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1、Airbus Process Specification Passivation of Corrosion Resistant Steel Published and distributed by : AIRBUS S.A.S. ENGINEERING DIRECTORATE 31707 BLAGNAC Cedex FRANCE Copyright reserved Ref. no. AIPS02-05-005空客公司抗腐蝕鋼的鈍化流程規(guī)范出版、發(fā)行:空客工程指揮部31707 BLAGNAC Cedex法國著作權(quán)所有參考編號(hào)。AIPS02 - 05 - 005Contents 1 Scope
2、2 Normative references 3 Definition, applicability and limitations 4 Engineering requirements 5 Technical qualification 6 First part qualification 7 Series production inspection 8 Rework 9 Environment, health and safety內(nèi)容1范圍2引用標(biāo)準(zhǔn)3定義、適用性和局限性4工程需求5技術(shù)資格6第一部分資格7系列的生產(chǎn)檢驗(yàn)8返工9環(huán)境、健康和安全1 Scope This Airbus Pro
3、cess Specification defines the Engineering requirements for Passivation of Corrosion Resistant Steel . This specification does not give detailed instructions; these are given in the Process Instructions (PI) / Airbus Process Instruction (AIPI) and the Work Instructions. This specification shall not
4、be used as an inspection document. It shall be applied when mentioned in the relevant standard, material specification or Definition Dossier. 2 Normative references Only normative references cited in the text are listed hereafter. The latest issue of the publication referenced shall be used. AIMS 09
5、-00-003Water Quality. AIPS 04-03-001Heat treatment of steels. EN 2832 Hydrogen embrittlement of steels Notched specimen test. ASTMF519 Mechanical Hydrogen Embrittlement Evaluation of Plating/Coating Processes and Service Environments. EN 6072 Constant amplitude fatigue testing. EN 10020Definition an
6、d classification of grades of steel ISO 1463 Metallic and oxide coatings - Measurement of coating thickness: Microscopic method. ISO 2409 Paints and Varnishes - Cross-cut test ISO 2812 Paints and Varnishes - Determination of resistance to liquids - Part 2: Water immersion method ISO 4287GPS - Surfac
7、e Texture: Profile method ISO 6270 Paints and varnishes Determination of resistance to humidity Part 2: Procedure for exposing test specimens in condensation-water atmospheres ISO 9227 Corrosion tests in artificial atmospheres - Salt Spray Tests. ISO 18118Surfacechemical analysis Auger electron spec
8、troscopy and X-ray photoelectron spectroscopy ISO 25178 GPS - Surface Texture: Part 601, Part 602, Part 701: Nominal characteristics of instruments EN 9103 Quality management systems Variation management of key characteristics1范圍空客過程規(guī)范定義了抗腐蝕鋼鈍化的工藝要求。此規(guī)范并未給出詳細(xì)說明;這些都在過程指示 (PI)/空客過程指令(AIPI)和工作指令中給予說明。這
9、個(gè)規(guī)范不得作為一個(gè)檢查文檔。它適用在相關(guān)標(biāo)準(zhǔn)中提到時(shí),材料規(guī)格或定義檔案。2引用標(biāo)準(zhǔn)只有在本文中引用的標(biāo)準(zhǔn)才在下文中列出來。應(yīng)該使用引用版本的最新版本。AIMS09 - 00 003 水質(zhì)。AIPS 04 - 03 001 鋼的熱處理。EN 2832 鋼的氫脆,切口試樣測試。ASTM F519 機(jī)械氫脆電鍍?cè)u(píng)價(jià)/涂層工藝和服務(wù)環(huán)境。EN 6072 恒幅疲勞測試。EN 10020 鋼種的定義和分類ISO 1463 金屬和氧化物涂層,涂層厚度的測量:顯微鏡法ISO 2409漆和清漆-橫切測試ISO 2812漆和清漆-抗液體測定-第2部分:水浸法ISO 4287 GPS -表面紋理:剖面方法ISO
10、6270漆和清漆,抗?jié)穸鹊臏y定第2部分:在冷凝空氣中暴露測試樣的程序 ISO 9227 人工范圍中的腐蝕測試-鹽霧測試。ISO 18118 表面化學(xué)分析俄歇電子能譜和X射線光電子能譜ISO 25178 GPS -表面紋理: 零件 601,零件602,零件701:名義工具特征EN 9103質(zhì)量管理系統(tǒng)關(guān)鍵特征的多樣管理3Definition, applicability and limitations 3.1 Definitions Batch/lot: A batch consists of parts of a similar alloys/steel grade and configura
