激光干涉儀原理介紹講解

1、RENISHAWffiapply Innovation激光干涉儀原理介紹雷尼紹青島辦韓克新4/15/2013Slide 1RENISHAWSapply Innovation基本概念-激光干涉儀什么是激光干涉儀:利用激光作為長(zhǎng)度基準(zhǔn)，對(duì)數(shù)控設(shè)備（加工中心、三 座標(biāo)測(cè)量機(jī)等）的位置精度（定位精度、重復(fù)定位 梢度等）、幾何精度（俯仰扭擺角度、直線度、垂 直度等）進(jìn)行精密測(cè)量的精密測(cè)量?jī)x器。4/15/2013Slide 2基本概念一機(jī)床精度的21項(xiàng)誤差For Linear measurement (3): xdx vdy zdzFor Angular measurement (9):Av Bx Cx

2、Ay By Cy Az Bz CzFor Straightness measurement (6): xdy xdz ydx ydz zdx zdyFor Squareness measurement (3)XZ, XY, YZRENISHAWSapply Innovation基本概念-激光及其特點(diǎn)-激光輸出町視為一束匸弦波雷尼紹XL-80所用的激光的波長(zhǎng)是633nm.-激光具有三個(gè)重要特性：激光波長(zhǎng)非常穩(wěn)定，可以精密測(cè)量測(cè)量的要求。激光波長(zhǎng)非常短，可以用于高精度測(cè)量。激光具有干涉特性?；靖拍?激光的產(chǎn)生氮眾激光管 LASERF Light AmpWicabon by Stimulated

3、Emiion of RadiationB* M 壬亍 尿；隻彥岌射線旳 放射達(dá)到力的放天田韋尢夫多鐵臺(tái)代位移干沁IWMMttUHeNe)澈光管.這整澈光1T典有6331* (nm)的茨長(zhǎng)SI氮?dú)菁ま痰勋E松豉卻丁圻忌：當(dāng)愿上浄梧空和至啜之司弐 淚合氣體咳激發(fā) 形成減光光衣當(dāng)激光元克左運(yùn)個(gè)反罷心1司廉回共庶盯瀕尤光強(qiáng)豺放大-此光才封出泊後反茫厲 貳力輸出激光尢克如果兩束光相位相同，光波會(huì)疊加增強(qiáng)，表 現(xiàn)為亮條紋。相消干涉如果相位相反，則光波會(huì)相互抵消，t 暗條紋。RENISHAWapply Innovation基本概念一激光的干涉特性線性測(cè)量原理安裝方式:RENISHAWKiapply Innov

4、ation線性測(cè)量光路圖線性測(cè)量原理c （移動(dòng)反射鏡:-從激光頭發(fā)出的激光被分光鏡（A）分為2束光。-一束光經(jīng)過周定的反射鏡形成參考光.-刃一束激光經(jīng)過移動(dòng)的反射鏡（C）形成測(cè)就光.4/15/2013-反射光和測(cè)ht光經(jīng)過分光鏡版匯合,并IL彼此T涉.Slide 9RENISHAWKapply Innovation測(cè)量原理參考光：固定不動(dòng)測(cè)量光：隨著反射鏡的移動(dòng)而移動(dòng)初反射 鏡相長(zhǎng)干涉相消干涉如果兩束光相位相同，則光波會(huì)疊加增強(qiáng)，如果相位相反，則光波會(huì)相互抵消,表現(xiàn)為亮條紋。為暗條紋。Slide 10線性測(cè)量原理激光干涉儀通過接收到的激光的明暗條 紋變化，再通過電子細(xì)分，從而知道距 離的細(xì)微和

5、準(zhǔn)確變化。4/15/2013Slide 11RENISHAWSapply Innovation線性測(cè)量4/15/2013Slide 12100Intern ationalU.S.A.U.K.JapanChinaGerma nyFrance激光干涉儀測(cè)量與國(guó)際標(biāo)準(zhǔn) ISO 230-2(1997)- ASME B5.54BS 3800 JIS B6330GB 10931-89 VDI 3441 E60-099RENISHAW3apply Innovation角度測(cè)量1 1安裝方式4/15/2013Slide 15RENISHAWSapply Innovation4/15/2013Slide 16角

6、度測(cè)量0 = Sin 0 = d / SRENISHAWSapply Innovation直線度測(cè)量The outgoing beam from the laser passes through the straightness interferometer which spirts il into two beams which dix small angle and are directed io the straightness reflector. The beams are then reflect ad from the straightness reflector an alon

7、g a new path to th straightness interferometer as shown in Figure 1. At lhe straightness interferometer lhe two bean converged and a single beam is returnwd to the entry port in the laser head.STRlGHTriESG ERRORaxis ofSTRXMGHTMEQSIIZTEPfEPOICTEPFigme 1 - Principle of measurementThe straightness is m

