四探針說明書[材料相關(guān)]

1、SZT-2C四探針測(cè)試儀使用說明書一概述SZT-2C型數(shù)字式四探針測(cè)試儀是運(yùn)用四線法測(cè)量原理的多用途綜合測(cè)量裝置，配上專用的四探針測(cè)試架，即可以測(cè)量片狀，塊狀或柱狀半導(dǎo)體材料的徑向和軸向電阻率，測(cè)量擴(kuò)散層的薄層電阻（亦稱方塊電阻）。四探針測(cè)試架有電動(dòng)，手動(dòng)，手持三種可以選配，另外還配有四個(gè)夾子的四線輸入插頭用來作為測(cè)量線狀或片狀電阻的 中，低阻阻值。 儀器由主機(jī)，測(cè)試架等部份組成，測(cè)試結(jié)果由液晶顯示器顯示，同時(shí)，液晶顯示器還顯示測(cè)量類型（電阻率，方塊電阻和電阻）;探頭修正系數(shù)和溫度值，用來監(jiān)測(cè)儀器使用時(shí)的環(huán)境溫度。主機(jī)由開關(guān)電源，DC/DC變換器，高靈敏度電壓測(cè)量部份，高穩(wěn)定度恒流源，和微電腦

2、控制系統(tǒng)組成。由於采用大規(guī)模集成電路，所以儀器可靠性高，測(cè)量穩(wěn)定性好。測(cè)試探頭采用寶石導(dǎo)向軸套和高硬度鋼針，定位準(zhǔn)確，游移率小，使用壽命長(zhǎng)。儀器適用於半導(dǎo)體材料廠，半導(dǎo)體器件廠，科研單位，高等院校對(duì)半導(dǎo)體材料電阻性能的測(cè)試。 本儀器工作條件為： 使 用 溫 度：23 3相 對(duì) 濕 度：50%70% 工作室內(nèi)應(yīng)無強(qiáng)磁場(chǎng)干擾，不與高頻設(shè)備共用電源，二，技術(shù)參數(shù)1， 測(cè)量范圍 電阻率： 10-106-cm 方塊電阻 10- 106/電阻 10- 106 2，可測(cè)半導(dǎo)體材尺寸直 徑： 5-250mm長(zhǎng)（或高）度： 400mm（如配探筆可以測(cè)量任意長(zhǎng)度）3， 測(cè)量方位軸向，徑向均可4， 數(shù)字電壓表：（1

3、） 量程：20mV,200mV,2V（2） 誤差：0.1%讀數(shù)2字（3） 輸入阻抗:10（4） 最大分辨率:10V（5） 點(diǎn)陣液晶顯示，過載顯示。5， 恒流源：（1） 電流輸出：共分10A,100uA,1mA,10mA,100mA六擋可通過按鍵選擇，各擋均為定值不可調(diào)節(jié)，電阻率探頭修正系和擴(kuò)散層方塊電阻修正系數(shù)均由機(jī)內(nèi)CPU運(yùn)算后，直接顯示修正后的結(jié)果。（2） 誤 差： 0.5%2字，在使用1A恒流電流輸出時(shí)為0.5%5字 6,四探針測(cè)試頭; (1) 探 針 間 距:1mm (2)探針機(jī)械游移率: 1.0% (3)探 針 材 料: 碳化鎢,0.5mm (4)0-2Kg可調(diào),最大壓力約2Kg 7

4、，溫度傳感器； 本儀器增加了高精度的溫度傳感器，以監(jiān)測(cè)儀器使用時(shí)的環(huán)境溫度。 溫度測(cè)量的范圍；+99 -55 溫度測(cè)量的精度；0.58,電 源:交流 220V10%功耗35W本儀器可以選配電動(dòng)測(cè)試架，手動(dòng)測(cè)試架，手持探險(xiǎn)頭或四夾子電阻測(cè)量輸入線。1，電動(dòng)測(cè)試架；電動(dòng)測(cè)試架是用步進(jìn)電機(jī)驅(qū)動(dòng)測(cè)試頭升降，只要將被測(cè)工件放在測(cè)試平臺(tái)中心位置，按一次啟動(dòng)按鈕，測(cè)試頭自動(dòng)下降，直到針頭和被測(cè)工件接觸，探頭將自動(dòng)以慢速下降一段距離壓緊探針使針與工件接觸良好并等待測(cè)量，稍候測(cè)量結(jié)束，探頭上行并恢復(fù)到原來位置。所以電動(dòng)測(cè)試架的操作簡(jiǎn)便，探針對(duì)被測(cè)工件所施壓力恒定，測(cè)量結(jié)果穩(wěn)定，建議優(yōu)先選配。2，手動(dòng)測(cè)試架以其結(jié)