11、tion, treated sequentially in the bath setup using the same set of bath make-up solutions and process parameters within a defined period of 24h or within a time frame that will ensure consistent passivation results. Corrosion Resistant Steel (CRES)According to EN 10020 stainless steel is defined as
12、steel with at least 10.5% Cr and max :1.2% C. Stainless steel is subdivided by main propery into Corrosion Resisting Steel, heat resisting steel and creep resisting steel. CRES as defined in this AIPS is considered as Corrosion Resisting Steel which fulfils the corrosion resistance requirments accor
13、ding to this AIPS. Delay/Storage/Open time: Maximum allowed period of time between one process step and its subsequent step. Process Instruction:Document (e.g. AIPI: Airbus Process Instruction) that describes the detailed process, parameters, detailed steps, etc., which enable the process to meet th
14、e requirements of this process specification. Process Specification:Document that describes the requirements of a process (e. g. AIPS: Airbus Process Specification) Production relevant alloys: All alloys treated with the passivation process acc. to this AIPS at the processor in the specific shop. Rm
15、 (max):Maximum specified Ultimate Tensile Strength (UTS). Steel grade: Alloys from a defined group: e.g. austenitic, ferritic, martensitic or precipitation hardening (PH) steel Surface preparation/ conditioning Process steps prior to passivation to produce a surface free from contaminations. Sample:
16、 A sample can be a serial part or a accompanying specimen , which is processed with the serial parts and appropriate for the prescribed test method3 定義、適用性和局限性3.1定義批/批次:一批由相似的合金/鋼級(jí)和配置構(gòu)成,按順序處理在槽子安裝使用同一套槽液組成溶液和工藝參數(shù)在一個(gè)定義的段24小時(shí)或在一個(gè)時(shí)間框架,確保一致的鈍化效果。耐腐蝕鋼(CRES)根據(jù)EN 10020,不銹鋼的定義是鋼至少10.5% Cr以及最大1.2% C.不銹鋼是通過主要
17、特性細(xì)分成不銹鋼、耐熱鋼和抗蠕變的鋼。在AIPS中定義的CRES被認(rèn)為是耐腐蝕鋼,這個(gè)可以按照AIPS完成抗腐蝕的要求。 延遲/存儲(chǔ)/開放時(shí)間:一個(gè)工序之間及其后續(xù)步驟最大允許時(shí)間。過程指令:文檔(如 AIPI:空客過程指令),描述了詳細(xì)的過程,參數(shù),詳細(xì)的步驟等,這使得過程能夠滿足這種需求流程規(guī)范。工藝說明書:該文檔描述了工藝的需求(比如AIPS:空客過程規(guī)范)生產(chǎn)相關(guān)合金:所有合金的鈍化過程根據(jù)AIPS在特定車間的處理程序Rm(最大):指定最大極限抗拉強(qiáng)度(極限抗拉強(qiáng)度)。鋼的等級(jí):合金定義組:如奧氏體、鐵素體、馬氏體或沉淀硬化(PH)鋼表面處理/調(diào)節(jié)鈍化前的生產(chǎn)步驟產(chǎn)生一個(gè)無污染的表面樣
18、品:一個(gè)樣品可以是一個(gè)連續(xù)的零件或一個(gè)附隨的樣品,這是處理串行部分和適合規(guī)定的測試方法3.2 General description of the process The complete passivation process consists of a sequence of operations: a surface preparation step. The passivation process is only effective if surface contaminants that may accelerate corrosion are removed by applicab
19、le means. a passivation step. The passivation process itself consists of subjecting the items to a solution that reinforces the natural surface oxide film upon which the corrosion resistance of the material largely depends. a post-treatment step (if required). Following the passivation process a pos
20、t treatment operation such as a conversion coating, paint application, or resin- based coating can be performed, to improve the corrosion resistance. This applies particularly to corrosion sensitive steel grades (i.e. some martensitic or precipitation hardening corrosion resistant steels) The extent
