人防護(hù)設(shè)備.33氣體分類二腐蝕性氣體操作腐蝕性氣體所應(yīng)配備的個(gè)人防護(hù)設(shè)備橡膠防護(hù)服橡膠手套面具SCBA可選

10、.34氣瓶操作.35氣瓶操作單瓶運(yùn)輸車.36氣瓶操作雙瓶運(yùn)輸車.37氣瓶操作多瓶運(yùn)輸車.38氣瓶操作不要經(jīng)過旋轉(zhuǎn)來挪動(dòng)氣瓶.39氣瓶操作氣瓶操作原那么不要機(jī)械撞擊氣瓶不要用氣瓶作為滾輪不要經(jīng)過氣瓶蓋吊升氣瓶不要用磁鐵或吊索吊升氣瓶不要經(jīng)過旋轉(zhuǎn)來挪動(dòng)氣瓶固定住氣瓶.40氣瓶操作高溫會(huì)引起瓶?jī)?nèi)壓力上升低溫會(huì)引起瓶體易碎和瓶口閥實(shí)效.41 半導(dǎo)體廠房的氣體供應(yīng)方式PipelineCylindersY Cylinders/ISO ModulesTube Trailers Cryogenic Tanks.42氣體供應(yīng)方式Bulk 大宗氣體 Large quantity 3 methods may be

11、supplied to the fab1.Nitrogen plants and pipelines N2空分站及管網(wǎng)2.Cryogenic liquid 深冷液體供應(yīng)3.Tube trailer 魚雷管針對(duì)H2/HeCylinder 氣體鋼瓶Small quantityMost labor intensive1. Cryogenic liquid cylinders (dewars) 杜瓦供應(yīng)2. Gas cylinder 氣體鋼瓶 .43Onsite plants 室外空分站 廠務(wù)氮?dú)?Fab size 30,000 sq ft(2787m2) Reliable (oil free com

12、pressors)Pipeline Commonly Nitrogen Reliable Multiple Customers氣體供應(yīng)方式N2空分站及管網(wǎng) .442/17/976大宗深冷液態(tài)氣體Why do we cool gas to a cryogenic state?NitrogenOxygenArgonHydrogenHeliumLiquid temperature: -183C (O2) to -423(H2).45大宗深冷液態(tài)氣體Cryogenic liquid + heat = gasLiquid-to-gas expansion ratio from 694 (N2) to 8

13、57 (O2)液態(tài)到氣體的膨脹率694(N2)-857(O2).46Storage & Supply System.47Vaporizers蒸發(fā)器 provide the heat that converts the liquid back to a gas. Advantages: high reliability and low power (energy) cost. 高穩(wěn)定性和低能耗Disadvantage: the gas can be heated only to ambient temperature.氣體只能升溫至環(huán)境溫度Sized by both peak and conti

14、nuous flow. 根據(jù)繼續(xù)的最大流量來選擇蒸發(fā)器規(guī)格。Require usage patterns, peak flows and their duration, and monthly volumes for correct sizing. 根據(jù)實(shí)踐運(yùn)用方式、最大流量及其繼續(xù)時(shí)間和月耗費(fèi)量來更正蒸發(fā)器規(guī)格。Storage & Supply System.48Storage & Supply SystemPurification 純化Many fab gas supply systems use onsite equipment to further purify the gases.

15、半導(dǎo)體工廠通常運(yùn)用純化安裝來純化氣體.49Storage & Supply SystemPressure Regulation & Filtering氣體經(jīng)過m以下級(jí)的過濾安裝和減壓閥組.50Tube Trailer Supply.51Each type of cylinder gas will exhibit different characteristics.Types of Cylinder Gases.52Compressed & Liquid GasesCompressed Gas 緊縮性氣體Easily transported through piping to the point

16、 of use (POU). 經(jīng)過管網(wǎng)容易保送至各運(yùn)用點(diǎn)Pressure depletion in the cylinder allows the cylinder content to be monitored. 可以經(jīng)過瓶?jī)?nèi)壓力的降低，監(jiān)測(cè)鋼瓶剩余氣體量The pressure drop will be seen on the high pressure side of the gas delivery system.壓力降可以在氣體保送系統(tǒng)的高壓側(cè)看到。As the pressure in the gas cylinder is depleted, the delivery pressu