5、構(gòu)簡(jiǎn)單不用電源見長(zhǎng)，只要操作熟練，測(cè)量精度和穩(wěn)定性也很好。3，手持式四探針測(cè)試頭，使用靈活可以對(duì)任意形狀的半導(dǎo)體材料進(jìn)行測(cè)試，而且脫離了測(cè)試架尺寸的限止，可以對(duì)大尺寸單晶硅柱的任意部位進(jìn)行單點(diǎn)或多點(diǎn)測(cè)試，但由於探針對(duì)被測(cè)材料的壓力是由手感控制的，因此，測(cè)量時(shí)必須將探頭持穩(wěn)壓緊，保證探針和被測(cè)工件接觸良好。4帶夾四線測(cè)試頭，是必配件，可以用四線法測(cè)量低阻值電阻。三，工作原理；1， 測(cè)試原理；直流四探針法測(cè)試原理簡(jiǎn)介如下；（1） 電阻率測(cè)量；(圖一)：當(dāng)1，2，3，4四根金屬針排成一直線時(shí)體材料上時(shí)，在1，4兩根探針間通過電流I，則在2，3探針間產(chǎn)生電位差V，材料電阻率=C (-cm) (3-1)

6、 式中C為探針修正系數(shù)，由探針的間距決定。當(dāng)試樣電阻率分布均勻，試樣尺寸滿足半無窮大條件時(shí) C=(cm)（3-2）式中：S1， S2 S3 分別為探針對(duì)1與2，2與3，3與4之間的距離，探頭系數(shù)由制造廠對(duì)探針間距進(jìn)行測(cè)定后確定，并提供給用戶。每個(gè)探頭都有自已的系數(shù)。 C6.280.05,單位為cm。（a）塊狀或棒狀樣品體電阻率測(cè)量：由於塊狀或棒狀樣品外形尺寸遠(yuǎn)大於探針間距，符合半無窮大的邊界條件，電阻率值可直接由（3-1）式求出。（b）薄片電阻率測(cè)量：薄片樣品因?yàn)槠浜穸扰c探針間距相近，不符合半遠(yuǎn)窮大邊界條件，測(cè)量時(shí)要附加樣品的厚度，形狀和測(cè)量位置的修正系數(shù)。 其電阻率值可由下面公式得出 =C

7、G（ ）D（）=0 G（）D（） （3-3）式中0 為塊狀體電阻率測(cè)量值G（）為樣品厚度修正系數(shù)，可由附錄1A或附錄1B查得。W：樣品厚度（m）;S探針間距（mm）D：（）為樣品形狀與測(cè)量位置的修正函數(shù)可由附錄2查得。當(dāng)園形硅片的厚度滿足 0.5條件時(shí)，電阻率為=0 (3-4)式中n2為的自然對(duì)數(shù)。當(dāng)忽略探針幾何修正系數(shù)時(shí)，即認(rèn)為時(shí)， (3-5)()擴(kuò)散層的方塊電阻測(cè)量當(dāng)半導(dǎo)體薄層尺寸滿足于半無窮大平面條件時(shí): (3-6)SZT-2B型四探針測(cè)試儀電氣部分原理框圖: （圖二） 儀器主體部分由單片計(jì)算機(jī), 液晶顯示器、鍵盤、高靈敏度，高輸入阻抗的方大器、雙積分式A/D變換器、恒流源、，開關(guān)電源，

