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1、附件 1:外文資料翻譯譯文傳感器新技術(shù)的發(fā)展傳感器是一種能將物理量、化學(xué)量、生物量等轉(zhuǎn)換成電信號的器件。輸出信號有不同形式,如電壓、電流、頻率、脈沖等,能滿足信息傳輸、處理、記錄、顯示、控制要求,是自動檢測系統(tǒng)和自動控制系統(tǒng)中不可缺少的元件。如果把計算機比作大腦,那么傳感器則相當(dāng)于五官,傳感器能正確感受被測量并轉(zhuǎn)換成相應(yīng)輸出量,對系統(tǒng)的質(zhì)量起決定性作用。自動化程度越高,系統(tǒng)對傳感器要求越高。在今天的信息時代里,信息產(chǎn)業(yè)包括信息采集、傳輸、處理三部分,即傳感技術(shù)、通信技術(shù)、計算機技術(shù)?,F(xiàn)代的計算機技術(shù)和通信技術(shù)由于超大規(guī)模集成電路的飛速發(fā)展,而已經(jīng)充分發(fā)達后,不僅對傳感器的精度、可靠性、響應(yīng)速度
2、、獲取的信息量要求越來越高,還要求其成本低廉且使用方便。顯然傳統(tǒng)傳感器因功能、特性、體積、成本等已難以滿足而逐漸被淘汰。世界許多發(fā)達國家都在加快對傳感器新技術(shù)的研究與開發(fā),并且都已取得極大的突破。如今傳感器新技術(shù)的發(fā)展,主要有以下幾個方面:利用物理現(xiàn)象、化學(xué)反應(yīng)、生物效應(yīng)作為傳感器原理,所以研究發(fā)現(xiàn)新現(xiàn)象與新效應(yīng)是傳感器技術(shù)發(fā)展的重要工作,是研究開發(fā)新型傳感器的基礎(chǔ)。日本夏普公司利用超導(dǎo)技術(shù)研制成功高溫超導(dǎo)磁性傳感器,是傳感器技術(shù)的重大突破,其靈敏度高,僅次于超導(dǎo)量子干涉器件。它的制造工藝遠比超導(dǎo)量子干涉器件簡單。可用于磁成像技術(shù),有廣泛推廣價值。利用抗體和抗原在電極表面上相遇復(fù)合時,會引起電
3、極電位的變化,利用這一現(xiàn)象可制出免疫傳感器。用這種抗體制成的免疫傳感器可對某生物體內(nèi)是否有這種抗原作檢查。如用肝炎病毒抗體可檢查某人是否患有肝炎,起到快速、準(zhǔn)確作用。美國加州大學(xué)巳研制出這類傳感器。傳感器材料是傳感器技術(shù)的重要基礎(chǔ),由于材料科學(xué)進步,人們可制造出各種新型傳感器。例如用高分子聚合物薄膜制成溫度傳感器;光導(dǎo)纖維能制成壓力、流量、溫度、位移等多種傳感器;用陶瓷制成壓力傳感器。高分子聚合物能隨周圍環(huán)境的相對濕度大小成比例地吸附和釋放水分子。高分子電介常數(shù)小,水分子能提高聚合物的介電常數(shù)。將高分子電介質(zhì)做成電容器,測定電容容量的變化,即可得出相對濕度。利用這個原理制成等離子聚合法聚苯乙烯
4、薄膜溫度傳感器,其有以下特點:測濕范圍寬;溫度范圍寬,可達-400 +1500;響應(yīng)速度快,小于1S;尺寸小,可用于小空間測濕;溫度系數(shù)小。陶瓷電容式壓力傳感器是一種無中介液的干式壓力傳感器。采用先進的陶瓷技術(shù)和厚膜電子技術(shù),其技術(shù)性能穩(wěn)定,年漂移量小于0.1%F.S, 溫漂小于±0.15%/10K, 抗過載強, 可達量程的數(shù)百倍。測量范圍可從0到60mpa。德國E+H公司和美國Kahlo 公司產(chǎn)品處于領(lǐng)先地位。光導(dǎo)纖維的應(yīng)用是傳感材料的重大突破,其最早用于光通信技術(shù)。在光通信利用中發(fā)現(xiàn)當(dāng)溫度、壓力、電場、磁場等環(huán)境條件變化時,引起光纖傳輸?shù)墓獠◤姸取⑾辔?、頻率、偏振態(tài)等變化,測量光
5、波量的變化,就可知道導(dǎo)致這些光波量變化的溫度、壓力、電場、磁場等物理量的大小,利用這些原理可研制出光導(dǎo)纖維傳感器。光纖傳感器與傳統(tǒng)傳感器相比有許多特點:靈敏度高,結(jié)構(gòu)簡單、體積小、耐腐蝕、電絕緣性好、光路可彎曲、便于實現(xiàn)遙測等。光纖傳感器日本處于先進水平。如Idec Izumi公司和 Suns 公司。光纖傳感受器與集成光路技術(shù)相結(jié)合,加速光纖傳感器技術(shù)的發(fā)展。將集成光路器件代替原有光學(xué)元件和無源光器件,使光纖傳感器有高的帶寬、低的信號處理電壓,可靠性高,成本低。半導(dǎo)體技術(shù)中的加工方法有氧化、光刻、擴散、沉積、平面電子工藝,各向?qū)愿g及蒸鍍,濺射薄膜等,這些都已引進到傳感器制造。因而產(chǎn)生了各種
6、新型傳感器,如利用半導(dǎo)體技術(shù)制造出硅微傳感器,利用薄膜工藝制造出快速響應(yīng)的氣敏、濕敏傳感器,利用濺射薄膜工藝制壓力傳感器日本橫河公司利用各向?qū)愿g技術(shù)進行高精度三維加工,制成全硅諧振式壓力傳感器。核心部分由感壓硅膜片和硅膜片上面制作的兩個諧振梁結(jié)成,兩個諧振梁的頻差對應(yīng)不同的壓力,用頻率差的方法測壓力,可消除環(huán)境溫度等因素帶來的誤差。當(dāng)環(huán)境溫度變化時,兩個諧振梁頻率和幅度變化相同,將兩個頻率差后,其相同變化量就能夠相互抵消。其測量最高精度可達0.01%FS。美國 Silicon Microstructure Inc.(SMI) 公司開發(fā)一系列低價位線性度在0.1%到 0.65%范圍內(nèi)的硅微壓
7、力傳感器, 最低滿量程為0.15psi(1KPa), 其以硅為材料制成, 具有獨特的三維結(jié)構(gòu), 輕細微機械加工 , 和多次蝕刻制成惠斯登電橋于硅膜片上, 當(dāng)硅片上方受力時, 其產(chǎn)生變形 , 電阻產(chǎn)生壓阻效應(yīng)而失去電橋平衡, 輸出與壓力成比例的電信號.象這樣的硅微傳感器是當(dāng)今傳感器發(fā)展的前沿技術(shù), 其基本特點是敏感元件體積為微米量級, 是傳統(tǒng)傳感器的幾十、幾百分之一。在工業(yè)控制、航空航天領(lǐng)域、生物醫(yī)學(xué)等方面有重要的作用,如飛機上利用可減輕飛機重量,減少能源。另一特點是能敏感微小被測量,可制成血壓壓力傳感器。中國航空總公司北京測控技術(shù)研究所,研制的 CYJ 系列濺謝膜壓力傳感器是采用離子濺射工藝加
8、工成金屬應(yīng)變計,它克服了非金屬式應(yīng)變計易受溫度影響的不足,具有高穩(wěn)定性,適用于各種場合,被測介質(zhì)范圍寬,還克服了傳統(tǒng)粘貼式帶來的精度低、遲滯大、蠕變等缺點,具有精度高、可靠性高、體積小的特點,廣泛用于航空、石油、化工、醫(yī)療等領(lǐng)域。集成傳感器的優(yōu)勢是傳統(tǒng)傳感器無法達到的,它不僅僅是一個簡單的傳感器,其將輔助電路中的元件與傳感元件同時集成在一塊芯片上,使之具有校準(zhǔn)、補償、自診斷和網(wǎng)絡(luò)通信的功能,它可降低成本、增加產(chǎn)量,1萬美國LUCAS、 NOVASENSO公司開發(fā)的這種血壓傳感器,每星期能生產(chǎn)R只。智能化傳感器是一種帶微處理器的傳感器,是微型計算機和傳感器相結(jié)合的成果,它兼有檢測、判斷和信息處理