21、 of the passivation and post-treatment (coating) will be defined on the drawing. The passivation process itself is a chemical process used to remove surface contaminations and to generate a stable superficial oxide layer to increase the corrosion resistance. Surface preparation steps, as required, s
22、uch as descaling, cleaning, pickling, desmutting and subsequent steps such as rinsing and post treatment are integral to the passivation process.3.2過程的一般描述完整的鈍化過程由一系列作業(yè)程序構(gòu)成:一個(gè)表面處理步驟。當(dāng)加速表面腐蝕的污染物以合適的方法移除掉,鈍化過程才是有效的。一個(gè)鈍化步驟。鈍化過程本身包括把物品放在溶液里,這個(gè)加強(qiáng)了抗腐蝕材料主要依賴的自然面氧化膜。一個(gè)后處理步驟(如果有需要的話)。鈍化處理后的后處理操作如轉(zhuǎn)換涂料、油漆的應(yīng)用,或
23、樹脂為基礎(chǔ)的涂層可以執(zhí)行,提高耐蝕性。這特別適用于腐蝕敏感鋼等級(jí)(即一些馬氏體或沉淀硬化耐蝕鋼)鈍化的程度和后處理(涂料)將在圖紙中得到定義。鈍化過程本身是一個(gè)化學(xué)過程用于去除表面污染和產(chǎn)生一個(gè)穩(wěn)定的表面氧化層來提高耐蝕性。表面處理的步驟,如有需要,如除銹、清潔、酸洗、除污和后續(xù)步驟如清洗和后處理對(duì)鈍化過程來說是不可或缺的。3.3 Applicability and limitations This Airbus specification is applicable when invoked by the drawing directly or through another documen
24、t for the purpose given in the scope. When processing to AIPS02-05-005 is required, it shall be invoked on the drawing by the words “Passivation of Corrosion Resistant Steel” or AIPS02-05-005. Process instructions shall not be called on drawing. This specification is applicable for -corrosion resist
25、ant austenitic steel -corrosion resistant martensitic and precipitation hardening and maraging steel This specification may be used surface preparation prior to dye-penetrant inspection. However, the requirement for this process is not stated in this AIPS and shall be defined in corresponding docume
26、nts. Note: Passivation is not to be regarded as a coating, nor should it be regarded as offering protection against galvanic corrosion to mating materials. This specification is not applicable for -unalloyed or low-alloyed carbon steel -cast steel -powder metallurgy steel -surface modified steel i.e
27、. with case-hardened, carburized or nitrided surfaces -soldered or brazed steel All operations (machining, heat treatment, welding, punching, drilling, forming, trimming, deburring, dimpling, etc.) influencing the effectiveness of the surface treatment or leaving untreated surfaces shall be complete
28、d prior to the surface treatment process. This process shall not be used on items containing joints and cavities where it is not possible to mask prior to passivation or to ensure complete removal of the passivation solution. If needed, hollow items shall be sealed to to prevent ingress of electroly
29、te to the internal surfaces. Only passivation solutions based on nitric acid or citric acid shall be used unless process qualification shows the fullfillment of this specification including surface analysis as per paragraph 4.2.4. Chromate loaded products (e.g. chromic acid or sodium dichromate) sha
30、ll not be used within the whole process chain. The material removal due to abrasive blasting, wire brushing or intensive pickling processes may influence the dimensions of the part and shall be considered so that final dimensional accuracy and surface roughness requirements of the design are met. Re
31、work of passivated parts is only acceptable if the design requirements according to the drawing and to this AIPS are met after the process. Parts shall only be submitted to rework a maximum of two times. The passivation process may have influence on fatigue properties. Components which are subject t
