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EE4345-SemiconductorElectronicsDesignProjectSiliconManufacturingGroupMembersYoungSoonSongNghiaNguyenKeiWongEyadFanousHannaKimStevenHsuHISTORY19thCentury-Solid-StateRectifiers1907-ApplicationofCrystalDetectorinRadioSets1947-BJTConstructedbyBardeenandBrattain1959–IntegratedCircuitConstructedbyKilbySemiconductorManufacturingProcessSemiconductorManufacturingProcessFundamentalProcessingSteps1.SiliconManufacturinga)Czochralskimethod.b)WaferManufacturingc)Crystalstructure2.Photolithographya)Photoresistsb)PhotomaskandReticlesc)Patterning

3.OxideGrowth&Removala)OxideGrowth&Depositionb)OxideRemovalc)Othereffectsd)LocalOxidation4.Diffusion&IonImplantationa)Diffusionb)Othereffectsc)IonImplantationSemiconductorManufacturingProcess(cont)SiliconManufacturingCrystalGrowthandWaferManufacturingFABRICATINGSILICONQuartz,orSilica,ConsistsofSiliconDioxideSandContainsManyTinyGrainsofQuartzSiliconCanbeArtificiallyProducedbyCombiningSilicaandCarboninElectricFurniceGivesPolycrystallineSilicon(multitudeofcrystals)PracticalIntegratedCircuitsCanOnlybeFabricatedfromSingle-CrystalMaterialCRYSTALGROWTHCzochralskiProcessisaTechniqueinMakingSingle-CrystalSiliconASolidSeedCrystalisRotatedandSlowlyExtractedfromaPoolofMoltenSiRequiresCarefulControltoGiveCrystalsDesiredPurityandDimensionsCYLINDEROFMONOCRYSTALLINETheSiliconCylinderisKnownasanIngotTypicalIngotisAbout1or2MetersinLengthCanbeSlicedintoHundredsofSmallerCircularPiecesCalledWafersEachWaferYieldsHundredsorThousandsofIntegratedCircuitsWAFERMANUFACTURINGTheSiliconCrystalisSlicedbyUsingaDiamond-TippedSawintoThinWafersSortedbyThicknessDamagedWafersRemovedDuringLappingEtchWafersinChemicaltoRemoveanyRemainingCrystalDamagePolishingSmoothesUnevenSurfaceLeftbySawingProcessTHECRYSTALSTRUCTUREOFSILICONAUnitCellHas18SiliconsAtomsWeakBondingAlongCleavagePlanesWaferSplitsinto4or6Wedge-ShapedFragmentsMillerIndicesisUsedtoAssigntoEachPossiblePlanePassingThroughtheCrystalLatticeSiliconManufacturingPhotolithographyPhotolithographyPhotolithographyisatechniquethatisusedtodefinetheshapeofmicro-machinedstructuresonawafer.Photolithography

PhotoresistThefirststepinthephotolithographyprocessistodevelopamask,whichwillbetypicallybeachromiumpatternonaglassplate.Next,thewaferisthencoatedwithapolymerwhichissensitivetoultravioletlightcalledaphotoresist.Afterward,thephotoresististhendevelopedwhichtransfersthepatternonthemasktothephotoresistlayer.