17、re will increase (equalize).53Compressed versus Liquid GasesLiquefied compressed gas液化性緊縮氣體: a gas that, when compressed in a cylinder, becomes liquid at ordinary tempeatures.常溫下，氣體在鋼瓶?jī)?nèi)被緊縮成液態(tài)。Boiling points range 沸點(diǎn)范圍from -130oF(-90oC) to 30oF(-1oC). At 70oF the cylinder contains both liquid and gas

18、. 在室溫20oC時(shí)，鋼瓶?jī)?nèi)為液氣共存。Cylinder pressure ( vapor pressure VP ) is directly affected by ambient temperature. 鋼瓶?jī)?nèi)壓力蒸發(fā)壓直接受環(huán)境溫度影響。Demand for the product can cause the vapor pressure to drop off and create a JT effect. 氣體的需求量會(huì)產(chǎn)生蒸發(fā)壓的降低并產(chǎn)生一焦耳能量.54Joules - Thompson (JT) Effect.55Cylinders: 35+ Gases常用鋼瓶規(guī)格: 40L

19、大鋼瓶和8L鋁瓶以N2為例：一個(gè)40L鋼瓶?jī)?nèi)，可以包容6規(guī)范立方米的N2.56Cylinder Liquid DewarFunction: The dewar cylinder is used for significant spot requirements where there is no bulk house gas supply. 杜瓦適用于無液槽罐供應(yīng)，但耗費(fèi)量有較大的情況下。單個(gè)杜瓦的最大供氣量150slpm運(yùn)用于N2/ O2/ Ar等同于10-12個(gè)鋼瓶氣量經(jīng)過盤管式蒸發(fā)器壓力和溫度動(dòng)搖.57Cylinder MaterialsWhat materials of constru

20、ction are cylinders made from?鋼瓶材質(zhì)The materials can besteel, 鋼運(yùn)用最普遍aluminum, 鋁nickel, 鎳stainless, 不銹鋼Monel，鎳合金Steel construction is the most inexpensive and monel is the most costly to produce.58Fab Gas Handling Equipment Cylinder gas cabinet 氣柜Valve manifold box/P VMB/P閥組箱/盤Valve stand Gas isolatio

21、n boxGas jungle 混氣盒.59 Gas Flow.60Distribution Piping1.Bulk Gas PipingThe bulk gas delivery lines are supplied from a cryogenic tank, tube trailer or bundlesThe main header will branch off into various process areas.These lines may feed through a purifier.2.Cylinder Gas PipingCylinder gas delivery l

22、ine is supplied from the gas cylinder to the customers production tool.The layout of a gas distribution system is determined by the customers needs and cleanroom design.61Bulk Gas Distribution SystemUltra High Purity (process) systemBulk gas distribution piping systems are characterized by large pip

23、e sizes with multiple branches and tool hook-ups.All delivery lines should be labeled with the line content and flow direction. All valves must be labeled.62 Cylinder Gas Distribution Piping SystemSmaller tubing sizes and fewer tool hookups.Valve manifold boxes (VMBs) Two design philosophies: 1. 1 c

24、ylinder / 1 tool 2. Switchover Systems or VMBs .63Materials of ConstructionTypical Materials of pipe or tube construction for the gas industry.64Cylinder Gas Cabinet.65 A Variety of Gas Delivery SystemsExamples:APCI GG250, 450, 500NorcimbusSemi gasATTOCVDKC-TechThe technician must know and understan

25、d the systems in use at the facility.66Valve Manifold Box (VMB) 閥組箱A cabinet for splitting a single gas supply line into multiple supply branches for process equipment一個(gè)氣瓶經(jīng)過VMB同時(shí)供應(yīng)多臺(tái)設(shè)備。Each branch operates independently各個(gè)分支獨(dú)立控制 Manual or automatic operationReplaces as many as 8 cylinder gas cabinets

26、 最大可至8個(gè)sticks，即1進(jìn)8出。.67Valve Manifold Box (VMB) 閥組箱.68 Valve Manifold Box (VMB) 閥組箱.69Gas Jungle混氣盒.70Gas System Components1.Piping / tube2.Valves3.Regulators4.Pressure indicators5.Excess flow devices6.Filters7.Purifiers8.Mass flow controllers.71Piping / TubePolymer - nylon, plastics, etc.MetalsCopp