32、o fatigue requirements shall not be treated according to this specification unless the fatigue requirements are considered by the relevant design authority.3.3適用性和局限性空客規(guī)范適用于,為了范圍中給出的目的,圖紙直接或者通過另一個(gè)文件。當(dāng)需要根據(jù)AIPS02-05-005處理的時(shí)候,應(yīng)當(dāng)調(diào)用圖上的字“耐蝕鋼的鈍化”或AIPS02 - 05 - 005。過程說明不得要求圖。本規(guī)范適用于耐蝕鋼耐蝕馬氏體奧氏體沉淀硬化和馬氏體時(shí)效鋼這個(gè)規(guī)范
33、在著色滲透檢驗(yàn)前可用于表面處理。然而,這一過程的要求中沒有在AIPS規(guī)定出來和應(yīng)被定義于相應(yīng)的文檔。注意:鈍化不被視為一個(gè)涂層,也不應(yīng)該被視為提供防止電化學(xué)腐蝕交配的材料。本規(guī)范不適用于非合金的或者低合金的碳鋼鑄鋼粉末冶金鋼表面修飾鋼 比如表面硬化的,涂炭的或者氮化的表面焊接或釬焊的鋼所有影響表面處理或者留下未處理表面的操作(機(jī)械加工、熱處理、焊接、沖壓、鉆孔、成型、剪線、去毛刺、壓痕等),應(yīng)該在表面處理步驟前完成。 這個(gè)過程不得用于包含接頭和腔的項(xiàng)目,這些在鈍化之前不可能掩飾或確保完整移除鈍化溶液。如果需要,凹陷的產(chǎn)品應(yīng)密封,以防止電解質(zhì)進(jìn)入內(nèi)部表面只有當(dāng)鈍化溶液基于硝酸或檸檬酸才能使用除非
34、過程認(rèn)證展示規(guī)范的完成包括按照段落4.2.4的表面分析。鉻酸鹽加載產(chǎn)品(如鉻酸、重鉻酸鈉)在整個(gè)過程鏈不得使用。用噴砂,鋼絲刷清理或密集的酸洗過程用來去除材料可能影響部分的尺寸,并應(yīng)考慮,以便能夠滿足最終尺寸精度和設(shè)計(jì)的表面粗糙度。如果設(shè)計(jì)的要求是根據(jù)圖紙和AIPS并且在過程后得到滿足,鈍化零件的返工過程才是可以接受的。零件最多提交返工兩次。鈍化過程可能影響疲勞性能。受支配于疲勞性要求的組件不得根據(jù)本規(guī)范對(duì)待除非疲勞性要求由相關(guān)設(shè)計(jì)權(quán)威考慮的。4 Engineering requirements Engineering requirements are minimum requirements
35、 specified by Responsible Engineering to ensure optimal performance of the manufacturing process. All Engineering requirements have to be met and controlled in production. 4.1 Technical requirements Substrate Material: The condition of the material/parts to be treated shall be as described in the re
36、levant material specification. The parts shall be free from surface defects or damages like scratches, furrows, pores, cracks and foreign matter. Material of Process Equipment: Tanks, racks, baskets, electrical equipment etc. used for the treatments shall be made of material resistant to the bath li
37、quids. Water Quality: The necessary quality of the water (see AIMS 09-00-003) used for preparation of the baths as well as for the rinsing and drying (hot water) processes shall be defined in the Process Instruction. Rinsing and Drying: In between the surface treatment steps rinsing may be necessary
38、 to avoid contamination of the following bath. Processes paramters (i.e. process temperature) used for rinsing and drying shall not influence the material properties or further processing. Air used for drying or any other operation shall be dry and free from oil. Heat treatment: Prior to any heat tr
39、eatment the item shall be cleaned to remove all contaminants. Stress relief: Mechanical surface treatments like grinding operations may induce material embrittlement. CRES treated to a ultimate tensile strength Rm (max)higher than 1100MPa shall receive a stress relief heat treatment. The heat treatm
40、ent parameters shall be defined in the process instruction. De-hydrogenation: Bath operations may induce hydrogen permeation followed by material hydrogen embrittlement. CRES treated to a ultimate tensile strength Rm (max) higher than 1100 MPa shall receive a de-hydrogenation heat treatment within 1
41、h after the passivation treatment. The de-hydrogenation heat treatment shall be performed as indicated in the process instruction When the last tempering prior to de-hydrogenation is performed at a temperature lower than 200C, the part shall be de-hydrogenated at (135 5)C. In this case, twice the ti