9、功能,與傳統(tǒng)傳感器相比有很多特點:具有判斷和信息處理功能,能對測量值進行修正、誤差補償,因而提高測量精度;可實現(xiàn)多傳感器多參數(shù)測量;有自診斷和自校準(zhǔn)功能,提高可靠性;測量數(shù)據(jù)可存取,使用方便;有數(shù)據(jù)通信接口,能與微型計算機直接通信。把傳感器、信號調(diào)節(jié)電路、單片機集成在一芯片上形成超大規(guī)模集成化的高級智能傳感器。美國HONY WELL公司ST-3000 型智能傳感器,芯片尺寸才有3 × 4 × 2mm3,采用半導(dǎo)體工藝,在同一芯片上制成CPU、 EPROM、靜壓、壓差、溫度等三種敏感元件。智能化傳感器的研究與開發(fā),美國處于領(lǐng)先地位。美國宇航局在開發(fā)宇宙飛船時稱這種傳感器為靈巧
10、傳感器(Smart Sensor ) ,在宇宙飛船上 這種傳感器是非常重要的。我國在這方面的研究與開發(fā)還很落后,主要是 因為我國半導(dǎo)體集成電路工藝水平有限。傳感器的發(fā)展日新月異,特別是80年代人類由高度工業(yè)化進入信息時代以來,傳感器技術(shù)向更新、更高的技術(shù)發(fā)展。美國、日本等發(fā)達國家的傳感器技術(shù)發(fā)展最快,我國由于基礎(chǔ)薄弱,傳感器技術(shù)與這些發(fā)達國家相比有較大的差距。因此,我們應(yīng)該加大對傳感器技術(shù)研究、開發(fā)的投入,使我國傳感器技術(shù)與外國差距縮短,促進我國儀器儀表工業(yè)和自化化技術(shù)的發(fā)展。附件 2:外文原文Development of Sensor New TechnologySensor is one
11、kind component which can transform the physical quantity, chemistry quantity and the biomass into electrical signal. The output signal has the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can satisfy the signal transmission, processing, recording,
12、 and demonstration and control demands. So it is the automatic detection system and in the automatic control industry .If automatic Technology is used wider, then sensor is more important. In information age, the information industry includes information gathering, transmission, process three parts,
13、 namely sensor technology, communication, computer technology. Because of ultra large scale integrated circuit s rapid development after having beendeveloped Modern computer technology and communication, not only requests sensor precision reliability, speed of response and gain information content r
14、equest more and more high but also requests its cost to be inexpensive. The obvious traditional sensor is eliminated gradually because of the function, the characteristic, the volume, the cost and so on. As world develop many countries are speeding up to the sensor new technology rse search and the
15、development, and all has obtained the enormous breakthrough. Now the sensor new technology development mainly has following several aspects:Using the physical phenomenon, the chemical reaction, the biological effect as the sensor principle therefore the researches which discovered the new phenomenon
16、 and the new effect are the sensor technological improving ways .it is important studies to developed new sensor s the foundation. Japanese Sharp Corporation uses the superconductivity technology to develop successfully the high temperature superconductivity magnetic sensor and get the sensor techno
17、logy significant breakthrough. Its sensitivity is so high and only inferior in the superconductivity quantum interference component. Its manufacture craft is far simpler than the superconductivity quantum interference component. May use in magnetism image formation technology. So it has the widespre
18、ad promoted value.Using the immune body and the antigen meets one another compound when the electrode surface. It can cause the electrode potential change and use this phenomenon to be possible to generate the immunity sensor. The immunity sensor makes with this kind of immune body may to some organ
