CF制程簡(jiǎn)介課件

ColorFilter的制程介紹For:NBLCMF.A.TeamAuthor:Jessica_LinDate:2009/1/8目錄:1.何謂ColorFilter及應(yīng)用2.制程流程圖3.制程順序簡(jiǎn)介4.補(bǔ)充說(shuō)明:(1).色彩搭配(2).TFT-LCD基本架構(gòu)(3).TFT_LCD產(chǎn)業(yè)架構(gòu)說(shuō)明:ColorFilter(彩色濾光片)是組成液晶面板中最重要的關(guān)鍵零組件:占TFT-LCD面板制造總成本約28%，制造生產(chǎn)方式是在素玻璃基板上用紅、綠、藍(lán)色的光阻液原料,用黃光蝕刻方式或是其它技術(shù)(如顏料分散或轉(zhuǎn)印方法)形成與紅、綠、藍(lán)三原色的長(zhǎng)條形數(shù)組的基板。當(dāng)背面的光源穿透每一個(gè)畫(huà)素(pixel)內(nèi)的紅、綠、藍(lán)濾光片與被電路驅(qū)動(dòng)呈現(xiàn)灰階的液晶后，會(huì)變成有不同比例的三種原色(RGB)之混合光。肉眼所看到的彩色影像就是光透過(guò)一個(gè)個(gè)有濾光片的液晶小格子變成之混合光組成的結(jié)果。所謂的TFT-LCD面板制造，簡(jiǎn)單的說(shuō)，就是將一片彩色濾光片和一片有主動(dòng)矩陣(ActiveMatrix)的玻璃基板組合，灌入液晶后兩邊貼上偏光板，再加上驅(qū)動(dòng)電路及框架的過(guò)程。ColorFilter的應(yīng)用彩色濾光片目前廣泛的應(yīng)用在:1.薄膜晶體管液晶顯示器(TFT-LCD)2.超扭轉(zhuǎn)像列型液晶顯示器(STN-LCD)3.電漿顯示器(PDP)等平面顯CF制作流程圖黑色矩陣制程(BMpatterningprocess)Unpacker&Initialcleaner鉻膜濺鍍鉻玻璃清洗正光阻涂布(1)素玻璃投入1.Crsputtering鉻玻璃正光阻涂布(2)CrsputterCrglassPre-cleanerSlitcoaterSpincoater2.BMphotoline蝕刻去光阻紫外線曝光顯影烘烤去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloperHotplate3.EtchinglineEtchingStrippingBMpatternglass真空干燥VacuumDryer預(yù)烘烤與冷卻Pre-bake&CoolplateRGB制程(RGBprocess)紅色光阻涂布(1)紅色光阻涂布(2)Pre-cleanerSlitcoaterSpincoaterBMpatternglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloper烘烤Oven1.RLine真空干燥VacuumDryer預(yù)烘烤與冷卻Pre-bake&CoolplateDefectinsp.RGB制程(RGBprocess)綠色光阻涂布(1)綠色光阻涂布(2)Pre-cleanerSlitcoaterSpincoaterRglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloper烘烤Oven2.GLine真空干燥VacuumDryer預(yù)烘烤與冷卻Pre-bake&CoolplateDefectinsp.RGB制程(RGBprocess)藍(lán)色光阻涂布(1)藍(lán)色光阻涂布(2)Pre-cleanerSlitcoaterSpincoaterR,Gglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloper3.BLine真空干燥VacuumDryer預(yù)烘烤與冷卻Pre-bake&CoolplateDefectInspection缺陷檢查機(jī)ITO制程(ITOsputteringprocess)ITOpre-cleaner氧化銦錫膜濺鍍R,G,B璃投入ITO玻璃ITOsputterITOglassRepairUVasher紫外線灰化修補(bǔ)烘烤OvenMVA制程(Multi-domainVerticalAlignment)正光阻涂布(1)正光阻涂布(2)Pre-cleanerSlitcoaterSpincoaterITOglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloper烘烤Oven4.SLine真空干燥VacuumDryerPre-bake&Coolplate預(yù)烘烤與冷卻Defectinsp.最終檢查(Finalinspection)Macroinspection巨觀檢查AOIPre-cleaner光學(xué)檢查前清洗AOI(Auto-OptoInspection)光學(xué)檢查Microreview微觀檢查Judgement&Sorting判定與質(zhì)量分類出貨Shipping非MVA產(chǎn)品14.1“MVA產(chǎn)品15“&17.4”CF制程檢查項(xiàng)目1.黑色矩陣制程(BMpatterningprocess)1.1.BMPHOTO&EtchingLINE顯影后缺陷檢查ADI(AfterDeveloperInspection)巨觀檢查(Macroreview)1231.TotalPitch(長(zhǎng)寸法)

2.CD(CriticalDimension)

3.MarktoEdge(端寸法)蝕刻后缺陷檢查AEI(AfterEtcherInspection)1724BAD4CEdcbaRGB2.RGB制程(RGBprocess)CF制程檢查項(xiàng)目121.PixelCD

2.Overlay

3.厚度4.色度量測(cè)33.ITO制程(ITOSputteringprocess)CF制程檢查項(xiàng)目1.色度量測(cè)4.MVA制程(Multi-domainVerticalAlignment)CF制程檢查項(xiàng)目1.厚度量測(cè)

2.寬度量測(cè)

3.Overlay量測(cè)123THEEDNTHANKSFORYOURATTENDANCE補(bǔ)充說(shuō)明:1.色彩搭配我們能看到顏色是靠三個(gè)元素相互作用而成：1.光源、物體的反射特性。2.人體視網(wǎng)膜。3.腦部視覺(jué)皮質(zhì)區(qū)對(duì)光波的