8、edGurdd by detecting the optical path change from 令 relalix htdrl dipldcomord bQhvggn the mlerf nd the rMflctor The stfiightns md$ur*imint can be in 0 horizontal or vertical plsne depending on the orientation of b straightness interferometer and reflector Figure 1 shovs the set-up for & horizontal s

9、traightness measuremenlRENISHAWSapply Innovation直線度測(cè)量RENISHAW9apply Innovation直線度測(cè)量1 1The easiest way to understand how the system detects straightness deviations is t imagine what happens to the relative path lengths of Beam 1 and Beam 2 if the straightness reflector moves sidewaysAs the reflector

10、is moved upwards, Beam path 1 gets Ion ger and Beam path 2 gets shorterThis change in the relative path lengths causes a change in the interference signal in tensity as the interfere nee cycles between con structive and destructive interfere n The detecti on unit detects these changes and con verts

11、them to a reading that is proportional to the change in relative path length.This is then multiplied by the appropriate factor to give the amount of sideways mol of the reflector.Straightness reading Change in path length2 x Sin (0/2)4/15T2013Slide 22垂直度測(cè)量RENISHAWSapply Innovation垂直度測(cè)量分別測(cè)量2個(gè)軸的直線度，然后

12、將兩者進(jìn)行運(yùn)算，得出垂直度Step 1:Step 2:RENISHAWffiapply Innovation平面度測(cè)量4/15/2013Slide 25RENISHAWffiapply Innovation平面度測(cè)量平面度測(cè)量方法網(wǎng)格法測(cè)量原理訂 4ME PLATE對(duì)角線法PLXFElocaxiomof FeerRangeUnlimitedAccuracy1 arc secResolution0.2 arc secMax velocity30rpm (step 10degRemarkOperating tempera 0 to 40 degCRENISHAWapply Innovation回轉(zhuǎn)

13、軸測(cè)量RX10RENISHAWapply Innovation二回轉(zhuǎn)軸測(cè)量RX10Angular RcQcctorReflector Mount 葉10 &仙曲 、fRotary TndexerClamping PlateML10 LaserAngular InterferometerTripod -Rotary AxisBeing Calibrated為什麼需要補(bǔ)償？1 1激光波氏是高測(cè)量桔度的某礎(chǔ)。9然而激光的波2會(huì)受到空氣折射率的影響。空氣折射率又受到人氣壓.溫度和濕度的影響。雖然空氣折射率對(duì)激光波長(zhǎng)的影響不人，但是在島桔度測(cè)量的情況 下，補(bǔ)償是非常必要的。環(huán)境補(bǔ)償單元RENISHAWS

14、apply Innovationn濕度0 Accuracy: Renishaw XC80環(huán)境Accuracy: 0.2 CJ）空氣壓力V Accuracy: 1.0 mbar補(bǔ)償單元的高性能可以 保證在040度環(huán)境溫度 范圍內(nèi)，和650-1150 mbarfKj環(huán)境大氣壓范 圍內(nèi)得到最高的測(cè)量精 度。RENISHAWffiapply Innovation環(huán)境補(bǔ)償單元 監(jiān)控4個(gè)參數(shù)：-空氣溫度 -空氣壓力 波長(zhǎng)補(bǔ)償-相對(duì)濕度 /-材料溫度材料補(bǔ)償System AccuracyXL-80 Systemwdd76543210Material expansion normalisationLinear

15、 Measurenaccuracy0510152025303540accuracy 0Environmental temperature (deg c)RENISHAWapply Innovation如果沒有補(bǔ)償會(huì)產(chǎn)生哪些誤差?Error source2 Altitude (100m)一 Air temperature (259) Air humidity (70%) Air pressure (970mbare) Laser frequency (0.05ppm)201816 04 2*12 10 w 8620Uncompe nsated Compensatedl degree Celsiu

16、s3.3 mbar50%30%-如卜的變化會(huì)帶來lppm的變化： 空氣溫度空氣壓力相對(duì)濕度(at 20 degree Celsius) 相對(duì)濕度(at 40 degree Celsius)材料溫度補(bǔ)償在沒有溫控的環(huán)境下，垠大的一個(gè)誤差來源于機(jī)床的膨脹和收標(biāo)準(zhǔn)長(zhǎng)度的控制溫度是20QC,所以需要一個(gè)修正，即：熱膨脹補(bǔ)償，或標(biāo)準(zhǔn)化。例如：-鋼的熱膨脹系數(shù)是12ppm/ C-在20 QC F，一支1000 mm的鋼棒，在28 9下，其長(zhǎng)度將是1000+1000x12x8x1（ 1000.096 mm.-但是激光的讀數(shù)（熱補(bǔ)償后）將是1000.000 mmRENISHAWSapply Innovation材料的熱膨脹系數(shù)MaterialApplicationExpansion coefficientppm/Fppm/CIron/steelMachine structural elements, rack and pinion dries, ballscrews6.511.7Alu