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測量系統(tǒng)穩(wěn)定性分析報告,,,,,,,,,,,,,,,,,,,,,

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量具名稱:,,,XDL-B測厚儀,,,,量具編號:,,XH-JS-CHY-001,,,,量具類型:,,長度,,,測量周期:,,,

基準件名稱:,,,校準片,,,,測量參數(shù):,,Ni層厚度,,,,參數(shù)規(guī)格:,,9.1μm,,,,,,

日期,,10.08.02,10.08.02,10.08.02,10.08.03,10.08.03,10.08.03,10.08.04,10.08.04,10.08.04,10.08.05,10.08.05,10.08.05,10.08.06,10.08.06,10.08.06,10.08.07,10.08.07,10.08.07,10.08.08,10.08.08

時間,,10:00,10:05,10:10,10:15,10:20,10:25,10:30,10:35,10:40,10:45,10:50,10:55,11:00,11:05,11:10,11:15,11:20,11:25,11:30,11:35

編號,,1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20

測量值,1,9.140,9.380,9.360,8.940,9.330,9.450,8.940,9.590,9.620,9.450,9.790,9.280,9.280,9.280,9.004,9.655,8.401,8.559,8.509,8.971

,2,8.730,7.960,9.380,8.720,9.670,8.850,9.800,9.320,9.260,9.070,9.070,9.060,9.060,9.060,8.691,9.483,9.025,8.879,8.787,8.918

,3,8.870,9.250,8.780,9.850,9.330,9.710,8.650,9.450,8.950,8.690,9.110,9.350,9.350,9.350,9.178,9.508,9.450,8.752,8.852,8.422

,4,,,,,,,,,,,,,,,,,,,,

,5,,,,,,,,,,,,,,,,,,,,

平均值(X),,8.913,8.863,9.173,9.170,9.443,9.337,9.130,9.453,9.277,9.070,9.323,9.230,9.230,9.230,8.958,9.549,8.959,8.730,8.716,8.770

全距(R),,0.410,1.420,0.600,1.130,0.340,0.860,1.150,0.270,0.670,0.760,0.720,0.290,0.290,0.290,0.487,0.172,1.049,0.320,0.343,0.549

,,,,,,,,,,,,,,,,,,,,,,

,X,9.126,,UCLx=X+A2R,,9.744,,UCLr=D4R,,1.557,,A2,1.020,,D3,0,注:,"1)每次測量數(shù)據(jù)不少于三個。

2)每組測量數(shù)據(jù)數(shù)量應統(tǒng)一。",,,

,R,0.606,,LCLx=X-A2R,,8.508,,LCLr=D3R,,0.000,,,,,D4,2.57,,,,,

,,,,,,,,,,,,,,,,,,,,,,

X均值,,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126

UCLx,,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744

LCLx,,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508

R均值,,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606

UCLr,,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557

LCLr,,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000

由以上數(shù)據(jù)總得控制圖,,,,,,,,,,,,,,,,,,,,,

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結果判定:,,所有X值

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