Photolithography

PhotoresistTherearetwobasictypesofPhotoresistsPositiveandNegative.Positiveresists.Positiveresistsdecomposesultravioletlight.TheresistisexposedwithUVlightwherevertheunderlyingmaterialistoberemoved.Intheseresists,exposuretotheUVlightchangesthechemicalstructureoftheresistsothatitbecomesmoresolubleinthedeveloper.Theexposedresististhenwashedawaybythedevelopersolution,leavingwindowsofthebareunderlyingmaterial.Themask,therefore,containsanexactcopyofthepatternwhichistoremainonthewafer.Ph烤ot斗ol查it米ho掙gr瓦ap邪hyPh紀(jì)ot起or穩(wěn)es板is法tNe倉ga喜ti頓ve棕r俱es鞋is缸tsEx宣po吹su竹re唱t向o化th酒e盞UV捐l討ig妙ht傳c蛇au缺se椅s驅(qū)th肢e暮ne釣ga雀ti剛ve趙r熟es鏡is死t悼to裙b糞ec罰om援e純po尊ly校me支ri訂ze濃d,牽a旱nd拉m坡or翁e載di檔ff公ic脹ul針t估to弓d轎is憐so莖lv達(dá)e.叨T隱he較re包fo悶re劉,損th怪e收ne懲ga史ti蛙ve喇r啞es起is推t姻re困ma窩in團(tuán)s原on仁t滅he晉s蒜ur酷fa辱ce鍵w秋he闊re辰ve丙r城it旨i淘s猾ex組po題se告d,溝a袍nd碧t再he鋤d鐘ev棋el吹op誓er排s損ol威ut斬io捏n忙re客mo兇ve教s之on呈ly敗t速he勒u磁ne物xp橋os丸ed呢p艙or領(lǐng)ti淹on釘s.曬M翻as怒ks螞u掩se靜d坐fo用r北ne諒ga預(yù)ti戲veph朵ot李or們es即is沈ts,襲th密er絲式ef奶or歲e,船c唇on也ta皺in昨t額he微i賽nv蘇er嗎se厭(薪or鑰p除ho礙to環(huán)gr況ap稼hi靈c玩"n怎eg芽at姜iv塔e"鵝)榨of士t廁he糕p飽at玻te軟rn香t唱o磁be獲t折ra查ns釋fe擔(dān)rr本ed腐.Ph鎮(zhèn)ot蟲ol蔬it恩ho涂gr惰ap怒h(huán)y汁M悼od倒elFi必gu電re說1咸a蚊sh帶ow塔s澡a知th糟in著f邁il撤m展of意s澡om躍e晉ma裂te簡ri縮慧al煮(eg,準(zhǔn)si柜li棋co只n短di孔o(hù)x聾id京e)伙o增n進(jìn)a響su妙bs駕tr尤at忠e祖of吳s順om掩e習(xí)ot滿he狂r坑ma源te大ri替al批(eg,對a妨si扁li偷co啊n設(shè)wa格fe盼r)條.Ph編ot湊or需es莫is狗t竊la乒ye顏r午(F賠ig確ur摧e澤1b濤)Ul僵tr艦av沖io尋le編t航li敵gh摘t本is浴t為he質(zhì)n者sh璃on陜e漠th磨ro賠ug晚h攜th夾e被ma僻sk殲o至nt隊o摔th淚e武ph皇ot魚or蔑es桂is濟(jì)t綱(f犯ig眾ur王e餅1c跡).Ph亡ot毒ol材it顏ho得gr銷ap辦hy腸M迎od勝el發(fā)(謠co喝nt鉛)Th鞭e撈ph受ot澆or嚼es晝is授t睬is流t諒he印n廈de解ve殊lo呀pe六d淚wh僑ic覺h潛tr棄an怪sf炒er踐s沈th沿e援pa學(xué)tt礙er慚n杰on鄉(xiāng)豐t宿he態(tài)m咬as咐k藥to頸t聰he顆p森h(huán)o舊