42、me indicated in the table above shall be applied. If two or more processes leading to hydrogen embrittlement are performed within a 1h time span, de-hydrogenation needs only be performed once at the end of those processes. Handling of Items: During all process operations the parts shall not be subje
43、cted to any tensile, flexure, torsion or other stresses. All items/components shall be handled in such a way that any type of contamination or damage is avoided. If necessary, within all surface treatment steps components shall only be touched with adequate gloves. All parts shall be fully immersed
44、in the bath, not touching or covering one another. Parts with cavities shall be attached in such a way that gas bubbles can escape and proper bath circulation is ensured. The jigging of the components shall be adequate. Masking: Areas not to be subjected to the process shall be masked with masking v
45、arnish, plastic plugs or other approved auxiliary materials. It shall be demonstrated that the use of the masking materials is without detrimental effects on further processing (e.g. paint application) or the requested surface condition. If exposure to the surface treatment process is prevented by m
46、asking the corrosion resistance requirements may not be reached and must be achieved by other means. Delay/Open Times: Unless otherwise specified, parts shall be treated from one step to the next without delay (e.g. wet in wet between pickling treatment, rinsing and passivation treatment). Maximum a
47、llowed open/delay times shall be indicated in the Process Instruction. The time span for transfer / transportation / storage between different steps and/or sub-steps shall not be exceeded.4工程需求工程要求是責(zé)任工程部門規(guī)定的最小要求,確保生產(chǎn)過程的最優(yōu)性能。所有技術(shù)要求必須得到滿足并且在生產(chǎn)中得到控制。4.1技術(shù)要求基材:材料/零件的條件應(yīng)得到處理并且在相關(guān)材料規(guī)范中描述出來。這個(gè)部件應(yīng)該沒有表面缺陷或損害
48、如劃痕、皺紋、毛孔、裂紋和雜質(zhì)。工藝設(shè)備的材料:用于處理的槽子、貨架、籃子、電氣設(shè)備的材料應(yīng)該對(duì)槽液的溶液有抵抗力。水質(zhì)量:用于槽液,洗滌和干燥(熱水)的水的必要質(zhì)量(見AIMS09-00-003)應(yīng)在過程指令中明確出來。洗滌和干燥:表面處理步驟沖洗之間的對(duì)避免接下來槽液的污染可能是必要的。用于清洗和干燥的過程參數(shù)(比如過程溫度)不應(yīng)該影響材料特性或者深加工。用于干燥或任何其他操作的空氣應(yīng)干燥,無油。熱處理:在進(jìn)行任何熱處理項(xiàng)目前,應(yīng)清洗去除所有污染物。去應(yīng)力:機(jī)械表面處理如磨削操作可能引起材料脆化。耐蝕鋼得到極限抗拉強(qiáng)度Rm(max)高于1100 mpa,應(yīng)當(dāng)受到一個(gè)去應(yīng)力的熱處理。熱處理參
49、數(shù)應(yīng)該在過程規(guī)范中定義出來。去除氫:槽液操作可能誘發(fā)氫滲透接而引起材料氫脆。當(dāng)耐蝕鋼得到極限抗拉強(qiáng)度Rm(max)高于1100 Mpa,在鈍化處理后應(yīng)該收到去除氫熱處理1小時(shí)。這個(gè)去除氫熱處理均應(yīng)按照過程指令在去除氫化作用之前,在溫度低于200執(zhí)行最后的回火。零件應(yīng)在溫度為(1355)C去除氫化。在這種情況下,應(yīng)該應(yīng)用表格中指示時(shí)間的兩倍。如果導(dǎo)致氫脆的兩個(gè)或者更多的程序是在一個(gè)1小時(shí)的時(shí)間跨度執(zhí)行,在這些過程的結(jié)束僅僅需要執(zhí)行去除氫化。處理事項(xiàng):在所有過程操作中,零件不應(yīng)受到任何拉伸、彎曲、扭轉(zhuǎn)或其他壓力。所有物品/組件應(yīng)以這樣一種方式來處理,應(yīng)避免任何類型的污染或損壞。如果有必要,在所有表
50、面處理步驟中,組件只能套上手套才能觸摸。所有部件應(yīng)完全浸在槽液里,不要觸摸或覆蓋另一個(gè)。有腔的零件應(yīng)該以這樣一種方式連接起來,這樣可以避免氣泡也能確保正確的槽液循環(huán)。組件的振動(dòng)應(yīng)該是充分的。保護(hù):不經(jīng)過這個(gè)過程的區(qū)域應(yīng)用清漆、塑料塞或其他批準(zhǔn)的輔助材料進(jìn)行保護(hù)。它應(yīng)當(dāng)證明使用掩蔽材料對(duì)深加工(如油漆應(yīng)用程序)或要求表面條件是沒有有害影響的。如果暴露在表面處理過程受到保護(hù)的阻止,抗腐蝕要求可能無法達(dá)到,必須通過其他手段獲得。延遲/開放的時(shí)間:除非另有說明,零件處理從一個(gè)步驟到下一個(gè)步驟應(yīng)該沒有延遲(在酸洗、水洗和鈍化處理間)。最大允許打開/延遲時(shí)間中應(yīng)當(dāng)在過程說明中寫出來。不同步驟/或者子步驟之