27、er, 304 SS, 316 LSS, 316 LSS VAR, Hastelloy.72Piping / TubeMetal Treatments2 types:1. Polish拋光: Chempolish (acid)CP化學(xué)拋光Electropolish EP電解拋光2. Passivation鈍化: Oxygen PassivationFluorine PassivationMechanical FittingsCompression 雙卡套接頭Threaded 螺紋接頭Vacuum 真空接頭Face seal 面密封接頭VCR.73VCR Mechanical Fitting.7

28、4 Moisture Permeation Through Plastic Tubing塑料資料很少運(yùn)用在半導(dǎo)體行業(yè)的氣體保送系統(tǒng)上，因其有透濕性。.75Valve TypesThere are 4 types of valves used in a fab gas system:1. Shutoff截止閥2. Check單向閥3. Safety平安閥4. Cylinder鋼瓶閥.76Shutoff ValvesPacked Seal Valve填塞密封閥針閥等Bellows Seal Valve波紋管密封閥Diaphragm Seal Valve隔膜閥.77Check Valves.78Sa

29、fety Relief Valves.79Cylinder ValvesThe tied diaphragm valve is the primary valve used in specialty gases. 隔膜閥是特氣保送系統(tǒng)中首選閥門。.80Regulators.81Regulator Discharge CharacteristicsHigh Purity, Single-stage SSHigh Purity, Two-stage Regulator Regulator.82Regulator TerminologyRefer to Participant Guide Appen

30、dix83Pressure IndicatorsThree types of devices that indicate pressure.1.Pressure Gauge2.Pressure Indicator3.Pressure Transducer.84 Pressure Indicators-Pressure Gauge壓力表儀表管內(nèi)顆粒聚集，吹掃困難1%誤差本地直接讀數(shù)三通安裝方式壓力單位 100psi=7bar=0.7MPa表壓力為相對(duì)壓力，絕對(duì)壓力相對(duì)壓力+大氣壓.85 Pressure Indicators-Pressure Transmitter壓力傳送器帶繼電器信號(hào)輸出的壓

31、力表無需電源.86Pressure Indicators-Pressure Transducer壓力變送器0.1% full scale accuracyRequires electrical power source.Tee installation or inline install.Excellent purgability.Pressure transducers are superior to gauges in accuracy, particle, and performance. .87Excess Flow Devices在氣體保送系統(tǒng)中，判別一個(gè)異常大的氣體流量The ra

32、ting of the excess flow device installation is determined by the process flow requirements.There are two types of excess flow devices:1.Excess flow valve2.Excess flow switch.88Excess Flow Devices.89FiltersPurposes:去除氣流中的顆粒過濾器的重要性過濾效率.90Gas Filter Selection Criteria過濾器選型準(zhǔn)那么Flow rate 氣體流量Gas Compatibi

33、lity 與氣體的兼容性Corrosives 腐蝕性Reactants 反響物Outgassing performance 透氣性能.91Gas Filter Selection Criteria過濾器選型準(zhǔn)那么Temperature 氣體溫度Pressure 氣體壓力Particle Retention Rating 顆粒截獲率.92Filter MaterialsEvaluation of a filter should include all components of the filter.The elastomeric or teflon filter is the most eco

34、nomical and common filter.特氟龍是最常用且經(jīng)濟(jì)的過濾材質(zhì)Filter components * Housing 濾殼* Media 過濾芯* Media to housing seal 濾殼的密封* Support structure (elastomeric)濾芯的固定架.93Filter MaterialsFilter media 過濾材質(zhì)* Elastomeric 塑料材質(zhì)* Ceramic 陶瓷* Metallic 金屬316 LSSHastelloy C-22Nickel.94PurifiersThere are two types of purifiers

35、: 1. getter (metal) - regenerable2. chemical resin.95Purifiers-ApplicationsEasy maintenance/changeSafetyLife tracking by cylinder changesIncrease panel & piping life (corrosion, contamination)Purge gas purifier improves cylinder purge.96Purifiers-ApplicationsOther applicationsEpi/CVDSputtering (metal applications)There maybe multiple purifiers located in the Argon delivery lines. The metal process must be particle free