8、DC-DC變換隔離電源。電動(dòng)，手動(dòng)或手持式四探針測(cè)試架（頭）等組成。三使用方法本儀器適配三種測(cè)試架（電動(dòng)，手動(dòng)，手持測(cè)試頭），還可使用帶有四個(gè)夾子的，四線法電阻測(cè)試輸入插頭，這四種輸入插頭雖然外形相同，使用同一個(gè)輸入插座，但使用方法略有不同，以下將分別于以說明。1， 主機(jī)；A：面板：面板左側(cè)為液晶顯示器，顯示器的第一行顯示測(cè)量結(jié)果，阻單位（K，m）和測(cè)量方式的符號(hào)（“-cm” 電阻率,“ -口” 方塊電阻，“”電阻）- 在正常測(cè)量時(shí)第二行將以較小的字號(hào)顯示和第一行相同的數(shù)值，只有在超程時(shí)第一行顯示四個(gè)橫杠（- - - -），第二行則顯示一個(gè)正在使用的測(cè)量方式可以顯示的最大數(shù)值，例如電阻率測(cè)量可

9、以顯示的最大值為1256，方塊電阻可以顯示的最大值為9060，而電阻測(cè)量則可以顯示的最大顯示值為1999，（以上所示的值中小數(shù)點(diǎn)和單位均視測(cè)量當(dāng)時(shí)所設(shè)量程而定，這里不作詳述）。指示燈下面為二行二列功能設(shè)置鍵，上面一行左邊那個(gè)為左移鍵，右邊那個(gè)為右移鍵，恒流源在開機(jī)時(shí)優(yōu)先設(shè)定為1mA，應(yīng)該是左起第三個(gè)指示燈被點(diǎn)亮，恒流源輸出電流為1mA第二列為電壓量程設(shè)置鍵和測(cè)量方式設(shè)置鍵，每組都只有一個(gè)鍵，采用單鍵循環(huán)操作方式。最下面一個(gè)鍵為往復(fù)鍵，重復(fù)按鍵可以選擇測(cè)量或保持二個(gè)狀態(tài)，（必須注意！當(dāng)使用電動(dòng)測(cè)試架時(shí)，只能設(shè)定在測(cè)量狀態(tài)）。2， 電動(dòng)測(cè)試架； 電動(dòng)測(cè)試架是一個(gè)完整的組件，由步進(jìn)電機(jī)和驅(qū)動(dòng)電路，活

10、動(dòng)架，四探針測(cè)頭等組成，用九芯電纜和主機(jī)連接。3， 手動(dòng)測(cè)試架手持測(cè)試頭，四端子電阻測(cè)試夾使用比較簡(jiǎn)單，只要將七芯輸入插頭插入輸入端，儀器就會(huì)連續(xù)測(cè)量，將探針和工件保持良好接觸，就可在顯示器上讀出測(cè)量結(jié)果。C，操作步驟；儀器在第一次使用前必須首先檢查所使用的電源是否符合規(guī)定要求，各種線纜是否連接妥當(dāng)。接通電源并開機(jī)后，必須預(yù)熱30分鐘，并注意觀察儀器的溫度指值，是否符合要求， 主機(jī)在接通電源后，測(cè)試架的探頭就會(huì)復(fù)位，上升到規(guī)定位置。同時(shí)主機(jī)運(yùn)行自檢程序，液晶顯示器顯示公司名稱，網(wǎng)址，聯(lián)系電話，指示燈循環(huán)點(diǎn)亮一次，最后電流指燈停在1mA位置上，電壓量程指示燈停在2V位置，測(cè)量模式指示燈停在電阻率

11、測(cè)量模式，測(cè)量/保持鍵則選在測(cè)量位置，液晶顯示器顯示單位為K-cm，（電阻率測(cè)量）在液晶顯示器的下面顯示的二行數(shù)字上面一行是現(xiàn)場(chǎng)溫度，下面一行是修整系數(shù)，0.628是探頭的修正系數(shù)。這是儀器在開機(jī)后的優(yōu)先先選擇。此時(shí)液晶顯示器的第一行還沒有顯示任何數(shù)值，因?yàn)楝F(xiàn)在測(cè)量還沒有開始，接下來可以將被測(cè)半導(dǎo)體材料放在測(cè)試架的園形絕緣板的園心上，把探針保護(hù)套取下并保存好，按一下測(cè)試架上的啟動(dòng)按鍵（小紅鍵），隨即測(cè)試頭下降探針和被測(cè)工件接觸稍后顯示測(cè)量結(jié)果，測(cè)試頭上升。如果測(cè)量結(jié)果顯示“- - - -”則為超量程，可以減小恒流源的設(shè)置值，如果電壓量程置于最高，恒流電流置于最小，仍顯示超量程則可能是被測(cè)工件電