to塑re濤si摧st壁l遵ay障er疏(盡fi據(jù)gu仙re欠1顆d)拋.A叫ch穴em級ic刷al弄(萄or腳s臣o(jì)m打e盼ot劇he而r養(yǎng)me紹th欠od明)王is節(jié)t賊he卡n王us檔ed惱t令o奶re謝mo葡ve名t恥he擾o束xi毯de盜w回he求re減i淹t躁is唇e岔xp零os截ed曉t靠hr巧ou罩gh渾t糕he烤o框pe臣ni竄ng犯s但in舒t鬼he素r民es紋is岸t誓(f娃ig陡ur填e勵1e蒸).Fi醋na孤ll敵y址th衣e險re峰si冰st時i懷s銷re蹄mo蜂ve憶d泰le對av武in闖g覆th趨e邊pa董tt偽er額ne忘d百ox私id枝e嫌(f外ig湖ur炮e最1f篩).Ph賤ot先ol跪it京ho御gr段ap速hyPh央ot墻om摧as遼ksan摧dRe葵ti夏cl行esPh噸ot捆om仇as前kTh混is卡i卵s牽a障sq獨ua屯re緊g唐la菊ss悶p時la鏡te閱w殲it業(yè)h槐a士pa敵tt窯er壯ne劣d橫em附ul雀si披on兵o刑f杠me街ta慮l灘fi看lm拾o信n保on趨e書si富de獄.躁Th牌e受ma尋sk嗚i賽s貫al服ig申ne坐d費(fèi)wi褲th濾t共he揀w喚af地er潮,繩so晉t釘ha截t物th奧e樂pa徑tt驚er測n蟲ca粘n紗be喂t任ra主ns屠fe典rr隱ed隨o斗nt績o腿th雷e毛wa躺fe龜r寄su寸rf販ac芒e.數(shù)E憑ac踐h層ma傭sk體a叼ft帶er絞t處he輸f講ir濫st里o臥ne蝴m婆us掀t遺be刮a鎮(zhèn)li褲gn釣ed聚t工o掘th貧e盟pr爐ev屋io礦us的p肥at淚te吵rn垂.Ph蹈ot晉ol賠it麗ho復(fù)gr京ap押hyPh阻ot題om即as雨ksan夸dRe融ti仁cl幼esWh停en掘a步i萍ma盒g(shù)e莖o您n識th裳eph暫ot湊om薄as賣kis造p籠ro還je較ct帳ed淋s導(dǎo)ev燒er穿al周t醒im速e緩s擔(dān)id往e質(zhì)by陶s夠id準(zhǔn)e鍵on麥to某t黎he寇w臂af合er宮,朗th虧is獲i予s直kn交ow他n臥asst側(cè)ep婦pi值ngan廊d個th吉eph泛ot弓om易as奮kis篇c軌al貓le知d倡are臣ti宅cl截e.An抗c圖om梁mo網(wǎng)nre排ti跌cl注eis園t灑he涉5拐XTh赤e繁pa勝tt臂er施ns蠟o捏n冶th皮e自5Xre著ti緞cl寧ear鋒e崖re假du鉗ce叮d氣5下ti弦me倉s侍wh含en彎p毯ro笨je店ct填ed什o嶼nt攔o犬th榨e計wa百fe曾r.滅T皆hi郵s曲me暖an熊s朽th鼠e斑di阻es旱o析n污th泡eph穩(wěn)ot捏om挎as須kar掌e撥5處ti改me曠s仇la校rg逼er褲t餅ha塔n鍋th鋤ey研a之re迎o半n腐th螞e賞fi撓na概l泛pr司od曬uc昆t.菌T割he婆re辮a陸re版o謎th撥er翠k彎in多ds肯o鬧f和re舌du肢ct只io尺nre獄ti叉cl注es(2膚X,狼4沈X,啦a赴nd鉛1吸0X鵝),費(fèi)b跑ut筆t愁he跌5聯(lián)X吼is猛t慌he質(zhì)m箏os待t木co摘mm穴on專ly白u(yù)村se蛇d.姨R膚ed傷uc體ti陵onre庫ti恰cl贏esar健e此us恐ed免o停n糠a傻va晝ri齊et沿y掙of籮s求te藝pp偉er卵s,否t足he忍m醉os大t鳴co剝mm爽on換b巷ei揚(yáng)ng元A捕SM久,設(shè)Ca狂no軌n,悄N哥ik隱on也,傳an誰d孩GC火A.Ph畢ot威ol底it掠ho興gr黨ap灘hyPh嘴ot憂om夕as獵ksan出dRe腔ti貧cl群esEx干am機(jī)pl豬es牌o魯f商5XRe芝ti繪cl晨es:Ph嶺ot呆ol贈it下ho繩gr控ap券hyPh拉ot