19、ism in whether has this kind of ant original work inspection. Like may inspect somebody with the hepatitis virus immune body whether contracts the hepatitis, plays to is fast, the accurate role. The US UC sixth branch has developed this kind of sensor.The sensor material is the important foundation
20、for sensor technology, because the materials science is progressive and the people may make each kind of new sensor For example making the temperature sensor with the high polymer thin film; The optical fiber can make the pressure, the current capacity, the temperature, the displacement and so on th
21、e many kinds of sensors; Making the pressure transmitter with the ceramics. The high polymer can become the proportion adsorption and the release hydrogen along with the environment relative humidity size. The high polymer electricity lies between the constant to be small, the hydrogen can enhance t
22、he polymer the coefficient of dialectical loss. Making the capacitor the high polymer dielectric medium, determines the electric capacity cape city the change, then obtains the relative humidity. Making the plasma using this principle to gather the legitimate polystyrene film temperature sensor belo
23、w, it has the characteristic.Measured the wet scope is wide; The temperature range is wide, may reach -400 +1,500 ; The speed of response is quick, issmaller than 1S; The size is small, may use in the small space measuring wet; The temperature coefficient is small.The ceramic electric capacity type
24、pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy film electronic technology, its technical performance is stable, the year drifting quantity is smaller than 0.1%F.S, warm floats is smaller than
25、177; 0.15%/10K, anti- overloads strongly, may reach the measuring range several hundred times. The survey scope may from 0 to 60mpa.German E+H Corporation and the American Kahlo Corporation product is at the leading position.The optical fiber application is send the material significant breakthrough
26、, its uses in most early the optical communication techniques. In the optical communication use discovered works as environmental condition change and so on the temperature, pres-sure, electric field, magnetic field, causes the fiber optic transmission light wave intensity, the phase, the frequency,
27、 change and so on the polarization condition, the survey light wave quantity change, may know causes these light wave physical quantity the and so on quantitative change temperature, pressure ,electric field, magnetic field size, uses these principles to be possible to develop the optical fiber sens
28、or. The optical fiber sensor and the traditional sensor compare has many characteristics: Sensitivity high, thestructure simple, the volume small, anti-corrosive, the electric insulation good, the path of rays may be curving, be advantageous for the realization telemeter and so on. Optical fiber sen
29、sor Japan is in the advanced level. Like Idec Izumi Corporation and Sun x Corporation. The optical fiber send receiver and the integrated path of rays technology unify, accelerates the optical fiber sensor technology development. Will integrate the path of ray s componentto replace the original opti