12、阻太大，已超出了本儀器的測(cè)量范圍，當(dāng)測(cè)量的結(jié)果為0則可以增大恒流電流或減小電壓量程，調(diào)整電流或電壓量程，直至測(cè)量結(jié)果可以顯示三位以上的讀數(shù)為最好的量程組合。在選擇量程時(shí)必須注意的是，如已知被測(cè)工件是半導(dǎo)體材料并且阻值大于10時(shí)，建議不要使用10mA以上的恒流源，原因是10mA以上的恒流源使用較低的工作電壓，而半導(dǎo)體材料表面接觸電阻又較大，會(huì)使恒流源工作不正常。附錄：測(cè)量時(shí)，預(yù)估的樣品阻值范圍應(yīng)該選擇相對(duì)應(yīng)的電流范圍，關(guān)系如下表：電阻率范圍（cm）電流檔0.012 100 mA 0.080.6 10 mA 0.460 1 mA 401200 100 uA 1200 10 uA1 uA附錄1A 樣

13、品厚度修正系數(shù)G（）樣品厚度較?。?0.0011 見表5W：樣品厚度（m）：S：探針間距（mm）W/SW01234567890.000.010.020.030.040.050.060.070.080.090.100.110.120.130.140.150.160.170.180.190.200.210.220.230102030405060708090100110120130140150160170180190200210220230.000.007.014.022.029.036.043.051.058.065.072.079.087.094.101.108.115.123.130.137.

14、144.151.159.166.001.008.015.022.030.037.044.051.058.066.073.080.087.095.102.109.116.123.131.138.145.152.159.167.001.009.016.023.030.038.045.052.059.066.074.081.088.095.102.110.117.124.131.139.145.153.160.167.002.009.017.024.031.038.045.053.060.067.074.082.089.096.103.110.118.125.132.139.146.154.161.

15、168.003.010.017.025.032.039.046.053.061.068.075.082.089.097.104.111.118.126.133.140.147.154.162.169.004.011.018.025.032.040.047.054.061.069.076.083.090.097.105.112.119.126.133.141.148.155.162.170.004.012.019.026.033.040.048.055.062.069.077.084.091.098.105.113.120.127.134.141.149.156.163.170.005.012.

16、019.027.034.041.048.056.063.070.077.084.092.099.106.113.120.128.135.142.149.157.164.171.006.013.020.027.035.042.049.056.063.071.078.085.092.100.107.114.121.128.136.143.150.157.164.172.006.014.021.028.035.043.050.057.064.071.079.086.093.100.107.115.122.129.136.144.151.158.165.172W/SW01234567890.240.2

17、50.260.270.280.290.300.310.320.330.340.350.360.370.380.390.400.410.420.430.440.450.460.470.480.490.50240250260270280290300310320330340350360370380390400410420430440450460470480490500.173.180.188.1953202.209.216.224.231.238.245.252.260.267.274.281.288.296.303.310.317.324.331.338.346.353.360.174.181.1

18、88.195.203.210.217.224.232.239.246.253.260.268.275.282.289.296.303.311.318.325.332.339.346.353.360.175.182.189.19.203.211.218.225.232.239.247.254.261.268.275.283.290.297.304.311.319.326.333.340.347.354.361.175.183.190.197.204.211.219.226.233.240.247.255.262.269.276.283.291.298.305.312.319.326.333.34

19、1.348.355.362.176.183.190.198.205.212.219.227.234.241.248.255.263.270.277.284.291.298.306.313.320.327.334.341.348.355.363.177.184.191.199.205.213.220.227.234.242.249.256.263.270.278.285.292.299.306.314.321.328.335.342.349.356.363.177.185.192.199.206.214.221.228.235.242.250.257.264.271.278.286.293.30