吐om慣as溝ksan工dRe梢ti炊cl型esOn淡ce造t瞎he咱m蓬as蓮k集ha擁s快be桃en熄a漢cc穴ur腰at音el矛y扁al博ig腐ne裳d弊wi啦th傻t俗he虜p載at會te鞋rn腎o塌n享th篩e狹wa杰fe森r'尾s算su漢rf慨a(chǎn)c串e,跳t叮he吸p應(yīng)ho緞to氣re戰(zhàn)si耳st凈i乘s咸ex榮po示se素d獸th片ro假ug查h再th宏e怖pa碌tt懂er春n軍on擴(kuò)t顧he越m必as護(hù)k宅wi政th貌a接h從ig寒h結(jié)in氧te燒ns武it蘭y幣ul險tr粘av店io寨le驚t翠li轎gh添t.挨T削he蹄re屋a渴re川t遼hr圈ee仗p腳ri挑ma盛ry女e冰xp刷os馬ur閣e迫me親th溪od罵s:加c鋤on筋ta字ct侍,抹pr克ox仆im聽it供y,遞a負(fù)nd販p旅ro袋je輕ct舍io騙n.Ph申ot風(fēng)ol佳it歲ho娛gr雹ap神hy揮P宏at殲te召rn呼in仗gTh城e較la姓st蝦s寒ta亂ge惜o蜂f欲Ph歐ot避ol捕it霞ho月gr奔ap糧hy為i敬s確a幸pr葛oc蛇es陡s底ca辭ll漸edas互hi烈ng.孝Th匪is罪p鉗ro引ce協(xié)ss湯h怒as玩t明he印e業(yè)xp途os案ed賊w敏af腫er劉s攤sp縫ra排ye漂d欄wi毒th菜a鋤m蘋ix修tu哥re勝o童f縫or吧ga摧ni下c捏so勺lv帳en烏ts日t支ha催t務(wù)di恩ss高ol糊ve法s膜po矩rt僚io扛ns宗o粥f現(xiàn)th色e應(yīng)ph記ot挑or蔽es嗚is跌t基.Co虎nv框en嶄ti西on眉al垮m炕et耳ho什ds須o昂fas宇hi僵ngre達(dá)qu鄰ir西e零an門o繁xy兄ge肢n-倒pl煙as羅ma坑a澇sh使,謀of觸te伴n調(diào)in箏c五om蘋bi耀na暑ti被on羅w攻it華h鉗ha健lo騙ge備n康ga膠se洲s,堡t盞o養(yǎng)pe粒ne想tr蹄at助e感th匆e教cr施us搖t洲an原d桑re糟mo呆ve卻t燙he坐p應(yīng)ho畢to顯re砍si勝st喊.然U貴su綢al越ly何,爹th配e臺pl娃as宇maas猛hi斷ngpr妻oc仍es絕s似al廟so紙r春eq理ui托re皆s榮a祥fo繼ll世ow綢-u蒙p彩cl讓ea扣ni飯ng奇w汽it態(tài)h定we奏t-幟ch匪em戶ic賞al帽s遇an忽d炕ac軟id灘s孫to梅r知em從ov盛e繭th甘e尖re性si糟du煮es文a陶nd戰(zhàn)n叫on向-v加ol編at解il鞭e允co桶nt吃am獵in止an添ts徑t愁ha拔t冤re幻玉ma近in苗a向ft栽eras減hi痛ng.泄D寇es淡pi宅te闊t陸hi甲s土tr潮ea揀tm倦en桌t,壺i志t摔is存n耍ot頭u腫nu富su肯al性t規(guī)o莖re飽pe杰at逼t乒he隆"味as哄h丘pl危us參w乎et券-c窩le陣an勤"鑰cy禍cl狼e至in執(zhí)o王rd英er偉t錢o浩co伍mp部le莊te候ly忍r泳em蹦ov掛e學(xué)al量l秒ph將ot蠟or里es透is謠t洗an降d帆re臣si饒du宏es.Si逃li斗co量n顏Ma幟nu劈燕fa坡ct凍ur蓮in奪gOx短id君at禿io煮n湊of糞S駁il聰ic桑onSi李O2gr廊ow暗th委i殲s滋a殲ke春y鑰pr刑oc漠es忘s缸st著ep左i益n際ma徑nu扭fa標(biāo)ct夕ur希in炮g舊al擋lSide掠vi涂ce劇s-觸Th授ic沒k歐(-淋1折μm暮)尖ox輝id趁es鈴a鍬re嘗u蛇se敞d績fo圣r碰fi帽el食d桐ox微id歲es冤(i斧so庭la都te貢d慰ev元ic勉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