30、cs part and the passive light component;enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low.In semiconductor technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the pla
31、ne electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the
32、 thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.The Japanese horizontal river company uses various guides corrosion technology to carry on the high accuracy three dimensional processing; the system helps the
33、 silicon resonance type pressure transmitter. The core partially presses two resonant Liangby the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liang's frequency difference correspondence different pressure, measures the pressure with the
34、frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity can counterbalance mutually. Itmo st
35、s surveyhigh accuracy may reach 0.01%FS.American Silicon Microstructure Inc.(SMI) the company develops a series of low ends, linear in 0.1% to 0.In 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1KPa), it makes take the silicon as the material, has the uniq
36、ue three dimensional structure, the light slight machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti- effect but to lose the bridge balance, the output an
37、d the pressure becomes the proportion the electrical signal.Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volumeis a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry con
38、trol, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter.The Chinese aviation main corporation Beijing observ
39、ation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily the temperature influence insufficiency, has the high
40、stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision which the type brought, sluggish big, shortcoming and so on slow change, had the precision high, the re-liability is high, the volume small characteristi
41、c, widely used in domain and so on aviation, petroleum, chemical industry, medical service.Integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on tog
42、ether the chip, will cause it to have the calibration, to compensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Corporation will develop, each week will be able to produ
43、ce 10,000.The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor unifies, it has at the same time the examination, the judgment and the information processing function, compares with the traditional sensor has very many characteri
44、stics:Has the judgment and the information processing function, can carry on the revision, the error to the observed value compensates, thus enhancement measuring accuracy; May realize the multi-sensor multi parameters survey; Has from the diagnosis and from the calibration function, enhances the reliability; The survey data may deposit and withdraw, easy to operate; Has the data communication interface, can and the microcomputer direct communication.The sensor, the signal adjustment electric circuit, the monolithic integrated circuit int
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