20、0.307.314.321.329.336.343.350.357.364.178.185.193.200.207.214.221.229.236.243.250.257.265.272.279.286.293.301.308.315.323.329.336.343.351.358.365.197.186.193.201.208.215.222.229.237.244.251.258.265.273.280.287.294.301.308.316.323.330.337.344.351.358.365.180.187.194.201.208.216.223.230.237.245.252.25

21、9.266.273.281.289.295.302.309.316.324.331.338.345.352.3593.68W/SW01234567890.510.520.530.540.550560.570.580.590.600.610.620.630.640.650.660.670.680.690.700.710.720.730.740.750.760.77510520530540550560570580590600610620630640650660670680690700710720730740750760770.367.374.381.388.395.402.409.416.422.

22、429.436.443.450.456.463.470.476.483.489.496.502.508.515.521.527.533.540.368.375.382.389.396.402.409.416.423.430.437.444.450.457.464.470.477.483.490.496.503.509.516.522.528.534.540.368.375.382.389.396.403.410.417.424.431.437.444.451.458.464.471.477.484.491.497.503.510.516.522.529.535.541.369.376.383.

23、390.397.404.411.418.425.431.438.445.452.458.465.472.478.485.491.498.504.510.517.523.529.535.541.370.377.384.391.398.405.411.418.425.432.439.446.452.459.466.472.479.485.492.498.505.511.517.524.530.536.542.370.377.384.391.398.405.412.419.426.433.439.446.453.460.466.473.479.486.492.499.505.512.518524.5

24、30.537.543.371.378.385.392.399.406.413.420.427.433.440.447.454.460.467.474.480.487.493.500.506.512.519.525.531.537.543372.379.386.393.400.407.414.420.427.434.441448454461.468.474.481.488.494.500.507.513.519.525.532.538.544372.379.386.393.400.407.414.421.428.435.442.448.455.462.468.475.481.488.494.50

25、1.507.514.520.526.532.538.544.373.380.387.394.401.408.415.422.429.435.442.449.456.462.469.476.482.489.495.501.508.514.520.527.533.539.545W/SW01234567890.780.790.800.810.820.830.840.850.860.870.880.890.900.910.920.930.940.950.960.970.980.991.00780790800810820830840850860870880890900910920930940950960

26、9709809901000.546.552.558.564.569.575.581.587.592.598.603.609.614.619.625.630.635.640.645.650.655.660.665.546.552.558.564.570.576.581.587.593.598.604.609.615.620.625.630.636.641.646.651.656.660.547.553.559.565.571.576.582.588.593.599.604.610.615.621.626631.636.641.646.651.656.661.547.553.559.565.571

27、.577.583.588.594.599.605.610.616.621.626.631.637.642.647.652.657.661.548.554.560.565.572.577.583.589.594.600.605.611.616.622.627.632.637.642.647.652.657.662.549.555.561.567.573.579.584590.596.601.607.612.617.623.628.633.638.643.648.653.658.663.549.555.561.567.573.579.584.590.596.601.607.612.617.623.

28、628.633.638.643.648.653.658.663.550.556.562.568.573.579.585.591.596.602.607.613.618.623.628.634.639.644.649.654.658.663.550.556.562.568.574.580.585.591.597.602.608.613.618.624.629.634.639.644.649.654.658.664.551.557.563.569.575.580.586.592.597.603.608.614.619.624.629.635.640.645.650.655.659.664附錄1B

29、樣品厚度修正系數(shù)G（）樣品厚度較厚：=0.013.49 見表W：樣品厚度（m）：S：探針間距（mm）W/S0.000.010.020.030.040.050.060.070.080.090.000.100.200.300.400.500.600.700.800.901.001.101.201.301.401.501.601.701.801.900.00000.07210.14430.21640.28840.35970.42930.49570.55760.61410.66470.70930.74820.78170.81060.83520.85630.87430.88970.90290.00720