51、間的轉(zhuǎn)移/運(yùn)輸/儲(chǔ)存不得超過時(shí)間跨度。4.1.1 Preparation prior to the passivation step After machining, all specimens with an ultimate tensile strength Rm (max) higher than 1100 MPa shall be submitted to stress relief heat treatment in order to relieve residual stresses. All parts shall be submitted to a surface prepar
52、ation process. The surface preparation process may include mechanical and/or chemical and/or electrochemical methods, singly or in combination. Necessary sub steps (e.g. cleaning, degreasing, descaling, abrasive blasting, activation, pickling, rinsing, drying, masking) depend on the degree of contam
53、ination. Although descaling or other steps may be necessary before passivation can be effective, these steps are not indicated explicitly in this AIPS but shall be indicated in the Process Instruction. The composition of appropriate surface preparation liquids may depend on the grade of the corrosio
54、n resistant steel to be treated. Alloying elements, contaminations and mechanical processing may influence the sensitivity of the CRES to corrosion. The result of the surface preparation treatment shall demonstrate a reproducible process and surface condition. Particularly, the resulting conditioned
55、 parts shall be substantially free of contaminants and other undesired organic and metallic residues from storage, transport and fabrication processes (e.g. oil, grease, forming compounds, lubricants, coolants, cutting fluids, rust, scale, foreign metal or other contaminations). Remaining contaminat
56、ion or damage shall lead to rejection or rework of the components. It is the responsibility of the processor to determine, by analysis or history, the condition of the surface prior to passivation treatment to assure conformance to the requirements of this AIPS. 4.1.2During the passivation step All
57、process parameters must be controlled an within the process window limits defined in the Process Instruction. 4.1.3After the passivation step / finish Parts must be adequately rinsed. Dependent on the requirements for corrosion resistance and/or galvanic compatibility the components treated by passi
58、vation may need a subsequent treatment or finish. The dimensional accuracy has to be checked. The relevant specifications for preservation and packaging shall be considered. The treated parts shall be protected by suitable covering so as to prelude contamination or mechanical damage during storage a
59、nd transportation. The overall process shall fulfil the requirements of this AIPS.4.4.1鈍化步驟之前的準(zhǔn)備加工后,所有標(biāo)本的極限抗拉強(qiáng)度Rm(max)高于1100 MPa應(yīng)當(dāng)提交應(yīng)力消除熱處理為了緩解殘留應(yīng)力。所有零件應(yīng)提交一個(gè)表面準(zhǔn)備過程。表面制備過程可能包括機(jī)械和/或化學(xué)或電化學(xué)方法,單獨(dú)的或組合在一起。必要的子步驟(如清洗、脫脂、除銹、噴砂、酸洗、活化、沖洗、干燥、掩蔽)取決于污染的程度。盡管在鈍化有可能有效之前,除銹或其它步驟有可能是必要的,這些步驟在AIPS中沒有明確的指示出來,但是應(yīng)該在過程規(guī)范中
60、指示出來。適當(dāng)?shù)谋砻嫣幚淼慕M成液體的成分可能取決于處理的抗腐蝕鋼的細(xì)節(jié)。合金元素、污染和機(jī)械處理可能會(huì)影響耐蝕鋼的敏感性。表面處理的結(jié)果將證明一個(gè)可再生的過程和表面狀況。特別是,由此導(dǎo)致的零件應(yīng)當(dāng)無污染和從存儲(chǔ)、運(yùn)輸和加工過程產(chǎn)生的其它不受歡迎的有機(jī)和金屬殘留物(如石油、油脂、形成化合物、潤滑劑、冷卻劑、切削液、防銹、規(guī)模,異樣金屬或其它污染物)。剩余的污染或損壞將導(dǎo)致零件的拒收或返工。處理器的責(zé)任是通過分析或者歷史在鈍化處理前決定表面的條件,來確保符合AIPS的要求。4.1.2鈍化步驟中所有的工藝參數(shù)必須控制在過程指令中定義限制的過程窗口。4.1.3鈍化步驟之后/結(jié)束零件必須充分沖洗。依賴于
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