30、.07940.15150.22360.29560.36680.43610.50210.56350.61940.66940.71340.75180.78480.81320.83750.83820.87600.89110.90410.01440.08660.15870.23080.30270.37380.44290.50850.56940.62470.67410.71750.75530.78790.81580.83970.86010.87760.89250.90530.02160.09380.16590.23800.30990.38080.44960.51480.57510.62990.67870

31、.72150.75890.79080.81840.84190.86200.87920.89390.90640.02890.10100.17310.24520.31710.38780.45630.52100.58090.63510.68330.72550.76220.79380.82090.84410.86390.88080.89520.90760.03610.10820.18030.25240.32420.39480.46300.52730.58660.64020.68770.72940.76660.79670.82340.84620.86570.88230.89650.90870.04330

32、.11540.18750.25960.33130.40180.46960.53340.59220.64520.69220.73330.76890.79960.82580.84830.86750.88380.89780.90990.05050.12260.19480.26680.33850.40870.47620.53960.59780.65010.69650.73710.71220.80240.82820.85030.86920.88530.89910.91100.05770.12980.20200.27400.34560.41560.48270.54560.60330.65510.70090

33、.74080.77540.80520.83060.85240.87090.88680.90040.91210.06490.13710.20920.28120.35260.42240.48920.55160.60870.65990.70510.74450.77860.80790.83290.85440.87260.88830.90160.9131W/S0.000.010.020.030.040.050.060.070.080.092.002.102.202.302.402.502.602.702.802.903.003.103.203.303.400.91420.92390.93230.9396

34、0.94590.95140.95620.96040.96410.96740.97030.97280.97510.97720.97900.91520.92480.93310.94020.94020.95190.95660.96080.96440.96770.97050.97310.97530.97740.97920.91620.92570.93380.94090.94700.95240.95710.96120.96480.96800.97080.97330.97560.97760.97940.91720.92660.93460.94150.94760.95290.95750.96160.9652

35、0.96830.97110.97360.97580.97780.97950.91820.92740.93530.94220.94820.95340.95790.96190.96550.96860.97130.97380.97600.97790.97970.91920.92830.93610.94280.94870.95380.95830.96230.96580.96890.97160.97400.97620.97810.97990.92020.92910.93680.94350.94930.95430.95880.96270.96610.96920.97180.97420.97640.9783

36、0.98000.92110.92990.93750.94410.94980.95480.95920.96300.96640.96940.97210.97450.97660.97850.98020.92210.93070.93820.94470.95030.95530.95960.96340.96670.96970.97240.97470.97680.97870.98030.92300.93150.93890.94530.95090.95570.96000.96370.96710.97000.97260.97490.97700.97880.9805如需所測(cè)值更精確，請(qǐng)查下表附錄2樣品形狀和測(cè)量位

37、置的修正系數(shù)D（）（1）圓形薄片直徑d(mm)探 針 位 置距圓心位置距邊緣位置0mm1/4 d5 mm4 mm3 mm2 mm2023252730323538404245505557606365707580901000.97880.98390.98630.98820.99040.99160.99290.99400.99460.99510.99570.99650.99710.99730.99760.99780.99790.99820.99850.99860.99890.99910.96330.97190.97610.97940.98320.98520.98760.98940.99040.991

38、30.99240.99380.99190.99520.99570.99610.99630.99680.99720.99760.99810.99840.96330.96620.96770.96880.97020.97090.97180.97250.97290.97330.97380.97440.97490.97510.97520.97550.97570.97600.97620.97640.97680.97700.95080.95380.95530.95650.95800.95880.95980.96060.96100.96140.96200.96270.96330.96350.96380.964

39、00.96410.96450.96480.96500.96540.96570.92630.92950.93120.93250.93420.93510.93620.93710.93770.93820.94880.94970.94030.94060.94090.94120.94140.94180.94210.94240.94290.94330.87020.87390.87580.87730.87930.88040.88170.88290.88350.88410.88490.88590.88680.88710.88750.88790.88810.88860.88910.88950.89010.8904（2）矩形薄片正方形矩形d/sa/d=1a/d=2a/d=3a/d41.00.22040.22051.250.27510.27021.50.326